In the semiconductor manufacturing process, electronic gases are used for various purposes, such as depositing thin films, etching, cleaning, and purging. The quality and purity of these gases are critical for achieving the desired performance of the final semiconductor product.

Our TIGER OPTICS™ CRDS (Cavity Ring-Down Spectroscopy) Gas Analyzers are commonly used in the semiconductor industry to measure and monitor the concentration of various electronic gases used in the manufacturing process. These electronic gases include silane, ammonia, nitrogen trifluoride, hydrogen, and other gases.

Our CRDS gas analyzers use laser spectroscopy to detect trace amounts of gases with high sensitivity and accuracy. They can measure a wide range of electronic gases, including impurities in these gases. The CRDS analyzer provides real-time and highly accurate measurement of these gases, allowing for precise control of the manufacturing process.

In semiconductor manufacturing, bulk gases such as nitrogen, oxygen, and hydrogen are used as process gases and carrier gases for deposition and etching processes. The quality of these gases is critical to the performance and reliability of the semiconductor products. Even trace levels of impurities in these gases can lead to defects in the final product, affecting its performance and reliability.

Our TIGER OPTICS™ CRDS (Cavity Ring-Down Spectroscopy) Gas Analyzers are used in the semiconductor industry to measure trace levels of impurities in bulk gases used in semiconductor manufacturing processes. These analyzers use a combination of laser-based spectroscopy and gas sample handling techniques to provide highly accurate and precise measurements of impurities in gases.

Our CRDS analyzers are used to measure trace levels of impurities in these bulk gases to ensure that they meet the required purity standards. The analyzers work by passing a laser beam through the gas sample in a high-precision optical cavity. The laser light is absorbed by the impurities in the gas sample, and the absorption is detected and quantified, providing a highly sensitive measurement of the impurity concentration.

Semiconductor manufacturing requires a highly controlled environment with very low levels of impurities, as even small amounts of certain gases can cause defects in the final product. Therefore, real-time and accurate gas analysis is crucial in maintaining a stable and consistent manufacturing process.

Our TIGER OPTICS™ CRDS (Cavity Ring-Down Spectroscopy) Gas Analyzers are used as a process tool for the semiconductor industry for several reasons:

• Trace Gas Detection: CRDS technology is highly sensitive and can detect trace amounts of impurities in gas streams, making it an ideal tool for monitoring and controlling gas purity in semiconductor manufacturing processes.
• Real-time Monitoring: Provide real-time data on gas purity, allowing for quick identification of process issues and adjustment of gas delivery systems to maintain optimal conditions.
• High Accuracy: Provides accurate measurements of gas impurities, with detection limits down to parts-per-trillion levels.
• Easy to Use: Are easy to install, operate, and maintain, with built-in calibration and verification features that simplify routine maintenance.
• Versatile: Can be used to monitor a wide range of gases, including high-purity process gases, bulk gases, and gas mixtures.
• Process Control: Can improve process control, reduce yield losses, and ensure consistent product quality.

AIRBORNE MOLECULAR CONTAMINANTS

It is essential to monitor impurities in high-brightness LEDs because impurities can have a significant impact on their performance and longevity. LEDs are highly sensitive electronic devices that emit light when current flows through them. Impurities, such as moisture or oxygen, can interfere with this process, leading to reduced light output, decreased efficiency, and shortened lifespan of the LED.

By monitoring impurities in high-brightness LEDs, manufacturers can ensure that the LEDs meet their performance and longevity specifications. This can help to prevent defects and failures in the LEDs and increase their overall reliability. Additionally, monitoring impurities can help to identify any issues in the manufacturing process that may be introducing impurities into the LEDs, allowing for improvements to be made to ensure consistent high-quality LED production.

In the production of UHP ammonia, our TIGER OPTICS™ CRDS (Cavity Ring-Down Spectroscopy) Gas Analyzers are used to measure and monitor impurities such as moisture, oxygen, and nitrogen in the ammonia gas. Even small amounts of these impurities can affect the quality of the final product, so it is essential to ensure that the ammonia gas used in the production process is of high purity. The CRDS analyzer provides highly accurate and sensitive measurement of these impurities, allowing for real-time monitoring and control of the production process.

MOCVD is a key process used to deposit thin films of semiconducting materials onto a substrate, which is critical in the production of high-performance semiconductor devices. During the MOCVD process, a variety of gases are used, including metal-organic precursors, carrier gases, and reactant gases. It is important to monitor the concentrations of these gases in real-time to ensure precise control of the deposition process and the quality of the resulting films.

Our TIGER OPTICS ™ CRDS Cavity Ring-Down Spectroscopy (CRDS) gas analyzers can be used to monitor Metal-Organic Chemical Vapor Deposition (MOCVD) processes in semiconductor manufacturing. CRDS gas analyzers use a unique optical measurement technique to detect and quantify trace amounts of gases with extremely high sensitivity and accuracy. 

Wastewater generated during the semiconductor manufacturing process contains a variety of contaminants, including heavy metals, acids, solvents, and other chemicals. These contaminants can pose a threat to the environment if they are not properly treated before being discharged into the environment.

Our LAR™ QuickTOCultra™ TOC water quality analyzer is used for the measurement of Total Organic Carbon (TOC) levels in semiconductor wastewater.   Here are the some features and benefits:

• Measuring Organic Carbon Content: Uses the highly sensitive UV oxidation method to measure the total organic carbon (TOC) content of the wastewater. 
• Wide Detection Range: Has a wide detection range making it suitable for monitoring the organic carbon content of a wide range of semiconductor wastewater samples.
• Rapid Response Time: Has a rapid response time of just 3-5 minutes, allowing for real-time monitoring of wastewater quality.
• Low Maintenance:  Is a low-maintenance instrument, with no reagents or consumables required for operation.
• Automatic Cleaning: Features an automatic cleaning system that ensures reliable and accurate measurements over long periods of time.
• Remote Monitoring: Can be connected to a network for remote monitoring and control, allowing for convenient access to data and easy integration into a larger wastewater management system.

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