ULTIMATE AMMONIA DETECTION PERFORMANCE IN SEMICONDUCTOR MANUFACTURING
Our TIGER OPTICS™ HALO KA Max™ NH3 ppt-level ammonia detection analyzer uses our Continuous-Wave Cavity Ring-Down Spectroscopy (CRDS) and users can verify ammonia impurity levels down to 100 ppt in semi bulk gases, with drift-free stability and virtually instant response to upsets. Our HALO KA Max NH3, based our latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA Max NH3 excels in trace-level ammonia detection in bulk gases and specialty gases used in semiconductor manufacturing.
Building on oir customer-acknowledged and renowned time-based technology – Continuous-Wave Cavity Ring-Down Spectroscopy—users can verify ammonia impurity levels down to 100 ppt in semi bulk gases, with drift-free stability and virtually instant response to upsets.
The HALO KA Max NH3, based on our latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA Max NH3 excels in trace-level ammonia detection in bulk gases and specialty gases used in semiconductor manufacturing.
MAXIMIZING ULTIMATE LOW-DETECTION PERFORMANCE AND SPEED OF RESPONSE, THE HALO KA MAX NH3 OFFERS:
- Parts per trillion (ppt) ammonia detection capability in an array of gases
- Absolute measurement (freedom from calibration)
- Field proven lowest Cost of Ownership and ease of use
- Wide dynamic range—over four orders of magnitude
- Unprecedented speed of response
- Compact footprint (two Halo KA Max fit in a 19” rack)
APPLICATIONS
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| NH3 in N2 | 0 – 7 ppm | 100 ppt | 40 ppt |
SPECIFICACTIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection Limit (3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 2 minutes to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | ∼2 slpm in N2 (gas dependent) |
| Sample gases | See Detection Capability table |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 34 lbs (15.4 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
ANALYZE WITH EASE™
PPT-LEVEL AMMONIA DETECTION
IN UHP GASES
PPT-LEVEL AMMONIA DETECTION
IN UHP GASES
Learn about our service, technical support, spares, and our CRDS Analyzer | Performance Verification Program
Analyzer in service? Need a rental CRDS analyzer? Ask us how we can help.
SERVICE | SALES | TRAINING
Americas +1 (215) 656-4000
EMEA +49 69 20436910
China/APAC +86 400 086 0106
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