VERASPEC APIMS

Atmospheric Pressure Ionization Mass Spectrometer 

Unmatched Technology for Real-Time, Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

    Our VeraSpec™ AtmosphericPressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications. Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

    Get the Benefits of our APIMS Technology

    VeraSpec APIMS makes the analytical difference through intuitive, low-maintenance operation.  Typical VeraSpec APIMS low detection limits by contaminant and bulk gas.

    VeraSpec APIMS Gas Matrix
    • Real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more using well-established, powerful mass spectrometry technology
    • Unparalleled measurement range: PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
    • Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations                       
    • Lowest detection limits and highest flexibility compared to other technologies
    • Ultra-high precision and long-term stability
    • Fast measurement speed and extremely low maintenance requirements
    • Proprietary, fully customizable, automated process control software
    • Multi-port sample selector options available



    Real-Time PPT-Level Gas Analyzer High Purity Application Requiring
    Continuous Monitoring

    Process Insights_Extre_APIMS

    APPLICATIONS

    GET A QUOTE TODAY | SALES | SERVICE | TRAINING

    Americas +1 412.967.5754 
    EMEA +49 69 20436910
    China/APAC +86 400 086 0106

    info@process-insights.com


    OUR MASS SPECTROMETERS FOR LAB, RESEARCH & HIGH PURITY APPLICATIONS

    VeraSpec™ APIMS

    Extrel Quadrupole Mass Spectrometer for Lab, Research & High Purity Applications
    Process Insights_APIMS

    MAX300-AIR™

    Extrel Quadrupole Air & Environmental Mass Spectrometer
    Process InisightsExtrel MAX300-AIR

    MAX300-BIO™

    Extrel Quadrupole Bioreactor & Fermentation Mass Spectrometers
    Process Insights_Extrel MAX300-BIO BIOREACTOR GAS ANALYZER

    MAX300-EGA™

    Extrel Quadrupole Evolved Gas Mass Spectrometers
    Process Insights_Extrel MAX300-EGA Evolved Gas Analyzer

    MAX300-CAT™

    Extrel Quadrupole Lab Mass Spectrometers
    Process Insights_Extrel MAX300-CAT

    MAX300-LG™

    Extrel Quadrupole Lab Mass Spectrometers
    Process Insights_Extrel MAX300-LG

    MAX-QMS™

    Extrel Flange Mounted System & Residual Gas Analyzer
    Process Insights_Extrel MAX-QMS FLANGE MOUNTED SYSTEM

    VeraSpec HRQ™

    Extrel Quadrupole Mass Spectrometers System
    Process Insights_Extrel VeraSpec-HRQ-gas analyer

    MS/MS Systems

    Extrel Quadrupole Mass Spectrometer Systems
    Process Insights_Extrel Complete MS Systems

    Custom Systems

    Extrel Customized Quadrupole Mass Spectrometer System
    Process Insights_Extrel custom gas mass spec system

    Components & Power Supplies

    For Extrel Quadrupole Mass Spectrometer & Systems
    Process Insights_Extrel Complete MS Systems

    SOLUTIONS

    Questions? We’re here to help.