It’s one thing to be monitoring and have high confidence in your high purity bulk and specialty gases at the post-purifier stage but a lot can change as that same gas then travels through the various fab distribution systems and arrives at the equipment or process chamber. Unless you are monitoring close to the substrate or in the process chamber exhaust, there is risk that high partial pressures of moisture are present during processing, resulting in defects causing yield loss and reliability issues. For example, in semiconductor fabrication, moisture or hydrogen fluoride present in low-temperature epitaxy (LTE) can affect the quality and strain of the epi layers. In MOCVD processing with hydride gases, excess moisture can lead to significant reduction in luminescence and yield loss.
Able to operate in a pressure range from 50 Torr to 15 psig, our TIGER OPTICS™ HALO™ RP trace level analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that users of Tiger Optics’ analyzers have come to expect. The HALO RP is available for two different analytes, H2O and HF, to ensure that your product is protected from all harmful molecules.
Monitoring for contaminants close to the substrate or in the process chamber exhaust, significantly reduces the risk of process issues that cause product yield losses.
|Detection and Matrix||Range||LDL (3σ)||Precision (1σ) @ zero|
|Trace H2O Analyzer (Standard Model)|
|H2O in N2||0 – 20 ppm||1.5 ppb||0.5 ppb|
|H2O in Ar||0 – 20 ppm||1.5 ppb||0.5 ppb|
|H2O in H2‡||0 – 20 ppm||1.5 ppb||0.5 ppb|
|H2O in He||0 – 12 ppm||1.0 ppb||0.3 ppb|
|H2O in HCl†,‡||0 – 25 ppm||3 ppb||1.0 ppb|
|H2O in CO‡||0 – 20 ppm||2 ppb||0.7 ppb|
|H2O in PH3‡||0 – 10 ppm||9 ppb||3 ppb|
|H2O in GeH4‡||0 – 18 ppm||20 ppb||7 ppb|
|Trace H2O Analyzer (Arsine Model)|
|H2O in AsH3†||0 ‡– 10 ppm||5 ppb||2 ppb|
|H2O in N2||0 – 6 ppm||1.0 ppb||0.3 ppb|
|H2O in He||0 – 3 ppm||1.0 ppb||0.3 ppb|
|Trace HF Analyzer|
|HF in N2||0 – 10 ppm||0.75 ppb||0.25 ppb|
|HF in Ar||0 – 10 ppm||0.75 ppb||0.25 ppb|
|HF in BF3‡||0 – 13 ppm||0.9 ppb||0.3 ppb|
†May require corrosive gas version, please contact us for more information
‡Low leak rate vacuum pump (safety certified for service in relevant gas) required
We also offer a new CRDS analyzer performance upgrade. Implementing our new intelligent dynamic data processing, the Speed+™ Analyzer Performance Upgrade Software adjusts your analyzer’s response automatically and in real-time to deliver the best performance. Benefits of Speed+ for your operations include real-time process control to ensure quality, as well as faster throughput and increased capacity to improve efficiency and profitability.
Serani™ Analyzer Interface Software offers users a new way to access their analyzer remotely from any computer or laptop. Compatible with most HALO, Spark, Tiger-i, CO-rekt and ALOHA H2O series analyzers.
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