Unmatched Technology for Real-Time, Multi-Species Monitoring
For Critical Impurities in Bulk Electronic Gases
Our VeraSpec™ AtmosphericPressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications. Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.
Get the Benefits of our APIMS Technology
VeraSpec APIMS makes the analytical difference through intuitive, low-maintenance operation. Typical VeraSpec APIMS low detection limits by contaminant and bulk gas.
- Real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more using well-established, powerful mass spectrometry technology
- Unparalleled measurement range: PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
- Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations
- Lowest detection limits and highest flexibility compared to other technologies
- Ultra-high precision and long-term stability
- Fast measurement speed and extremely low maintenance requirements
- Proprietary, fully customizable, automated process control software
- Multi-port sample selector options available
Real-Time PPT-Level Gas Analyzer High Purity Application Requiring
Continuous Monitoring
Continuous Monitoring
APPLICATIONS
- Semiconductor fabs
- Labs & research
- Bulk gas storage
- ASU
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OUR MASS SPECTROMETERS FOR LAB, RESEARCH & HIGH PURITY APPLICATIONS
VeraSpec™ APIMS
MAX300-AIR™
MAX300-BIO™
MAX300-EGA™
MAX300-CAT™
MAX300-LG™
MAX-QMS™
VeraSpec HRQ™
MS/MS Systems
Custom Systems
Components & Power Supplies
SOLUTIONS
