Process Insights delivers innovative measurement products, systems, and analytical solutions for your high purity applications. Our products deliver real value to our customers, improve safety, meet compliance, and protect assets, personnel, and the environment. It’s engineering without compromise.
Get the most reliable, most precise gas analysis technologies available on the market today for high purity applications. We will work to match your needs and budget and provide the optimal, and most stable process analysis solution for your application. Our high purity gas analyzers and integrated systems provide stable and reliable bulk gas continuous quality control (CQC) monitoring (PPB-PPT Levels) for pre- and post-purifier trace impurity measurements.
Based upon our Cavity Ring-Down Spectroscopy (CRDS) gas analyzer performance, the SEMI F-112 standard calls out CRDS as the technology of choice in determining moisture dry-down characteristics of high-purity gas systems. To check incoming or point-of-use quality, Our CRDS analyzers monitor for O2, H2O, CH4, CO, CO2 and more down to parts-per-billion (ppb) and even parts-per-trillion (ppt) levels. A special low-pressure version, the HALO LP monitors for impurities in hydrides, including arsine, phosphine and ammonia. If low-ppb moisture measurement in pure ammonia is required, the ALOHA+ H2O specializes in this application.
The high potential for atmospheric leaks during cylinder and truck fill, as well as in gas delivery, storage and distribution systems, drives the requirement for continuous on-site production monitoring at the world’s leading semiconductor fabs. Typically, H2, N2, Ar, He and O2 are monitored for trace H2O, O2 and CH4 contamination. Other contaminants that may be monitored are CO, CO2, and acid gases.
The recent addition of air and CDA to the measurement list addresses the latest Lithography requirements. For qualifying new gas lines and welds, dry Ar and N2 are typically used. To ensure gas quality throughout the fab, monitoring is also performed at gas cylinders, in addition to the lines following a cylinder exchange and at purifiers to verify their functionality.
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Watch and see how quickly the installation process is with our Spark.