CRDS Laser-Based Analyzer
ANALYZER FOR TRACE HYDROGEN FLUORIDE IN PRESSURIZED GASES
Our Tiger Optics HALO 3 HF trace level hydrogen fluoride gas analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that users of our Tiger Optics’ analyzers have come to know and expect. Featuring our proven Cavity Ring-Down Spectroscopy-based trace gas sensor in a very compact and economic analyzer design, this versatile instrument allows users to measure HF in most inert and passive gases with just one device. Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds. As a result, our HALO 3 is ideally suited to many applications where HF impurities are extremely critical, such as nitrogen trifluoride (NF3), sulfur hexafluoride (SF6) and fluorocarbon (CF4, C2F6, etc.) production and semiconductor utilization.
BEBEFITS
- Low single-digit parts per billion (ppb) detection capability
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range
- Low cost of ownership and operational simplicity
- Clean technology—no external calibration gases required
- Compact analyzer footprint
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| HF in N2 | 0 – 5 ppm | 0.4 ppb | 0.15 ppb |
| HF in He | 0 – 1.3 ppm | 0.4 ppb | 0.05 ppb |
| HF in SF6 | 0 – 8 ppm | 1.2 ppb | 0.4 ppb |
| HF in NF3 | 0 – 7.5 ppm | 0.6 ppb | 0.2 ppb |
| HF in CF4 | 0 – 6 ppm | 0.8 ppb | 0.3 ppb |
| HF in C2F6 | 0 – 12 ppm | 1.6 ppb | 0.6 ppb |
| HF in C3F8 | 0 – 12 ppm | 1.6 ppb | 0.6 ppb |
| HF in C4F6 | 0 – 15 ppm | 15 ppb | 5 ppb |
| HF in C4F8 | 0 – 14 ppm | 1.6 ppb | 0.6 ppb |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL, 3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 90% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | Up to 1.8 slpm |
| Sample gases | Most inert, toxic, passive and corrosive matrices |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA per sensor |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
Serani™ Max Analyzer Interface Software allows you to have remote access from your computer or laptop for our latest CRDS generation analyzers, such as the HALO KA Max and T-I Max. The Windows-based software package communicates with the analyzer through Ethernet and allows full control of the system conveniently from your desk.
