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Ultra-high Purity Gas Quality Control and Safety Monitoring

Semiconductors are considered the brains of modern electronics. They are essential components of electronic devices and enable advances in communications, computing, healthcare, military systems, transportation, clean energy and many other applications.

A Quantum Leap Over GC

The Tiger Optics Cavity Ring-Down Spectroscopy (CRDS) trace gas analyzers have supported the semiconductor industry and other micro-electronic manufacturing sectors, based on their superior sensitivity, great stability and unparalleled uptime. Free of periodic maintenance, with no moving parts or consumables, featuring built-in calibration and zero drift, Tiger’s CRDS analyzers are the top choice of the world’s leading semiconductor fabs. Based solely on experience with our analyzers, SEMI F-112 designates CRDS as THE STANDARD in determining moisture dry-down characteristics of ultra-high-purity gases and their respective delivery systems.

Total Solution for Bulk Gas & Specialty Gas Monitoring

  • HALO Max QCL CO & CO2 Trace Gas Analyzer
  • HALO KA Max for H2O & CH4 Trace Gas Analyzer
  • HALO OK for O2 Trace Level Oxygen Analyzer
  • Spark H2O for Pre-Purifier Measurements
  • Systems Integration
  • Airborne Molecular Contaminants
  • High-Purity Gases & Systems
  • Semiconductor Process Tools
  • UHP Ammonia & High-Brightness LEDs

Real-Time, Multi-Species Monitoring for All Critical Impurities in Bulk Electronic Gases

The Extrel VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Key advantages for contamination control in the UHP gases:

  • Real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more
  • Well-established, powerful mass spectrometry technology
  • Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
  • Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations

Solutions for Ultra-Pure Water Analysis

In the semiconductor industry numerous processes need ultra-pure water for their operation. Any disturbance in water quality may lead to a cost intensive plant shut down.  Continuous and fast water analysis is required to meet the high-quality standards set.  Gain accu­rate and re­liable on-line TOC moni­to­ring wtih our LAR online water analysis solutions.

  • QuickTOCtrace for Ultra-Pure Water
  • QuickTOCultra for Wastewater
  • QuickTOCpurity for Pure/Process Water

Oxygen and Safety Monitors

Our Alpha Omega Instrument field-proven, reliable trace and percent oxygen monitoring and safety monitors for industrial, medical, semiconductor, pharmaceutical, petrochemical applications, and more.

The Series 1300 Oxygen Deficiency Monitor is its extended life electrochemical sensor with optimized Enhanced Electrolyte System (EES). As a result of EES, Alpha Omega Instruments is able to offer an unparalleled three (3) year sensor warranty. The standard measuring range of the monitor is 0-30%.

The OXY-SEN™ Oxygen Monitor is an economically priced percent oxygen monitoring system equipped with a standard measuring range of 0-100%. Features dual 4-20mADC analog outputs that are scaled over 0-100% and 0-25%. The front panel has an easy to read, 3-1/2 digit liquid crystal display. Input power to the OXY-SEN is 115/230 VAC, 50-60 Hz or 24 VDC.

Leaders In Measuring Dew Point

The COSA Xentaur dew point moisture analyzers and sensors provide a complete moisture monitoring and control solution for the semiconductor industry – ideal for glove boxes and clean rooms. 

For dew point control, the COSA Xentaur Hyper-Thin-Film (HTF™) Sensor Technology can be trusted where other methods have routinely failed. The stability, accuracy and life expectancy of HTF™ sensors have set new a standard in the industry.  COSA Xentaur offers both online and spot control moisture measurement systems for gases and liquids suitable for use in hazardous as well as clean areas.  Our dew point sensors provide the highest degree of accuracy, speed, of response and stability unavailable from instruments using conventional aluminum oxide or polymer sensors.

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