VERASPEC APIMS

Real-Time AMC Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

    Our EXTREL™ VeraSpec™ AtmosphericPressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications. Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

    Get the Benefits of our APIMS Technology

    VeraSpec APIMS makes the analytical difference through intuitive, low-maintenance operation.  Typical VeraSpec APIMS low detection limits by contaminant and bulk gas.

    APPLICATIONS

    VeraSpec APIMS Gas Matrix
    • Real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more using well-established, powerful mass spectrometry technology
    • Unparalleled measurement range: PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
    • Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations                       
    • Lowest detection limits and highest flexibility compared to other technologies
    • Ultra-high precision and long-term stability
    • Fast measurement speed and extremely low maintenance requirements
    • Proprietary, fully customizable, automated process control software
    • Multi-port sample selector options available
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    Application Questionnaire.

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    OUR QUADRUPOLE MASS SPECTROMETERS FOR LAB, RESEARCH & HIGH PURITY APPLICATIONS

    MAX300-RTG™ 2.0

    EXTREL™ Industrial Process Quadrupole Mass Spectrometer
    max300-rtg 2.0 mass spectrometer

    MAX100-BTU™

    EXTREL™ BTU Heating Value Quadrupole Mass Spectrometer
    rocess Insights_Extrel MAX100-BTU Real-Time Heating Value Gas Analyzer

    MAX300-AIR™

    EXTREL™ Air & Environmental Quadrupole Mass Spectrometer
    Process InisightsExtrel MAX300-AIR

    MAX300-BIO™

    EXTREL™ Bioreactor & Fermentation Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-BIO BIOREACTOR GAS ANALYZER

    MAX300-EGA™

    EXTREL™ Evolved Gas Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-EGA Evolved Gas Analyzer

    MAX300-CAT™

    EXTREL™ Lab Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-CAT

    MAX300-LG™

    EXTREL™ Lab Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-LG

    MAX-QMS™

    EXTREL™ Flange Mounted Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX-QMS FLANGE MOUNTED SYSTEM

    MAX-LT™

    EXTREL™ Flange Mounted Quadrupole Mass Spectrometer
    VeraSpec™ Molecular Beam and Plasma Analysis System

    RGA™

    EXTREL™ Residual Gas Quadrupole Mass Spectrometer
    VeraSpec™ Molecular Beam and Plasma Analysis System

    VeraSpec HRQ™

    EXTREL™ Quadrupole Mass Spectrometers System
    Process Insights_Extrel VeraSpec-HRQ-gas analyer

    VeraSpec™ Molecular Beam & Plasma Analysis System

    EXTREL™ Quadrupole Mass Spectrometer System
    VeraSpec™ Molecular Beam and Plasma Analysis System

    MS/MS Systems

    EXTREL™ Quadrupole Mass Spectrometer Systems
    Process Insights_Extrel Complete MS Systems

    Custom Systems

    EXTREL™ Customized Quadrupole Mass Spectrometer System
    Process Insights_Extrel custom gas mass spec system

    Components & Power Supplies

    For EXTREL™ Quadrupole Mass Spectrometer & Systems
    Process Insights_Extrel Complete MS Systems
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