Air quality and climate change are two key issues that drive requirements for detection and analysis of atmospheric molecules.  Airborne Molecular Contamination (AMC) is a concern for high technology manufacturing process like in the semiconductor industry.  Airborne contaminants reduce yield-quality, impact tools, and are costly when not controlled. In the semiconductor industry, AMCs can have a significant impact on the production process and the quality of the end product. AMCs can cause defects in semiconductor devices, which can affect their performance and reliability. The presence of AMCs can also reduce the yield of the manufacturing process, which can result in increased production costs.

We know your process and how critical it is for you to protect precious and limited resources.

MOBILE AMC MONITORING

CRDS (Cavity Ring-Down Spectroscopy) is a highly sensitive technique that can detect a wide range of atmospheric trace gases and airborne molecular contaminants (AMCs). The method uses the principles of absorption spectroscopy to measure the concentration of molecules in a gas sample.  With high precision, sensitivity and specificity, our TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) gas analyzer is one of the best analytical methods available to monitor contaminants, pollutants and greenhouse gases, without interference from moisture and other atmospheric constituents.  Gain continuous measurements easily with little or no maintenance and few consumables. 

Exposure of wafers to Airborne Molecular Contaminants (AMCs) is a great concern to semiconductor manufacturers, which can cause yields to drop.  Our TIGER OPTICS T-I Max CEM™ analyzers monitor cleanroom environments.  Our CRDS technology makes measurements easy and free of interferences from other contaminants.  

Options Available

• Standalone
• Rack-mounted AMC Combo (HCl/HF, HCl/NH₃ or HF/NH₃)
• AMC Mobile GO-cart™ (with up to three analyzers)

APPLICATIONS

• Semiconductor Industry AMC Monitoring
• Cleanroom air
• Front Opening Unified Pods (FOUPs)
• Silicon wafers
• Continuous monitoring of air quality pollutants in other microelectronics manufacturing
• Continuous and precise measurement of Greenhouse Gas (GHG) monitoring

GET THE BENEFITS OF OUR APIMS TECHNOLOGY

VeraSpec APIMS makes the analytical difference through intuitive, low-maintenance operation.  Typical VeraSpec APIMS low detection limits by contaminant and bulk gas.

APPLICATIONS

• Semiconductor fabs
• Labs & research
• Bulk gas storage
• ASU