CRDS Laser-Based Analyzer
TRACE METHANE ANALYZER FOR HIGH-PURITY GASES
Our TIGER OPTICS™ HALO™ 3 CH4 trace level methane gas analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation. It features our proven Cavity Ring-Down Spectroscopy-based trace gas sensor in a very compact and economic analyzer design, this versatile analyzer allows users to measure methane in most inert and passive gases with just one device. Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuild.
The HALO is ideally suited for many applications where trace gas measurement is extremely critical. These applications include silicon wafer manufacturing monitoring, fixed bulk gas continuous quality control, process tool monitoring, air separation, gas cylinder quality control and many other demanding applications.
DESIGNED FOR TRACE LEVEL METHANE ANALYSIS, THE HALO 3 CH4 OFFERS:
- Low single-digit parts per billion (ppb) methane detection capability in an array of gases
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range
- Low cost of ownership and operational simplicity
- Clean technology – no external calibration gases required
- Compact analyzer footprint
- NEW “CO2 Model” for ppb-level detection in pure carbon dioxide
APPLICATIONS
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| Standard Model | |||
| CH4 in N2 | 0 – 8 ppm | 1.6 ppb | 0.6 ppb |
| CH4 in He | 0 – 5 ppm | 1.1 ppb | 0.4 ppb |
| CH4 in Ar | 0 – 7 ppm | 1.4 ppb | 0.5 ppb |
| CH4 in H2 | 0 – 8 ppm | 1.6 ppb | 0.6 ppb |
| CH4 in O2 | 0 – 6 ppm | 1.1 ppb | 0.4 ppb |
| CO2 Model | |||
| CH4 in CO2 | 0 – 70 ppm | 35 ppb | 12 ppb |
| CH4 in N2 | 0 – 60 ppm | 30 ppb | 10 ppb |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL, 3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Wetted materials | 316 stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
| Gas connections | 1/4″ male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | Up to 1.8 slpm |
| Sample gases | Most inert, toxic, passive and corrosive matrices |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA per sensor |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
ANALYZE WITH EASE™
TRACE METHANE ANALYZER FOR HIGH-PURITY GASES
ANALYZE WITH EASE™
TRACE METHANE ANALYZER FOR HIGH-PURITY GASES
Learn about our service, technical support, spares, and our CRDS Analyzer | Performance Verification Program
Analyzer in service? Need a rental CRDS analyzer? Ask us how we can help.
SERVICE | SALES | TRAINING
Americas +1 (215) 656-4000
EMEA +49 69 20436910
China/APAC +86 400 086 0106
OTHER CRDS GAS ANALYZER SOLUTIONS
HALO KA™ H2O
HALO KA Max™ H2O
HALO KA Max™ CH4
HALO KA Max™ NH3
HALO Max QCL™ CO
HALO Max QCL™ CO2
Custom CRDS Gas Analysis Solutions
GO-cart™
HALO™ 3 CH2O
HALO™ 3 CO
HALO™ 3 CO2
HALO™ 3 D2O/HDO
HALO™ 3 H2O
HALO™ 3 CH4
HALO™ 3 HCl
HALO™ 3 NH3
HALO™ H2
HALO™ H2O in N2O
HALO™ OK
HALO™ LP H2O
HALO™ RP
HALO™ QRP
Spark™ H2O
Spark™ H2O in CO2
Spark™ CH4
Spark™ C2H2
Spark™ CO2
Spark+™ CO
Prismatic 3™
CO-rekt™
ALOHA+ H2O™
T-I Max™ HCl
T-I Max™ HF
T-I Max™ NH3
T-I Max™ CEM
T-I Max™ AIR CO2
T-I Max™ AIR CH4
Terms and Conditions of Sale - Extrel
Sellers-Agreement-Purchasing-Terms-PUR-0026-FR-rev3 - Extrel
Terms and Conditions – Process Insights Swiss AG - MBW
Terms and Conditions – Tiger Optics
Terms and Conditions – Process Insights AG - LAR
Terms and Conditions – Guided Wave
Terms and Conditions of Sale – COSA Xentaur