trace-level moisture detection CRDS Gas Analyzer
IDEAL ANALYTICAL SOLUTION FOR PPT-LEVEL of H2O IN BULK AND SPECIALTY GASES
The TIGER OPTICS™ HALO™ KA H2O is an all-in-one, cost-effective solution that packs a powerful punch. By utilizing our proprietary Cavity Ring-Down Spectroscopy Technology, you can easily determine moisture impurity levels as low as 100 parts per trillion in helium, with the added benefit of drift-free stability and immediate response time. Installation of our system is a breeze, and it is effortless to use and maintain with its built-in zero verification feature. This analyzer is specially designed for trace-level moisture detection in bulk gases, specialty gases, and gas mixtures, such as germane (GeH4) in hydrogen and other specialty mixtures used in semiconductor manufacturing. When paired with the Halo OK, which measures oxygen at the parts per trillion level, both critical contaminants can be detected using laser-based technology for unparalleled precision.
Benefits
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Small footprint (two Halo KAs fit in a 19” rack)
- Absolute measurement (freedom from calibration)
- Low cost of ownership and great ease of use
- Wide dynamic range—over four orders of magnitude
- Clean technology
- NOW INCLUDED: Speed+ performance upgrade—intelligent dynamic data processing
boosts analyzer’s speed of response while maintaining low noise performance
APPLICATIONS
DETECTION CAPABILITY
|
Detection and Matrix |
Range |
LDL (3σ) |
Precision (1σ) @ zero |
| H2O in N2 | 0 – 20 ppm | 300 ppt | 100 ppt |
| H2O in He | 0 – 4 ppm | 100 ppt | 20 ppt |
| H2O in Ar | 0 – 9 ppm | 130 ppt | 45 ppt |
| H2O in H2 | 0 – 16 ppm | 200 ppt | 70 ppt |
| H2O in D2 (2H2) | 0 – 14 ppm | 900 ppt | 300 ppt |
| H2O in O2 | 0 – 10 ppm | 150 ppt | 50 ppt |
| H2O in Clean Dry Air (CDA) | 0 – 18 ppm | 300 ppt | 100 ppt |
| H2O in CO | 0 – 24 ppm | 600 ppt | 200 ppt |
| H2O in CO2 | 0 – 25 ppm | 800 ppt | 300 ppt |
| H2O in 1% GeH4/99% H2 | 0 – 16 ppm | 7 ppb | 2.5 ppb |
| H2O in 10% GeH4/90% H2 | 0 – 16 ppm | 35 ppb | 12 ppb |
| H2O in COS | 0 – 23 ppm | 4 ppb | 1.4 ppb |
| H2O in Ne | 0 – 5 ppm | 100 ppt | 30 ppt |
| H2O in Kr | 0 – 11 ppm | 160 ppt | 60 ppt |
| H2O in Xe | 0 – 13 ppm | 250 ppt | 90 ppt |
| H2O in Cl2 | 0 – 25 ppm (Corrosion-resistant material required) |
650 ppt | 220 ppt |
| H2O in HCl | 0 – 50 ppm (Corrosion-resistant material recommended) |
1200 ppt | 400 ppt |
| H2O in HBr | 0 – 100 ppm (Corrosion-resistant material required) |
12 ppb | 4 ppb |
| H2O in SF6 | 0 – 15 ppm | 400 ppt | 140 ppt |
| H2O in NF3 | 0 – 20 ppm | 600 ppt | 200 ppt |
| H2O in CF4 | 0 – 15 ppm | 800 ppt | 300 ppt |
| H2O in C2F6 | 0 – 15 ppm | 1200 ppt | 400 ppt |
| H2O in C3F8 | 0 – 20 ppm | 1200 ppt | 400 ppt |
| H2O in C4F6 | 0 – 25 ppm | 150 ppb | 50 ppb |
| H2O in C4F8 | 0 – 20 ppm | 1200 ppt | 400 ppt |
| H2O in C5F8 | 0 – 32 ppm | 8 ppb | 3 ppb |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL, 3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 2 minutes to 95%* |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | 0.05 – 1.8 slpm |
| Sample gases | Most inert, toxic, passive and corrosive matrices |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data Storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
| *with Speed+ activated | |
Serani™ Max Analyzer Interface Software allows you to have remote access from your computer or laptop for our latest CRDS generation analyzers, such as the Halo KA Max and T-I Max. The Windows-based software package communicates with the analyzer through Ethernet and allows full control of the system conveniently from your desk.
Learn about our service, technical support, spares, and our CRDS Analyzer | Performance Verification Program
Analyzer in service? Need a rental CRDS analyzer? Ask us how we can help.
ANALYZE WITH EASE™
PPT DETECTION LIMITS FOR H2O
PPT DETECTION LIMITS FOR H2O
SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
solutions flyers
Other CRDS Gas Analyzer Solutions
HALO KA™ H2O
HALO KA Max™ H2O
HALO KA Max™ CH4
HALO KA Max™ NH3
HALO Max QCL™ CO
HALO Max QCL™ CO2
Custom CRDS Gas Analysis Solutions
GO-cart™
HALO™ 3 CH2O
HALO™ 3 CO
HALO™ 3 CO2
HALO™ 3 D2O/HDO
HALO™ 3 H2O
HALO™ 3 CH4
HALO™ 3 HCl
HALO™ 3 NH3
HALO 3 HF
HALO™ H2
HALO™ H2O in N2O
HALO™ OK/OK+
HALO™ LP H2O
HALO™ RP
HALO™ QRP
Spark™ H2O
Spark™ H2O in CO2
Spark™ CH4
Spark™ C2H2
Spark™ CO2
Spark+™ CO
Spark Max™ CO2
Prismatic 3™
Prismatic 3+™
T-I MAX™ AIR GHG
T-I MAX X2_X3
T-I MAX™ HCl
T-I MAX™ HF
T-I MAX™ NH3
T-I MAX™ CEM
CO-REKT™
ALOHA+H2O™
