Airborne Molecular Contaminants

REAL-TIME SOLUTIONS FOR AIRBORNE MOLECULAR CONTAMINATION 

Air quality and climate change are two key issues that drive requirements for detection and analysis of atmospheric molecules.  Airborne Molecular Contamination is a concern for high technology manufacturing process like in the semiconductor industry.  Airborne contaminants reduce yield-quality, impact tools, and are costly when not controlled. In the semiconductor industry, AMCs can have a significant impact on the production process and the quality of the end product. AMCs can cause defects in semiconductor devices, which can affect their performance and reliability. The presence of AMCs can also reduce the yield of the manufacturing process, which can result in increased production costs.

We know your process and how critical it is for you to protect precious and limited resources.

WE’RE HERE FOR YOU

Get the most reliable, most precise gas analysis technologies available on the market today.  We will work to match your needs and budget and provide the optimal, and most stable process analysis solution for your application. 

Need help? No problem.  We’re here to help.  Contact us today.


MOBILE AMC MONITORING

CRDS (Cavity Ring-Down Spectroscopy) is a highly sensitive technique that can detect a wide range of atmospheric trace gases and airborne molecular contaminants (AMCs). The method uses the principles of absorption spectroscopy to measure the concentration of molecules in a gas sample.  With high precision, sensitivity and specificity, our Cavity Ring-Down Spectroscopy (CRDS) gas analyzer is one of the best analytical methods available to monitor contaminants, pollutants and greenhouse gases, without interference from moisture and other atmospheric constituents.  Gain continuous measurements easily with little or no maintenance and few consumables. 

Exposure of wafers to Airborne Molecular Contaminants (AMCs) is a great concern to semiconductor manufacturers, which can cause yields to drop.  Our T-I Max CEM analyzers monitor cleanroom environments.  Our CRDS technology makes measurements easy and free of interferences from other contaminants.  

Options Available:

  • Standalone
  • Rack-mounted AMC Combo (HCl/HF, HCl/NH3 or HF/NH3)
  • AMC Mobile GO-cart (with up to three analyzers)

APPLICATIONS

  • Semiconductor Industry AMC Monitoring
  • Cleanroom air
  • Front Opening Unified Pods (FOUPs)
  • Silicon wafers
  • Continuous monitoring of air quality pollutants in other microelectronics manufacturing
  • Continuous and precise measurement of Greenhouse Gas (GHG) monitoring

REAL-TIME AMC MULTI-SPECIES MONITORING

Our VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Well-established, powerful mass spectrometry technology for real-time, multi-species monitoring for ALL Critical Impurities in bulk electronic gases including trace O2, H2, H2O, CH4, CO, CO2, NH3, Xe and more.

GET THE BENEFITS OF OUR APIMS TECHNOLOGY

VeraSpec APIMS makes the analytical difference through intuitive, low-maintenance operation.  Typical VeraSpec APIMS low detection limits by contaminant and bulk gas.

APPLICATIONS

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Continuous Emissions Monitoring (CEMS)

Continuous Emissions Monitoring (CEMS) is important for several reasons, including:

  1. Compliance with regulations: Many countries have regulations in place that limit the amount of pollutants that industrial facilities can emit into the atmosphere. CEMS provides a way for these facilities to monitor their emissions in real-time and ensure compliance with regulatory requirements.

  2. Environmental protection: Emissions from industrial facilities can have a significant impact on the environment, contributing to air pollution, acid rain, and other environmental issues. CEMS helps to identify sources of emissions and can be used to develop strategies to reduce or eliminate them, helping to protect the environment.

  3. Public health: Air pollution from industrial emissions can have serious health implications for people living in the surrounding areas. CEMS can provide information on the type and quantity of pollutants being emitted, allowing authorities to take action to protect public health.

  4. Process optimization: CEMS data can be used to identify areas where industrial processes can be optimized to reduce emissions, improve efficiency, and save costs.

Gas analyzers are used in Continuous Emissions Monitoring (CEMS) systems to measure the concentration of various gases in industrial emissions. These analyzers work by using one or more techniques to detect and quantify the presence of specific gases.

  1. Infrared (IR) absorption spectroscopy: This method uses IR light to measure the concentration of gases that absorb IR radiation at specific wavelengths. The amount of light absorbed by the gas is proportional to its concentration, allowing for accurate measurement.

  2. Ultraviolet (UV) absorption spectroscopy: Similar to IR absorption spectroscopy, UV absorption spectroscopy uses UV light to measure the concentration of gases that absorb UV radiation at specific wavelengths.

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  1. Ultraviolet (UV) absorption spectroscopy: Similar to IR absorption spectroscopy, UV absorption spectroscopy uses UV light to measure the concentration of gases that absorb UV radiation at specific wavelengths.
  2. Electrochemical sensors: Electrochemical sensors work by converting a chemical reaction between the gas being measured and a sensing electrode into an electrical signal, which can be used to determine the gas concentration.

  3. Flame ionization: This method involves burning the gas sample in a flame and measuring the electrical current generated by the ionization of the combustion products. The current is proportional to the concentration of hydrocarbons in the sample.


OTHER APPLICATIONS

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