We offer many high performance, affordable, turnkey CRDS gas analysis solutions for your applications. Take a look at our product specification table below.
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Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
---|---|---|---|---|---|---|---|---|
Spark H2O Trace moisture detection as low as 3 ppb |
H2O in N2 | 0 – 2000 ppm | 12 ppb | 4 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼1.0 slpm (in N2) |
10 – 125 psig |
H2O in O2 | 0 – 1000 ppm | 6 ppb | 2 ppb | |||||
H2O in Ar | 0 – 900 ppm | 4.5 ppb | 1.5 ppb | |||||
H2O in He | 0 – 450 ppm | 3 ppb | 1.0 ppb | |||||
H2O in H2 | 0 – 1750 ppm | 7.5 ppb | 2.5 ppb | |||||
H2O in Clean Dry Air (CDA) | 0 – 1800 ppm | 10 ppb | 3 ppb | |||||
H2O in Ne | 0 – 450 ppm | 30 ppb | 10 ppb | |||||
H2O in Kr | 0 – 1100 ppm | 5.5 ppb | 1.8 ppb | |||||
H2O in Xe | 0 – 1300 ppm | 7.5 ppb | 2.5 ppb | |||||
H2O in CO | 0 – 2400 ppm | 15 ppb | 5 ppb | |||||
H2O in CF4 | 0 – 1300 ppm | 9 ppb | 3 ppb | |||||
H2O in NF3 | 0 – 1800 ppm | 9 ppb | 3 ppb | |||||
H2O in SF6 | 0 – 1300 ppm | 15 ppb | 5 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
Spark CH4 Trace-level methane detection |
CH4 in N2 | 0 – 80 ppm | 7.5 ppb | 2.5 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼0.7 slpm (in N2) |
10 – 125 psig |
CH4 in O2 | 0 – 50 ppm | 6 ppb | 2.0 ppb | |||||
CH4 in Clean Dry Air (CDA) | 0 – 80 ppm | 7.5 ppb | 2.5 ppb | |||||
CH4 in Ar | 0 – 70 ppm | 6.5 ppb | 2.2 ppb | |||||
CH4 in He | 0 – 50 ppm | 6 ppb | 2.0 ppb | |||||
CH4 in H2 | 0 – 80 ppm | 7.5 ppb | 2.5 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
Spark CO2 Trace-level carbon dioxide detection |
CO2 in N2 | 0 – 1500 ppm | 250 ppb | 80 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼0.7 slpm (in N2) | 10 – 125 psig |
CO2 in O2 | 0 – 1200 ppm | 220 ppb | 75 ppb | |||||
CO2 in Clean Dry Air (CDA) | 0 – 1500 ppm | 250 ppb | 80 ppb | |||||
CO2 in Ar | 0 – 1200 ppm | 220 ppb | 75 ppb | |||||
CO2 in He | 0 – 1200 ppm | 220 ppb | 75 ppb | |||||
CO2 in H2 | 0 – 2000 ppm | 400 ppb | 140 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
Spark H2O in
CO2 Trace moisture detection in pure CO2 |
H2O in CO2 | 0 – 600 ppm | 550 ppb | 180 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼1.4 slpm | 10 – 125 psig |
H2O in N2 | 0 – 500 ppm | 7.5 ppb | 2.5 ppb | |||||
H2O in O2 | 0 – 250 ppm | 7.5 ppb | 2.5 ppb | |||||
H2O in Ar | 0 – 200 ppm | 6 ppb | 2.0 ppb | |||||
H2O in He | 0 – 125 ppm | 4 ppb | 1.3 ppb | |||||
H2O in H2 | 0 – 400 ppm | 6 ppb | 2.0 ppb | |||||
H2O in Clean Dry Air (CDA) | 0 – 450 ppm | 7.5 ppb | 2.5 ppb | |||||
H2O in CO | 0 – 480 ppm | 7 ppb | 2.5 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
Spark+ CO Trace-level carbon monoxide detection |
CO in N2 | 0 – 2000 ppm | 120 ppb | 40 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼0.7 slpm (in N2) | 10 – 125 psig |
CO in O2 | 0 – 1800 ppm | 110 ppb | 40 ppb | |||||
CO in Clean Dry Air (CDA) | 0 – 2000 ppm | 120 ppb | 40 ppb | |||||
CO in Ar | 0 – 1600 ppm | 100 ppb | 35 ppb | |||||
CO in He | 0 – 1800 ppm | 110 ppb | 40 ppb | |||||
CO in H2 | 0 – 2500 ppm | 150 ppb | 50 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
Spark
C2H2 Trace-level acetylene detection |
C2H2 in N2 | 0 – 80 ppm | 8 ppb | 3 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼0.7 slpm (in N2) | 10 – 125 psig |
C2H2 in O2 | 0 – 70 ppm | 7 ppb | 2.5 ppb | |||||
C2H2 in Clean Dry Air (CDA) | 0 – 80 ppm | 8 ppb | 3 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO Max QCL CO QCL-CRDS Analyzer for PPT level CO detection |
CO in N2 | 0 – 0.5 ppm | 200 ppt | 70 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | <1 slpm in N2 (gas dependent) | 6 – 125 psig |
CO in He | 0 – 0.35 ppm | 130 ppt | 45 ppt | |||||
CO in Ar | 0 – 0.4 ppm | 150 ppt | 50 ppt | |||||
CO in H2 | 0 – 0.5 ppm | 200 ppt | 70 ppt | |||||
CO in O2 | 0 – 0.45 ppm | 170 ppt | 60 ppt | |||||
CO in Clean Dry Air (CDA) | 0 – 0.5 ppm | 200 ppt | 70 ppt | |||||
Product | Detection and Matrix | Range | LDL* (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO Max QCL CO2 QCL-CRDS Analyzer for PPT level CO2 detection |
CO2 in N2 | 0 – 2.5 ppm | 100 ppt | 35 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | <1 slpm in N2 (gas dependent) | 6 – 125 psig |
CO2 in He | 0 – 2 ppm | 90 ppt | 30 ppt | |||||
CO2 in Ar | 0 – 2 ppm | 80 ppt | 25 ppt | |||||
CO2 in H2 | 0 – 4 ppm | 180 ppt | 60 ppt | |||||
CO2 in O2 | 0 – 2 ppm | 90 ppt | 30 ppt | |||||
CO2 in Clean Dry Air (CDA) | 0 – 2.5 ppm | 100 ppt | 35 ppt | |||||
*Due to the high abundance of CO2 in air, purging of the analyzer housing is required to achieve specified LDL (see brochure for purge gas requirements) | ||||||||
Product | Detection and Matrix | Range | LDL* | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO KA Max H2O Ultimate part-per-trillion moisture detection |
H2O in N2 | 0 – 5 ppm | 100 ppt | 40 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼2 slpm in N2 (gas dependent) | 10 – 125 psig |
H2O in He | 0 – 1 ppm | 100 ppt | 10 ppt | |||||
H2O in Ar | 0 – 2 ppm | 100 ppt | 20 ppt | |||||
H2O in H2 | 0 – 4 ppm | 100 ppt | 30 ppt | |||||
H2O in O2 | 0 – 2.5 ppm | 100 ppt | 20 ppt | |||||
H2O in Clean Dry Air (CDA) | 0 – 4 ppm | 100 ppt | 30 ppt | |||||
*The Detection limit (LDL) is defined as 3σ over 24h or the H2O drydown limit, whichever is higher. | ||||||||
Product | Detection and Matrix | Range | LDL (3σ)† | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO OK Trace oxygen detection as low as 50 ppt |
Standard Model (using pure H2 utility gas) | |||||||
O2 in He | 0 – 0.5 ppm | 50 ppt | 17 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.5 – 1.8 slpm (gas dependent) |
10 – 125 psig | |
O2 in Ar | 0 – 1 ppm | 90 ppt | 30 ppt | |||||
O2 in H2 | 0 – 2 ppm | 150 ppt | 50 ppt | |||||
O2 in N2 | 0 – 2.5 ppm | 200 ppt | 70 ppt | |||||
CO2 Model (using pure H2 utility gas) | ||||||||
O2 in He | 0 – 0.5 ppm | 50 ppt | 17 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.5 – 1.8 slpm (gas dependent) |
10 – 125 psig | |
O2 in Ar | 0 – 1 ppm | 90 ppt | 30 ppt | |||||
O2 in H2 | 0 – 2 ppm | 150 ppt | 50 ppt | |||||
O2 in N2 | 0 – 2.5 ppm | 200 ppt | 70 ppt | |||||
O2 in CO2 | 0 – 5 ppm | 5000 ppt‡/1000 ppt§ | 300 ppt | |||||
Enhanced Safety Model (using 3% H2/97% N2 mixture utility gas) | ||||||||
O2 in He | 0 – 0.5 ppm | 400 ppt‡ | 17 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.5 – 1.8 slpm (gas dependent) |
10 – 125 psig | |
O2 in Ar | 0 – 1 ppm | 400 ppt‡ | 30 ppt | |||||
O2 in H2 | 0 – 2 ppm | 400 ppt‡ | 50 ppt | |||||
O2 in N2 | 0 – 2.5 ppm | 400 ppt‡ | 70 ppt | |||||
†LDL is dependent upon the quality of the sample gas and the integrity of the sampling system. | ||||||||
‡LDL is limited by minimum achievable O2 concentration, not by 3σ baseline noise. | ||||||||
§LDL of 1000 ppt requires addition of Tiger Optics’ Zero Gas Panel and Linear Fit Mode. Please contact us for more information. | ||||||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO KA Max NH3 ppt-level ammonia detection in bulk gases |
NH3 in N2 | 0 – 7 ppm | 100 ppt | 40 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼2 slpm in N2 (gas dependent) | 10 – 125 psig |
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO KA Max CH4 Sub-ppb methane detection in bulk gases |
CH4 in N2 | 0 – 8 ppm | 500 ppt | 200 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼2 slpm in N2 (gas dependent) | 10 – 125 psig |
CH4 in He | 0 – 5 ppm | 400 ppt | 140 ppt | |||||
CH4 in Ar | 0 – 7 ppm | 450 ppt | 150 ppt | |||||
CH4 in H2 | 0 – 8 ppm | 500 ppt | 200 ppt | |||||
CH4 in O2 | 0 – 7 ppm | 500 ppt | 200 ppt | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO KA H2O Part-per-trillion detection limits for H2O |
H2O in N2 | 0 – 20 ppm | 300 ppt | 100 ppt | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.05 – 1.8 slpm | 10 – 125 psig |
H2O in He | 0 – 4 ppm | 100 ppt | 20 ppt | |||||
H2O in Ar | 0 – 9 ppm | 130 ppt | 45 ppt | |||||
H2O in H2 | 0 – 16 ppm | 200 ppt | 70 ppt | |||||
H2O in D2 (2H2) | 0 – 14 ppm | 900 ppt | 300 ppt | |||||
H2O in O2 | 0 – 10 ppm | 150 ppt | 50 ppt | |||||
H2O in Clean Dry Air (CDA) | 0 – 18 ppm | 300 ppt | 100 ppt | |||||
H2O in CO | 0 – 24 ppm | 600 ppt | 200 ppt | |||||
H2O in CO2 | 0 – 25 ppm | 800 ppt | 300 ppt | |||||
H2O in 1% GeH4/99% H2 | 0 – 16 ppm | 7 ppb | 2.5 ppb | |||||
H2O in 10% GeH4/90% H2 | 0 – 16 ppm | 35 ppb | 12 ppb | |||||
H2O in COS | 0 – 23 ppm | 4 ppb | 1.4 ppb | |||||
H2O in Ne | 0 – 5 ppm | 100 ppt | 30 ppt | |||||
H2O in Kr | 0 – 11 ppm | 160 ppt | 60 ppt | |||||
H2O in Xe | 0 – 13 ppm | 250 ppt | 90 ppt | |||||
H2O in Cl2 | 0 – 25 ppm (corrosion-resistant material required) |
650 ppt | 220 ppt | |||||
H2O in HCl | 0 – 50 ppm (corrosion-resistant material recommended) |
1200 ppt | 400 ppt | |||||
H2O in HBr | 0 – 50 ppm (corrosion-resistant material required) |
12 ppb | 4 ppb | |||||
H2O in SF6 | 0 – 15 ppm | 400 ppt | 140 ppt | |||||
H2O in NF3 | 0 – 20 ppm | 600 ppt | 200 ppt | |||||
H2O in CF4 | 0 – 15 ppm | 800 ppt | 300 ppt | |||||
H2O in C2F6 | 0 – 15 ppm | 1200 ppt | 400 ppt | |||||
H2O in C3F8 | 0 – 20 ppm | 1200 ppt | 400 ppt | |||||
H2O in C4F6 | 0 – 25 ppm | 150 ppb | 50 ppb | |||||
H2O in C4F8 | 0 – 20 ppm | 1200 ppt | 400 ppt | |||||
H2O in C5F8 | 0 – 32 ppm | 8 ppb | 3 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 H2O Trace moisture analyzer for ultra-high-purity gases |
H2O in N2 | 0 – 20 ppm | 1.2 ppb | 0.4 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.05 – 1.8 slpm | 10 – 125 psig |
H2O in He | 0 – 4 ppm | 0.25 ppb | 0.1 ppb | |||||
H2O in Ar | 0 – 9 ppm | 0.6 ppb | 0.2 ppb | |||||
H2O in H2 | 0 – 16 ppm | 1.0 ppb | 0.4 ppb | |||||
H2O in D2 (2H2) | 0 – 14 ppm | 0.9 ppb | 0.3 ppb | |||||
H2O in O2 | 0 – 12 ppm | 0.7 ppb | 0.25 ppb | |||||
H2O in Clean Dry Air (CDA) | 0 – 18 ppm | 1.2 ppb | 0.4 ppb | |||||
H2O in CO | 0 – 24 ppm | 1.5 ppb | 0.5 ppb | |||||
H2O in CO2 (standard range) | 0 – 25 ppm | 2.0 ppb | 0.7 ppb | |||||
H2O in CO2 (high range) | 0 – 70 ppm | 8 ppb | 3 ppb | |||||
H2O in SO2 | 0 – 60 ppm | 4 ppb | 1.2 ppb | |||||
H2O in COS | 0 – 23 ppm | 12 ppb | 4 ppb | |||||
H2O in Ne | 0 – 5 ppm | 0.3 ppb | 0.1 ppb | |||||
H2O in Kr | 0 – 11 ppm | 0.6 ppb | 0.2 ppb | |||||
H2O in Xe | 0 – 13 ppm | 0.8 ppb | 0.3 ppb | |||||
H2O in Cl2 | 0 – 25 ppm (corrosion-resistant material required) |
1.5 ppb | 0.5 ppb | |||||
H2O in HCl | 0 – 50 ppm (corrosion-resistant material recommended) |
3 ppb | 1.0 ppb | |||||
H2O in HBr | 0 – 100 ppm (corrosion-resistant material required) |
12 ppb | 4 ppb | |||||
H2O in SF6 | 0 – 15 ppm | 1.0 ppb | 0.4 ppb | |||||
H2O in NF3 | 0 – 20 ppm | 2.5 ppb | 0.9 ppb | |||||
H2O in CF4 | 0 – 15 ppm | 4 ppb | 1.2 ppb | |||||
H2O in C2F6 | 0 – 15 ppm | 3 ppb | 1.0 ppb | |||||
H2O in C3F8 | 0 – 20 ppm | 3 ppb | 1.0 ppb | |||||
H2O in C4F6 | 0 – 25 ppm | 150 ppb | 50 ppb | |||||
H2O in C4F8 | 0 – 20 ppm | 3 ppb | 1.0 ppb | |||||
H2O in C5F8 | 0 – 32 ppm | 30 ppb | 10 ppb | |||||
H2O in H2S | 0 – 40 ppm | 200 ppb | 70 ppb | |||||
H2O in H2Se | 0 – 70 ppm (Detection in H2Se requires special analyzer configuration dedicated to service in H2Se. Contact us for more information.) |
30 ppb | 10 ppb | |||||
H2O in 1% GeH4/99% H2 | 0 – 16 ppm | 7 ppb | 2.5 ppb | |||||
H2O in 10% GeH4/90% H2 | 0 – 16 ppm | 35 ppb | 12 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 CO Trace-level carbon monoxide detection |
CO in N2 | 0 – 2000 ppm | 40 ppb | 15 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm | 10 – 125 psig |
CO in O2 | 0 – 1800 ppm | 35 ppb | 12 ppb | |||||
CO in Clean Dry Air (CDA) | 0 – 2000 ppm | 40 ppb | 15 ppb | |||||
CO in Ar | 0 – 1600 ppm | 30 ppb | 10 ppb | |||||
CO in He | 0 – 1800 ppm | 35 ppb | 12 ppb | |||||
CO in H2 | 0 – 2500 ppm | 50 ppb | 20 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 CO2 Part-per-billion carbon dioxide detection |
Low-Range (LR) Model | |||||||
CO2 in N2 | 0 – 25 ppm | 8 ppb | 3 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm | 10 – 125 psig | |
CO2 in He | 0 – 25 ppm | 8 ppb | 3 ppb | |||||
CO2 in Ar | 0 – 25 ppm | 8 ppb | 3 ppb | |||||
CO2 in O2 | 0 – 25 ppm | 8 ppb | 3 ppb | |||||
CO2 in Clean Dry Air (CDA) | 0 – 25 ppm | 8 ppb | 3 ppb | |||||
High-Range (HR) Model | ||||||||
CO2 in N2 | 0 – 1500 ppm | 250 ppb | 100 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm | 10 – 125 psig | |
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 CH4 Trace methane analyzer for high-purity gases |
CH4 in N2 | 0 – 8 ppm | 1.6 ppb | 0.6 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm | 10 – 125 psig |
CH4 in He | 0 – 5 ppm | 1.1 ppb | 0.4 ppb | |||||
CH4 in Ar | 0 – 7 ppm | 1.4 ppb | 0.5 ppb | |||||
CH4 in H2 | 0 – 8 ppm | 1.6 ppb | 0.6 ppb | |||||
CH4 in O2 | 0 – 6 ppm | 1.1 ppb | 0.4 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 HF Trace hydrogen fluoride in pressurized gases |
HF in N2 | 0 – 5 ppm | 0.4 ppb | 0.15 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm | 10 – 125 psig |
HF in He | 0 – 1.3 ppm | 0.4 ppb | 0.05 ppb | |||||
HF in SF6 | 0 – 8 ppm | 1.2 ppb | 0.4 ppb | |||||
HF in NF3 | 0 – 7.5 ppm | 0.6 ppb | 0.2 ppb | |||||
HF in CF4 | 0 – 6 ppm | 0.8 ppb | 0.3 ppb | |||||
HF in C2F6 | 0 – 12 ppm | 1.6 ppb | 0.6 ppb | |||||
HF in C3F8 | 0 – 12 ppm | 1.6 ppb | 0.6 ppb | |||||
HF in C4F6 | 0 – 15 ppm | 15 ppb | 5 ppb | |||||
HF in C4F8 | 0 – 14 ppm | 1.6 ppb | 0.6 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 HCl Trace hydrogen chloride |
HCl in N2 | 0 – 20 ppm | 1.0 ppb | 0.4 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm | 10 – 125 psig |
HCl in Clean Dry Air (CDA) | 0 – 20 ppm | 1.0 ppb | 0.4 ppb | |||||
HCl in H2 | 0 – 10 ppm | 1.0 ppb | 0.4 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO LP H2O Trace moisture in hydride gases |
Standard Model | |||||||
H2O in NH3 | 0 – 20 ppm | 9 ppb | 3 ppb | ± 4% or LDL | ± 1% or 1/3 of LDL | up to 1.0 slpm | 10 – 125 psig | |
H2O in PH3† | 0 – 10 ppm | 9 ppb | 3 ppb | |||||
H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb | |||||
H2O in Ar | 0 – 4 ppm | 0.8 ppb | 0.25 ppb | |||||
H2O in H2† | 0 – 6 ppm | 1.0 ppb | 0.3 ppb | |||||
H2O in He | 0 – 3 ppm | 0.6 ppb | 0.2 ppb | |||||
H2O in NO† | 0 – 100 ppm | 16 ppb | 6 ppb | |||||
H2O in GeH4† | 0 – 18 ppm | 20 ppb | 7 ppb | |||||
H2O in 5% SiH4/95% N2† | 0 – 6 ppm | 20 ppb | 7 ppb | |||||
Arsine Model | ||||||||
H2O in AsH3† | 0 – 10 ppm | 5 ppb | 2 ppb | ± 4% or LDL | ± 1% or 1/3 of LDL | up to 1.0 slpm | 10 – 125 psig | |
H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb | |||||
H2O in Ar | 0 – 4 ppm | 1.0 ppb | 0.3 ppb | |||||
H2O in H2† | 0 – 6 ppm | 1.0 ppb | 0.3 ppb | |||||
H2O in He | 0 – 3 ppm | 1.0 ppb | 0.3 ppb | |||||
†Low leak rate vacuum pump (safety certified for service in relevant gas) required | ||||||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO RP Trace H2O and HF for sub-atmospheric pressure (as low as 50 Torr) |
Trace H2O Analyzer (Standard Model) | |||||||
H2O in N2 | 0 – 20 ppm | 1.5 ppb | 0.5 ppb | ± 4% or LDL | ± 1% or ⅓ LDL | 0.1 to 1.0 slpm | 50 Torr – 15 psig | |
H2O in Ar | 0 – 20 ppm | 1.5 ppb | 0.5 ppb | |||||
H2O in H2‡ | 0 – 20 ppm | 1.5 ppb | 0.5 ppb | |||||
H2O in He | 0 – 12 ppm | 1.0 ppb | 0.3 ppb | |||||
H2O in HCl†,‡ | 0 – 25 ppm | 3 ppb | 1.0 ppb | |||||
H2O in CO‡ | 0 – 20 ppm | 2 ppb | 0.7 ppb | |||||
H2O in PH3‡ | 0 – 10 ppm | 9 ppb | 3 ppb | |||||
H2O in GeH4‡ | 0 – 18 ppm | 20 ppb | 7 ppb | |||||
Trace H2O Analyzer (Arsine Model) | ||||||||
H2O in AsH3† | 0 ‡– 10 ppm | 5 ppb | 2 ppb | ± 4% or LDL | ± 1% or ⅓ LDL | 0.1 to 1.0 slpm | 50 Torr – 15 psig | |
H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb | |||||
H2O in He | 0 – 3 ppm | 1.0 ppb | 0.3 ppb | |||||
Trace HF Analyzer | ||||||||
HF in N2 | 0 – 10 ppm | 0.75 ppb | 0.25 ppb | ± 4% or LDL | ± 1% or ⅓ LDL | 0.1 to 1.0 slpm | 50 Torr – 15 psig | |
HF in Ar | 0 – 10 ppm | 0.75 ppb | 0.25 ppb | |||||
HF in BF3‡ | 0 – 13 ppm | 0.9 ppb | 0.3 ppb | |||||
†May require corrosive gas version, please contact us for more information | ||||||||
‡Low leak rate vacuum pump (safety certified for service in relevant gas) required | ||||||||
Product | Detection (Matrix independent) |
Range | LDL (peak-to-peak) | Sensitivity (3σ) | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO QRP Moisture monitor for low-pressure chambers (down to 1 Torr) |
H2O | 0 – 12 mTorrpp (1200 ppm @ 10 Torr) |
1 μTorrpp (see chart in brochure for ppb units) |
0.5 μTorrpp (see chart in brochure for ppb units) |
± 5% or ½ LDL | ± 1% or ⅓ Sensitivity | N/A | 1 Torr – 1000 Torr |
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO H2 ppb-level hydrogen detection |
Standard Model (requires 1% O2, 99% N2 mixture or CDA utility gas) | |||||||
H2 in N2 | 0 – 500 ppm | 8 ppb | 3 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.5 slpm (± 20%) | 10 – 125 psig | |
H2 in Ar | 0 – 200 ppm | 6 ppb | 2.0 ppb | |||||
H2 in He | 0 – 125 ppm | 4 ppb | 1.5 ppb | |||||
H2 in Ne | 0 – 140 ppm | 4 ppb | 1.5 ppb | |||||
CDA Model (requires pure N2 utility gas) | ||||||||
H2 in Clean Dry Air (CDA) | 0 – 5000 ppm | 80 ppb | 30 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.5 slpm (± 20%) | 10 – 125 psig | |
Low-Range (LR) Model for Inert Gas (requires 1% O2, 99% N2 mixture or CDA utility gas†) | ||||||||
H2 in N2 | 0 – 20 ppm | 0.3 ppb | 0.1 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.5 slpm (± 20%) | 10 – 125 psig | |
H2 in Ar | 0 – 9 ppm | 0.13 ppb | 0.05 ppb | |||||
H2 in He | 0 – 9 ppm | 0.10 ppb | 0.04 ppb | |||||
Low-Range (LR) Model for Oxygenated Gas (requires pure N2 diluting/utility gas‡) | ||||||||
H2 in O2 | 0 – 1000 ppm | 15 ppb | 5 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | 0.5 slpm (± 20%) | 10 – 125 psig | |
H2 in Clean Dry Air (CDA) | 0 – 1000 ppm | 15 ppb | 5 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 NH3 Trace-level ammonia |
Standard Model | |||||||
NH3 in N2 (Low Range) | 0 – 7 ppm | 0.5 ppb | 0.2 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼1 slpm | 10 – 125 psig | |
NH3 in N2 (Mid Range) | 0 – 35 ppm | 2.5 ppb | 0.8 ppb | |||||
NH3 in N2 (High Range) | 0 – 130 ppm | 20 ppb | 7 ppb | |||||
NH3 in H2 (Low Range) | 0 – 6 ppm | 0.4 ppb | 0.15 ppb | |||||
NH3 in H2 (Mid Range) | 0 – 30 ppm | 2.0 ppb | 0.7 ppb | |||||
NH3 in H2 (High Range) | 0 – 110 ppm | 15 ppb | 5 ppb | |||||
NH3 in CO2† | 0 – 30 ppm | 2.5 ppb | 0.8 ppb | |||||
N2O Model | ||||||||
NH3 in N2 | 0 – 150 ppm | 9 ppb | 3 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | ∼1 slpm | 10 – 125 psig | |
NH3 in N2O | 0 – 200 ppm | 10 ppb‡ / 50 ppb | 3.5 ppb‡ / 20 ppb | |||||
†Cannot be combined with Low or High Range detection in N2/H2 | ||||||||
‡Dry vacuum pump required | ||||||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 CH2O Trace-level formaldehyde |
CH2O in N2 | 0 – 40 ppm | 5 ppb | 1.7 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | <1 slpm | 10 – 125 psig |
CH2O in H2 | 0 – 40 ppm | 6 ppb | 2.0 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO H2O in
N2O Trace moisture analyzer for pure nitrous oxide |
H2O in N2 | 0 – 15 ppm | 2.2 ppb | 0.8 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm | 10 – 125 psig |
H2O in N2O | 0 – 20 ppm | 7.5 ppb | 2.5 ppb | |||||
H2O in Ar | 0 – 6 ppm | 1.0 ppb | 0.35 ppb | |||||
H2O in He | 0 – 3 ppm | 0.5 ppb | 0.2 ppb | |||||
H2O in H2 | 0 – 12 ppm | 1.9 ppb | 0.7 ppb | |||||
H2O in O2 | 0 – 8 ppm | 1.2 ppb | 0.4 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
HALO 3 D2O/HDO Trace-level heavy water analyzer |
D2O in D2 | 0 – 20 ppm | 3 ppb | 1.0 ppb | ± 4% or LDL | ± 0.75% or 1/3 of LDL | 0.05 to 1.8 slpm | 10 – 125 psig |
D2O in N2 | 0 – 50 ppm | 7 ppb | 2.5 ppb | |||||
HDO in D2 | 0 – 30 ppm | 5 ppb | 2 ppb | |||||
HDO in N2 | 0 – 40 ppm | 6 ppb | 2 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
CO-rekt Measuring CO, CO2, CH4 or H2O in NEMA-rated enclosure |
CO in H2 | 0 − 2000 ppm | 150 ppb | 50 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | up to 1.8 slpm (gas dependent) |
10 – 125 psig |
CO2 in H2 | 0 − 1500 ppm | 500 ppb | 170 ppb | |||||
H2O in H2 (low range) | 0 − 16 ppm | 1.0 ppb | 0.4 ppb | |||||
H2O in H2 (high range) | 0 − 1750 ppm | 7.5 ppb | 2.5 ppb | |||||
CH4 in H2 (low range) | 0 − 8 ppm | 1.6 ppb | 0.6 ppb | |||||
CH4 in H2 (high range) | 0 − 100 ppm | 7 ppb | 2.5 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
ALOHA+ H2O 3 ppb H2O detection in ultra-pure ammonia |
H2O in NH3 | 0 – 20 ppm | 3 ppb | 1 ppb | ± 4% or LDL | ± 1% or ⅓ LDL | up to 1.8 slpm (gas dependent) |
10 – 125 psig |
H2O in N2 | 0 – 6 ppm | 0.5 ppb | 0.2 ppb | |||||
H2O in He | 0 – 3 ppm | 0.3 ppb | 0.1 ppb | |||||
H2O in Ar | 0 – 4 ppm | 0.4 ppb | 0.15 ppb | |||||
H2O in H2† | 0 – 6 ppm | 0.5 ppb | 0.2 ppb | |||||
†Please ensure that the vacuum source used meets all safety requirements for use in pure hydrogen. | ||||||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
Prismatic 3 Next-generation multi-species gas analyzer |
CH4 in N2 | 0 – 100 ppm | 100 ppb | 35 ppb | ± 4% or LDL | ± 0.75% or ⅓ LDL | < 1 slpm (gas dependent) |
10 – 125 psig |
H2O in N2 | 0 – 40 ppm | 100 ppb | 35 ppb | |||||
CO in N2 | 0 – 500 ppm | 50 ppb | 20 ppb | |||||
CO2 in N2 | 0 – 1000 ppm | 200 ppb | 70 ppb | |||||
NH3 in N2† | 0 – 7 ppm | 10 ppb | 4 ppb | |||||
CH4 in H2 | 0 – 100 ppm | 100 ppb | 35 ppb | |||||
H2O in H2 | 0 – 25 ppm | 100 ppb | 35 ppb | |||||
CO in H2 | 0 – 500 ppm | 50 ppb | 20 ppb | |||||
CO2 in H2 | 0 – 1000 ppm | 320 ppb | 110 ppb | |||||
NH3 in H2† | 0 – 5 ppm | 7.5 ppb | 2.5 ppb | |||||
CH4 in Ar | 0 – 90 ppm | 100 ppb | 35 ppb | |||||
H2O in Ar | 0 – 18 ppm | 40 ppb | 15 ppb | |||||
CO in Ar | 0 – 400 ppm | 40 ppb | 15 ppb | |||||
CO2 in Ar | 0 – 800 ppm | 160 ppb | 55 ppb | |||||
CH4 in O2 | 0 – 90 ppm | 100 ppb | 35 ppb | |||||
H2O in O2 | 0 – 20 ppm | 50 ppb | 20 ppb | |||||
CO in O2 | 0 – 800 ppm | 45 ppb | 15 ppb | |||||
CO2 in O2 | 0 – 1700 ppm | 170 ppb | 60 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ@100s) | Speed of Response @ 20 ppb | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
T-I Max NH3 Next-Generation AMC Monitor |
NH3 in Cleanroom Air | 0 – 40 ppm | 300 ppt | < 3 minutes | ± 4% or 300 ppt (greater of) | ± 0.5% or ⅓ LDL | ∼3 slpm | Atmospheric pressure |
Product | Detection and Matrix | Range | LDL (3σ@100s) | Speed of Response @ 20 ppb | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
T-I Max HCl Next-Generation AMC Monitor |
HCl in Cleanroom Air | 0 – 4 ppm | 100 ppt | < 30 seconds | ± 4% or 100 ppt (greater of) | ± 0.5% or ⅓ LDL | ∼2 slpm | Atmospheric pressure |
Product | Detection and Matrix | Range | LDL (3σ@100s) | Speed of Response @ 20 ppb | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
T-I Max HF Next-Generation AMC Monitor |
HF in Cleanroom Air | 0 – 1 ppm | 20 ppt | < 3 minutes | ± 4% or 20 ppt (greater of) | ± 0.5% or ⅓ LDL | ∼2 slpm | Atmospheric pressure |
Product | Model | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
T-I Max CEM Next-Generation CEM analyzer for HCl, HF, NH3 and more |
T-I Max CEM NH3 | 0 – 40 ppm | 6 ppb | 2 ppb | ± 4% or LDL | ± 0.75% or 1/3 LDL | ∼2 slpm | 0 – 10 psig |
T-I Max CEM HCl | 0 – 4 ppm | 0.75 ppb | 0.25 ppb | |||||
T-I Max CEM HF | 0 – 1 ppm | 0.15 ppb | 0.05 ppb | |||||
T-I Max CEM H2S | 0 – 500 ppm | 40 ppb | 13 ppb | |||||
T-I Max CEM CH4 | 0 – 20 ppm | 1.5 ppb | 0.5 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
T-I Max AIR CH2O Trace formaldehyde in ambient air |
CH2O in Ambient Air | 0 – 100 ppm | 10 ppb | 3.5 ppb | ± 4% or LDL | ± 0.75% or 1/3 LDL | ∼2 slpm max. | 0 – 10 psig |
CH2O in N2 | 0 – 100 ppm | 10 ppb | 3.5 ppb | |||||
CH2O in Clean Dry Air (CDA) | 0 – 100 ppm | 10 ppb | 3.5 ppb | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
T-I Max AIR
CO2 CO2 analyzer for greenhouse gas monitoring |
CO2 in Clean Dry Air (CDA) | 0 – 3000 ppm | 150 ppb | 50 ppb | ± 4% or the LDL (∼16 ppm at ambient CO2 levels) |
± 0.75% or ⅓ LDL (∼3 ppm at ambient CO2 levels) |
∼1 slpm | 0 – 15 psig |
CO2 in N2 | 0 – 3000 ppm | 150 ppb | 50 ppb | |||||
CO2 in Ambient Air | 0 – 1500 ppm | N/A | N/A | |||||
Product | Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
T-I Max AIR
CH4 CH4 analyzer for greenhouse gas monitoring |
Low-Range Model | |||||||
CH4 in Clean Dry Air (CDA) | 0 – 25 ppm | 1.5 ppb | 0.5 ppb | ± 4% or the LDL (∼80 ppb at ambient CH4 levels) |
± 0.75% or ⅓ LDL (∼15 ppb at ambient CH4 levels) |
∼1 slpm | 0 – 15 psig | |
CH4 in N2 | 0 – 25 ppm | 1.5 ppb | 0.5 ppb | |||||
CH4 in Ambient Air | 0 – 25 ppm | N/A | N/A | |||||
High-Range Model | ||||||||
CH4 in Clean Dry Air (CDA) | 0 – 100 ppm† | 7.5 ppb | 2.5 ppb | ± 4% or the LDL (∼80 ppb at ambient CH4 levels) |
± 0.75% or ⅓ LDL (∼15 ppb at ambient CH4 levels) |
∼1 slpm | 0 – 15 psig | |
CH4 in N2 | 0 – 100 ppm† | 7.5 ppb | 2.5 ppb | |||||
CH4 in Ambient Air | 0 – 100 ppm† | N/A | N/A | |||||
†Upper range available as high as 1000 ppm on request |
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