T-I MAX HCI
You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy our TIGER OPTICS™ T-I Max™ HCl analyzer to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.
In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices.
With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the T-I Max HCl analyzers, based on our new global platform, can detect and continuously monitor HCl with an unprecedented combination of sensitivity, selectivity, and speed of response.
Our GO-cart for AMCs adds additional flexibility by providing a mobile platform that can be moved quickly to different critical monitoring points.
|Detection and Matrix||Range||LDL (3σ@100s)||Speed of Response @ 20 ppb|
|HCl in Cleanroom Air||0 – 4 ppm||100 ppt||< 30 seconds (T10/90+T90/10)|
|Operation range||See Detection Capability table|
|Detection limit (LDL, 3σ@100s)||See Detection Capability table|
|Precision (1σ@100s, greater of)||± 0.5% or 1/3 of LDL|
|Accuracy at span||± 4% of reading|
|Accuracy at zero||± 100 ppt|
|Speed of response @ 20 ppb||See Detection Capability table|
|Environmental conditions||10°C to 40°C, 10% to 90% RH (non-condensing)|
|Sample conditions||30% to 70% RH at 20°C|
|20% to 50% RH at 25°C|
|15% to 40% RH at 30°C|
|Storage temperature||-10° to 50°C|
|Gas Handling System and Conditions*|
|Wetted materials||Optimized for ppt-level AMCs and fast speed of response|
|Gas connections||1/4″ PFA Swagelok® inlet & outlet|
|Inlet pressure||Atmospheric pressure†|
|Outlet pressure||Vacuum (<10 Torr)|
|Flow rate||∼2 slpm @ 1 atm inlet pressure|
|Sample gases||Cleanroom air, clean dry air (CDA) or N2|
|Gas temperature||Up to 60°C|
|Standard sensor||8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)|
|Sensor rack||8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)|
|GO-cart||50″ x 23″ x 36″ (1270 mm x 584 mm x 914 mm)|
|Standard sensor||33 lbs (15 kg)|
|GO-cart||260 lbs (118 kg)|
|(excl. vacuum pump)|
|Electrical and Interfaces|
|Platform||Max series analyzer|
|Alarm indicators||2 user programmable, 1 system fault, Form C relays|
|Power requirements||90 – 240 VAC 50/60 Hz|
|Power consumption||40 Watts max. per sensor|
|Signal output||Isolated 4–20 mA per sensor|
|User interfaces||5.7″ LCD touchscreen, 10/100 Base-T Ethernet|
|USB, RS-232, RS-485, Modbus TCP (optional)|
|Data storage||Internal or external flash drive|
|U.S. Patent # 7,277,177|
*Vacuum source with >2 slpm @ 10 Torr required
†Contact us for details about operating the analyzer at elevated inlet pressure.
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