CRDS Laser-Based Analyzer
THE GOLD STANDARD IN TRACE GAS ANALYSIS
Our HALO™ 3 H2O analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that our customers know and expect. Featuring our powerful Cavity Ring-Down Spectroscopy-based moisture sensor in a very compact and economic analyzer design, this versatile analyzer allows users to measure moisture in most inert, corrosive, and toxic gases with just one device.
Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuild. As a result, the HALO 3 H2O analyzer is ideally suited to many applications where moisture measurement is extremely critical. These applications include fixed bulk gas continuous quality control, portable mobile analytical carts, process tool monitoring, air separation, gas cylinder quality control and many other demanding applications.
BENEFITS
- Sub parts per billion (ppb) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range—over four orders of magnitude
- Low cost of ownership and operational simplicity
- Clean technology—no external calibration gases required
- Compact analyzer footprint
- Low gas consumption to conserve rare and costly gas
NOW INCLUDED: Speed+ performance upgrade—intelligent dynamic data processing boosts analyzer’s speed of response while maintaining low noise performance
SERANI™ AND SERANI™ MAX ANALYZER INTERFACE SOFTWARE
- Connect to your analyzer remotely from your computer via Ethernet or RS-232 (Windows XP or higher required)
- Real-time data analysis and plotting with the click of a button
- One-step data collection for “Remote Certification” and other service function shortcuts
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
| H2O in N2 | 0 – 20 ppm | 1.2 ppb | 0.4 ppb |
| H2O in He | 0 – 4 ppm | 0.25 ppb | 0.1 ppb |
| H2O in Ar | 0 – 9 ppm | 0.6 ppb | 0.2 ppb |
| H2O in H2 | 0 – 16 ppm | 1.0 ppb | 0.4 ppb |
| H2O in D2 (2H2) | 0 – 14 ppm | 0.9 ppb | 0.3 ppb |
| H2O in O2 | 0 – 12 ppm | 0.7 ppb | 0.25 ppb |
| H2O in Clean Dry Air (CDA) | 0 – 18 ppm | 1.2 ppb | 0.4 ppb |
| H2O in CO | 0 – 24 ppm | 1.5 ppb | 0.5 ppb |
| H2O in CO2 (standard range) | 0 – 25 ppm | 2.0 ppb | 0.7 ppb |
| H2O in CO2 (high range) | 0 – 70 ppm | 8 ppb | 3 ppb |
|
H2O in SO2 |
0 – 60 ppm | 4 ppb | 1.2 ppb |
| H2O in COS | 0 – 23 ppm | 12 ppb | 4 ppb |
| H2O in Ne | 0 – 5 ppm | 0.3 ppb | 0.1 ppb |
| H2O in Kr | 0 – 11 ppm | 0.6 ppb | 0.2 ppb |
| H2O in Xe | 0 – 13 ppm | 0.8 ppb | 0.3 ppb |
| H2O in Cl2 | 0 – 25 ppm (corrosion-resistant material required) |
1.5 ppb | 0.5 ppb |
| H2O in HCl |
0 – 50 ppm material recommended) |
3 ppb | 1.0 ppb |
| H2O in HBr | 0 – 100 ppm (corrosion-resistant material required) |
12 ppb | 4 ppb |
| H2O in SF6 | 0 – 15 ppm | 1.0 ppb | 0.4 ppb |
| H2O in NF3 | 0 – 20 ppm | 2.5 ppb | 0.9 ppb |
| H2O in CF4 | 0 – 15 ppm | 4 ppb | 1.2 ppb |
| H2O in C2F6 | 0 – 15 ppm | 3 ppb | 1.0 ppb |
| H2O in C3F8 | 0 – 20 ppm | 3 ppb | 1.0 ppb |
| H2O in C4F6 | 0 – 25 ppm | 150 ppb | 50 ppb |
| H2O in C4F8 | 0 – 20 ppm | 3 ppb | 1.0 ppb |
| H2O in C5F8 | 0 – 32 ppm | 30 ppb | 10 ppb |
| H2O in H2S | 0 – 40 ppm | 200 ppb | 70 ppb |
| H2O in H2Se | 0 – 70 ppm (Detection in H2Se requires special analyzer configuration dedicated to service in H2Se. Contact us for more information.) |
30 ppb | 10 ppb |
| H2O in 1% GeH4/99% H2 | 0 – 16 ppm | 7 ppb | 2.5 ppb |
| H2O in 10% GeH4/90% H2 | 0 – 16 ppm | 35 ppb | 12 ppb |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL, 3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 90% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | 0.05 – 1.8 slpm |
| Sample gases | Most inert, toxic, passive and corrosive matrices |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA per sensor |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
Designed for Trace Moisture Analyzer Ultra-High-Purity Gases
Designed for Trace Moisture Analyzer Ultra-High-Purity Gases
Applications
- Air Separation Units & Nitrogen Plants
- Gaseous CRMs & Calibration Gas Mixtures
- High-Purity Gases & Systems
- Hydrogen Fuel Cells
- Nuclear Energy
- Research & Development
- Semiconductor Process Tools
- Syngas & Fuel Gas Production
OUR GLOBAL SOLUTIONS DELIVER
- Improved reliability
- Lower cost of ownership
- Improved product quality
- Efficiency
- Meet compliance requirements
- Backed by global service and support
SERVICE | SALES | TRAINING
Americas +1 (215) 656-4000
EMEA +49 69 20436910
China/APAC +86 400 086 0106
Other CRDS Gas Analyzer Solutions
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HALO KA MAX™ CH4
Halo KA MAX™ NH3
HALO MAX QCL™ CO
HALO MAX QCL™ CO2
Custom System
GO-Cart™
Halo™ 3 CH2O
HALO™ 3 CO
HALO™ 3 CO2
Halo™ 3 D2O/HDO
Halo™ 3 H2O
Halo™ 3 CH4
HALO™ 3 HCi
Halo™ 3 NH3
Halo™ H2
Halo™ H2O in N2O
Halo™ OK
Halo™ LP H2O
Halo™ RP
Halo™ QRP
Spark™ H2O
Spark™ H2O IN CO2
Spark™ CH4
Spark™ C2H2
Spark™ CO2
Spark+™ CO
Prismatic 3™
CO-REKT™
ALOHA+™ H2O
T-I MAX™ CEM
T-I MAX™ AIR CO2
T-I MAX™ AIR CH4
Solutions
