Skip to main content

Ultra-Pure Water and
Wastewater Analysis
for Semiconductor Mfg

Ultra-Pure Water and Wastewater Analysis for Semiconductor Mfg

In the semiconductor industry numerous processes need ultra-pure water for their operation. Any disturbance in water quality may lead to a cost intensive plant shut down – this should be avoided. Therefore, continuous and fast water analysis is required to meet the high-quality standards set.  The high qua­lity and pu­rity re­quire­ments for pro­duct and pro­cess safe­ty are met by accu­rate and re­liable on-line TOC water quality moni­to­ring in the low­est le­vels.  

Ultra-pure water (UPW) is water that has been purified to high levels of specification. Ultra-pure water is essential to every laboratory.  UPW must not contain any detectable endotoxins.  Ultra-pure water is water that has been purified to an extremely high degree, typically by using a combination of physical, chemical, and biological methods to remove all impurities. This type of water is important for a variety of applications in industries such as electronics, pharmaceuticals, and semiconductors, where even small impurities can have significant negative effects.

ultra-pure water (upw) ANALYSIS

Our TOC (Total Organic Carbon) water analyzer is a device used for measuring the concentration of organic carbon in ultra-pure water samples. These analyzers are commonly used in industries such as semiconductor manufacturing, pharmaceuticals, and power generation, where ultra-pure water is required.

It works by using a process known as the “UV-persulfate” oxidation method. This method involves exposing the water sample to high-intensity UV radiation, which causes the organic carbon in the sample to break down into carbon dioxide (CO2).

Ultra-pure water is used in semiconductor manufacturing for several reasons:

  • Contamination Control: Ultra-pure water is essential for controlling contamination in the semiconductor manufacturing process. Even small amounts of impurities in the water can cause defects in the semiconductor products, leading to reduced yield and lower quality.
  • Process Control: Ultra-pure water is also used for controlling the process parameters during the semiconductor manufacturing process. The properties of the water, such as its resistivity and pH, can have a significant impact on the performance and reliability of the semiconductor devices.
  • Cleaning: Ultra-pure water is used extensively for cleaning semiconductor wafers and other components during the manufacturing process. The high purity of the water ensures that there are no residual contaminants left on the surface of the components.
  • Etching: Ultra-pure water is also used for etching and rinsing semiconductor components during the manufacturing process. The high purity of the water ensures that there are no unwanted reactions or byproducts formed during the etching process.

  • SEMICONDUCTOR WASTEWATER MONITORING

    Our QuickTOCultra TOC water analysis is a type of Total Organic Carbon (TOC) analyzer that is commonly used for measuring the concentration of organic carbon in semiconductor wastewater. The QuickTOCultra uses a process known as high-temperature combustion to oxidize the organic carbon in the wastewater sample and produce CO2, which is then measured using a non-dispersive infrared (NDIR) detector.

    Here’s how our QuickTOCultra works in semiconductor wastewater:

    • Sample Preparation: The semiconductor wastewater sample is first collected and prepared for analysis. The sample is typically filtered to remove any suspended solids that could interfere with the analysis.
    • Sample Injection: A small volume of the prepared wastewater sample is then injected into the QuickTOCultra instrument.
    • Combustion: The wastewater sample is then transported to a high-temperature combustion furnace, where it is combusted at temperatures above 950°C. During this process, the organic carbon in the sample is oxidized to produce CO2.
    • Detection: The CO2 that is produced during the combustion process is then transported to an NDIR detector, where it is measured based on its absorption of infrared light.
    • Data Analysis: The data obtained from the NDIR detector is then used to calculate the concentration of organic carbon in the wastewater sample.

    The QuickTOCultra is highly accurate and can detect organic carbon concentrations as low as a few parts per billion (ppb). This makes it an essential tool for monitoring the quality of semiconductor wastewater, where even small amounts of organic contaminants can have a significant impact on the environment and public health.

  • ULTRA-PURE WATER QUALITY ANALYSIS

    Our LAR™ QuickTOCultra™ TOC water quality analyzer is used for the measurement of Total Organic Carbon (TOC) levels in ultra-pure water (UPW). Ultra-pure water is used extensively in the semiconductor industry for cleaning and rinsing processes during the production of microchips and other semiconductor devices.  The QuickTOCultra TOC water analyzer is a water analyzer that measures total organic carbon (TOC) in wastewater, process water, and ultra-pure water applications. There are several benefits to using this analyzer:

    • Accuracy: Uses a highly sensitive UV oxidation method to measure TOC, which provides accurate results even at low levels.
    • Speed: Provides TOC results in as little as two minutes, allowing for real-time monitoring of water quality.
    • Low Maintenance: The analyzer has a low maintenance requirement due to its self-cleaning feature, which minimizes the need for manual cleaning and reduces downtime.
    • Versatility: Measure TOC in a wide range of water samples, including wastewater, process water, and ultra-pure water, making it suitable for use in a variety of industries.
    • Regulatory Compliance: Monitoring TOC levels is often a regulatory requirement in many industries, and the QuickTOCultra can help companies comply with these regulations and avoid potential fines or penalties.
  • PURE WATER QUALITY ANALYSIS

    Our LAR™ QuickTOCtrace™ TOC water quality analyzer is designed to monitor total organic carbon (TOC) levels in ultra-pure water. The analyzer uses a unique and highly sensitive technique known as ‘chemiluminescence’ to measure TOC levels in water samples.

    Some of the benefits of using the QuickTOCtrace TOC water analyzer include:

    • High Sensitivity: Uses chemiluminescence technology, which is highly sensitive and can detect TOC levels as low as 0.5 parts per billion (ppb).
    • Fast Analysis: Can analyze water samples in as little as three minutes, providing real-time data to operators and minimizing downtime.
    • Wide Range of Applications: Can be used to monitor ultra-pure water quality in a variety of industries, including semiconductor manufacturing, pharmaceuticals, and power generation.
    • Minimal Maintenance: Designed to be easy to use and requires minimal maintenance, reducing the need for downtime and saving on labor costs.
    • Compliance with Regulations: Can help companies comply with regulatory requirements for water quality monitoring and avoid potential fines or penalties.
    • Early Detection of Contaminants: Detects organic contaminants in ultra-pure water early, allowing operators to take corrective action before the quality of the end product is compromised.

water ANALYZERS BY INDUSTRY

To Top

Questions? We’re here to help.