VERASPEC APIMS

Real-Time AMC Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

Our EXTREL™ VeraSpec™ AtmosphericPressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications. Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

Get the Benefits of our APIMS Technology

VeraSpec APIMS makes the analytical difference through intuitive, low-maintenance operation. Typical VeraSpec APIMS low detection limits by contaminant and bulk gas.

APPLICATIONS

Semiconductor fabs
Labs & research
Bulk gas storage
ASU

Real-time, multi-species monitoring for critical impurities including O₂, H₂O, CH₄, CO, CO₂, NH₃ and more using well-established, powerful mass spectrometry technology
Unparalleled measurement range: PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations
Lowest detection limits and highest flexibility compared to other technologies
Ultra-high precision and long-term stability
Fast measurement speed and extremely low maintenance requirements
Proprietary, fully customizable, automated process control software
Multi-port sample selector options available