VERASPEC APIMS

Unmatched Mass Spec Technology for Real-Time, Multi-Species Monitoring

For All Critical Impurities in Bulk Electronic Gases

    Our Extrel VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

    Protect your semiconductor production with our VeraSpec APIMS

    Ultra-pure gases are a necessity for semiconductor device fabrication and the continuous monitoring of bulk gas purity can ensure maximum production. Contamination is costly.  The best way to achieve these low detection limits is with the application of Atmospheric Pressure Ionization Mass Spectrometry (APIMS). For more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our Extrel mass spectrometer utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

    Key advantages for contamination control in the UHP gases:

    • Real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more
    • Well-established, powerful mass spectrometry technology
    • Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
    • Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations                       
    • Lowest detection limits and highest flexibility compared to other technologies
    • Ultra-high precision and long-term stability
    • Fast measurement speed
    • Extremely low maintenance requirements
    • Proprietary, fully customizable, automated process control software
    • Multi-port sample selector options available
    • Industry-best customer support and applications team

    EASY TO USE, LOW MAINTENANCE

    • Dual ion source for convenience of diagnostics
    • Heated API ion source
    • Built-in software calibration procedures
    • Oil-free pumping system
    • <1/year maintenance frequency
    • Low calibration frequency

    For a complete range of system options, please contact us.

    SERVICE | SALES | TRAINING

    Americas +1-412-963-7530
    EMEA +49 69 20436910
    China/APAC +86 400 086 0106

    info@process-insights.com



    Real-Time PPT-Level Gas Analyzer High Purity Application Requiring Continuous Monitoring

    Process Insights_Extre_APIMS
    QUADRUPOLE MASS SPECTROMETER TECHNOLOGY (1)

    APPLICATIONS

    • Semiconductor fabs
    • Labs & research
    • Bulk gas storage
    • ASU

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    Questions? We’re here to help.