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High Purity Gas Analyzers

Ultra-High Purity Gas Analyzers for Semiconductor and Critical Process Applications

Ultra-High Purity Gas Analyzers for Semiconductor and Critical Process Applications

Process Insights delivers advanced ultra-high purity (UHP) gas analyzers engineered for semiconductor manufacturing, specialty gas production, clean energy, pharmaceuticals, and research applications. Our TIGER OPTICS™ analyzers use advanced Cavity Ring-Down Spectroscopy (CRDS) technology to continuously monitor moisture (H₂O), oxygen (O₂), carbon monoxide (CO), carbon dioxide (CO₂), methane (CH₄), ammonia (NH₃), and trace contaminants at parts-per-trillion detection levels.

Designed for demanding process environments, our gas analyzers provide real-time impurity monitoring, exceptional stability, and continuous measurement accuracy to protect product quality, improve process control, and maximize production yield. CRDS technology enables rapid response, drift-free performance, and reduced maintenance requirements.

Engineered for Performance in Critical UHP Applications

Our high purity (UHP) gas analysis systems help customers:

  • Ensure gas purity compliance across critical control points
  • Protect high-value processes and components
  • Improve operational efficiency and minimize downtime
  • Meet stringent industry standards for purity and safety
  • Support cleanroom, lab, and production environments with scalable technology

What is Cavity Ring-Down Spectroscopy (CRDS)?

CRDS is a laser-based optical measurement technology used to detect trace impurities in gases with exceptional sensitivity and stability.

Laser light reflects thousands of times between highly reflective mirrors. Trace gas molecules absorb a portion of the light, changing the ring-down time. This allows direct, highly selective measurements at ppb and ppt concentrations.

Benefits include:

  • Exceptional sensitivity
  • Direct optical measurement
  • Fast response
  • Minimal drift
  • No consumable sensors
  • Low maintenance
  • Continuous operation
  • High repeatability


FEATURED PRODUCTS

APIMS

Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Rev Up Your Process Control 

Our mobile GO-cart™ is easy to move around the semi fab and comes with the following features:

  • Space for up to three T-I Max analyzers with low-power, fanless vacuum pumps
  • No calibration, maintenance or consumables required (for both cart and analyzers)
  • Top-mounted central control touchscreen
  • Integrated UPS backup power supply (optional)
  • Conductive ESD paint (optional)
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TIGER OPTICS UHP gas analyzers WITH crds tECHNOLOGY

CQC / IQC Cabinet Total Monitoring Solution

CQC / IQC Cabinet Total Monitoring Solution Total Solution for Dedicated or Gas-Cycling CQC / IQC Cabinet
CQC / IQC Cabinet Total Monitoring Solution

VeraSpec™ APIMS

TIGER OPTICS™ Atmospheric Pressure Ionization Mass Spectrometer
VeraSpec APIMS

GO-cart™ for AMC Monitoring

TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers
TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers

GO-cart™ for Analytical Monitoring

TIGER OPTICS™ Mobile Cart for H2O & O2 Analytical Monitoring
TIGER OPTICS™ Mobile Cart for Analytical Monitoring

HALO Max QCL™ CO2

TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Dioxide Analysis
Process Insights_Tiger Optics QCL gas analyzer

HALO Max QCL™ CO

TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Monoxide Analysis
Process Insights_Tiger Optics QCL gas analyzer

HALO KA™ H2O

TIGER OPTICS™ ppt-level Moisture Detection CRDS Analyzer
PROCESS INSIGHTS_TIGER OPTICSHALO-KA-H2O-2020_small-5afa4b8c

HALO KA Max™ CH4

TIGER OPTICS™ CRDS Analyzer for Sub-ppb Methane Detection in Bulk Gases
HALO-KA-Max_FacingLEFT_CH4_small-4551e30e

HALO KA Max™ H2O

TIGER OPTICS™ CRDS Analyzer for ppt-level Moisture Detection

HALO KA Max™ NH3

TIGER OPTICS™ CRDS Analyzer for ppt-level Ammonia Detection in Bulk Gases
HALO-KA-Max_FacingLEFT_NH3_small-822f44c9

T-I Max EtO™

TIGER OPTICS™ CRDS Analyzer for Trace Ethylene Oxide
T-I Max EtO

Prismatic 3™

TIGER OPTICS™ Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3 gas analyzer

Prismatic 3+™

TIGER OPTICS™ PPB Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3+ gas analyzer

T-I MAX™ AIR GHG

TIGER OPTICS™ CRDS Analyzer for Greenhouse & Air Quality Gas Monitoring
T-i-MAX-AIR GAS ANALYZER

T-I MAX X3

TIGER OPTICS™ Next Gen AMC Monitors
TIGER OPTICS T-I MAX X2_X3 Next Gen AMC Monitors

T-I MAX™ HCl

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-HF-LEFT-NEW-small-589bcb7b

T-I MAX™ HF

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-HF-LEFT-NEW-small-589bcb7b

T-I MAX™ NH3

TIGER OPTICS™ CRDS Analyzer for Airborne Molecular Contaminants in Semiconductor Cleanrooms
T-i-MAX-NH3-LEFT-NEW-small-be8b867a

T-I MAX™ CEM

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-CEM-HCl-LEFT-NEW-small-59fdec28

CO-REKT™

TIGER OPTICS™ CRDS Analyzer for Trace Level Impurity for Hydrogen
Process Insights_Tiger Optics__CO-rekt-c55fdec0

ALOHA+H2O™

TIGER OPTICS™ PPB-Level Moisture Detection in Ultra-Pure Ammonia CRDS Analyzer
Process Insights-Tiger Optics_ALOHA_H2O_2020_small-e90dd22a

Prismatic 3™

TIGER OPTICS™ Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3 gas analyzer

Prismatic 3+™

TIGER OPTICS™ PPB Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3+ gas analyzer

T-I MAX™ AIR GHG

TIGER OPTICS™ CRDS Analyzer for Greenhouse & Air Quality Gas Monitoring
T-i-MAX-AIR GAS ANALYZER

T-I MAX X3

TIGER OPTICS™ Next Gen AMC Monitors
TIGER OPTICS T-I MAX X2_X3 Next Gen AMC Monitors

T-I MAX™ HCl

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-HF-LEFT-NEW-small-589bcb7b

T-I MAX™ HF

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-HF-LEFT-NEW-small-589bcb7b

T-I MAX™ NH3

TIGER OPTICS™ CRDS Analyzer for Airborne Molecular Contaminants in Semiconductor Cleanrooms
T-i-MAX-NH3-LEFT-NEW-small-be8b867a

T-I MAX™ CEM

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-CEM-HCl-LEFT-NEW-small-59fdec28

CO-REKT™

TIGER OPTICS™ CRDS Analyzer for Trace Level Impurity for Hydrogen
Process Insights_Tiger Optics__CO-rekt-c55fdec0

ALOHA+H2O™

TIGER OPTICS™ PPB-Level Moisture Detection in Ultra-Pure Ammonia CRDS Analyzer
Process Insights-Tiger Optics_ALOHA_H2O_2020_small-e90dd22a
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