Our Tiger Optics HALO 3 HF trace level hydrogen fluoride gas analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that users of our Tiger Optics’ analyzers have come to know and expect. Featuring our proven Cavity Ring-Down Spectroscopy-based trace gas sensor in a very compact and economic analyzer design, this versatile instrument allows users to measure HF in most inert and passive gases with just one device. Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds. As a result, our HALO 3 is ideally suited to many applications where HF impurities are extremely critical, such as nitrogen trifluoride (NF3), sulfur hexafluoride (SF6) and fluorocarbon (CF4, C2F6, etc.) production and semiconductor utilization.
Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
---|---|---|---|
HF in N2 | 0 – 5 ppm | 0.4 ppb | 0.15 ppb |
HF in He | 0 – 1.3 ppm | 0.4 ppb | 0.05 ppb |
HF in SF6 | 0 – 8 ppm | 1.2 ppb | 0.4 ppb |
HF in NF3 | 0 – 7.5 ppm | 0.6 ppb | 0.2 ppb |
HF in CF4 | 0 – 6 ppm | 0.8 ppb | 0.3 ppb |
HF in C2F6 | 0 – 12 ppm | 1.6 ppb | 0.6 ppb |
HF in C3F8 | 0 – 12 ppm | 1.6 ppb | 0.6 ppb |
HF in C4F6 | 0 – 15 ppm | 15 ppb | 5 ppb |
HF in C4F8 | 0 – 14 ppm | 1.6 ppb | 0.6 ppb |
Performance | |
---|---|
Operating range | See Detection Capability table |
Detection limit (LDL, 3σ/24h) | See Detection Capability table |
Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
Accuracy (greater of) | ± 4% or LDL |
Speed of response | < 1 minute to 90% |
Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
Storage temperature | -10°C to 50°C |
Gas Handling System and Conditions | |
Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
Gas connections | 1/4” male VCR inlet and outlet |
Leak tested to | 1 x 10-9 mbar l / sec |
Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
Flow rate | Up to 1.8 slpm |
Sample gases | Most inert, toxic, passive and corrosive matrices |
Gas temperature | Up to 60°C |
Dimensions, H x W x D | |
Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
Sensor rack (fits up to two sensors) | 8.73″ x 19″ x 23.6″ (222 mm x 483 mm x 599 mm) |
Weight | |
Standard sensor | 28 lbs (12.7 kg) |
Electrical and Interfaces | |
Platform | Max series analyzer |
Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
Power requirements | 90 − 240 VAC, 50/60 Hz |
Power consumption | 40 Watts max. |
Signal output | Isolated 4−20 mA per sensor |
User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
USB, RS-232, RS-485, Modbus TCP (optional) | |
Data storage | Internal or external flash drive |
Certification | CE Mark |
Patents | |
U.S. Patent #7,277,177 |
Serani™ Max Analyzer Interface Software allows you to have remote access from your computer or laptop for our latest CRDS generation analyzers, such as the HALO KA Max and T-I Max. The Windows-based software package communicates with the analyzer through Ethernet and allows full control of the system conveniently from your desk.
Terms and Conditions of Sale - Extrel
Sellers-Agreement-Purchasing-Terms-PUR-0026-FR-rev3 - Extrel
Terms and Conditions – Process Insights Swiss AG - MBW
Terms and Conditions – Tiger Optics
Terms and Conditions – Process Insights AG - LAR
Terms and Conditions – Guided Wave
Terms and Conditions of Sale – COSA Xentaur
Copyright © 2023 Process Insights, Inc. All Rights Reserved.