CRDS Laser-Based Analyzer
PROTECT YOUR PRODUCT WITH THE HALO RP
It’s one thing to be monitoring and have high confidence in your high purity bulk and specialty gases at the post-purifier stage but a lot can change as that same gas then travels through the various fab distribution systems and arrives at the equipment or process chamber. Unless you are monitoring close to the substrate or in the process chamber exhaust, there is risk that high partial pressures of moisture are present during processing, resulting in defects causing yield loss and reliability issues.
For example, in semiconductor fabrication, moisture or hydrogen fluoride present in low-temperature epitaxy (LTE) can affect the quality and strain of the epi layers. In MOCVD processing with hydride gases, excess moisture can lead to significant reduction in luminescence and yield loss.
This is where our Tiger Optics analyzer comes in. Able to operate in a pressure range from 50 Torr to 15 psig, our Tiger Optics HALO RP trace level analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that users of Tiger Optics’ analyzers have come to expect. The HALO RP is available for two different analytes, H2O and HF, to ensure that your product is protected from all harmful molecules. Monitoring for contaminants close to the substrate or in the process chamber exhaust, significantly reduces the risk of process issues that cause product yield losses.
BENEFITS
- Low parts per billion (ppb) detection capability in inert, acid, and hydride background gases
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range—over four orders of magnitude
- Low cost of ownership and operational simplicity
- Clean technology—no external calibration gases required
- CRDS technology, designated by SEMI-F112 06-13 Standard
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| Trace H2O Analyzer (Standard Model) | |||
| H2O in N2 | 0 – 20 ppm | 1.5 ppb | 0.5 ppb |
| H2O in Ar | 0 – 20 ppm | 1.5 ppb | 0.5 ppb |
| H2O in H2‡ | 0 – 20 ppm | 1.5 ppb | 0.5 ppb |
| H2O in He | 0 – 12 ppm | 1.0 ppb | 0.3 ppb |
| H2O in HCl†,‡ | 0 – 25 ppm | 3 ppb | 1.0 ppb |
| H2O in CO‡ | 0 – 20 ppm | 2 ppb | 0.7 ppb |
| H2O in PH3‡ | 0 – 10 ppm | 9 ppb | 3 ppb |
| H2O in GeH4‡ | 0 – 18 ppm | 20 ppb | 7 ppb |
| Trace H2O Analyzer (Arsine Model) | |||
| H2O in AsH3† | 0 ‡– 10 ppm | 5 ppb | 2 ppb |
| H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
| H2O in He | 0 – 3 ppm | 1.0 ppb | 0.3 ppb |
| Trace HF Analyzer | |||
| HF in N2 | 0 – 10 ppm | 0.75 ppb | 0.25 ppb |
| HF in Ar | 0 – 10 ppm | 0.75 ppb | 0.25 ppb |
| HF in BF3‡ | 0 – 13 ppm | 0.9 ppb | 0.3 ppb |
†May require corrosive gas version, please contact us for more information
‡Low leak rate vacuum pump (safety certified for service in relevant gas) required
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL, 3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 1% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 3 minutes to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions* | |
| Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
| Gas connections | 1/4″ male VCR inlet & outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 50 torr – 15 psig (0.07 – 2 bara) |
| Outlet pressure | <10 Torr (13 mbar) |
| Flow rate | 0.1 to 1.0 slpm |
| Sample gases | N2, H2, Ar, He, HCl, and others |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor (incl. shutoff valves) | 8.73″ x 8.57″ x 26.4″ (222 mm x 218 mm x 670 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 26.4″ (222 mm x 483 mm x 670 mm) |
| Weight | |
| Standard sensor | 30 lbs (13.4 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 – 240 VAC 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4–20 mA per sensor |
| User interfaces | 5.7″ LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
*Vacuum source required
CRDS Analyzer for Trace H2o and HF for Sub-Atmospheric Pressure
CRDS Analyzer for Trace H2o and HF for Sub-Atmospheric Pressure
APPLICATIONS
Other CRDS Gas Analyzer Solutions
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