MOBILE AMC MONITORING

CRDS (Cavity Ring-Down Spectroscopy) is a highly sensitive technique that can detect a wide range of atmospheric trace gases and airborne molecular contaminants (AMCs). The method uses the principles of absorption spectroscopy to measure the concentration of molecules in a gas sample.  With high precision, sensitivity and specificity, our TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) gas analyzer is one of the best analytical methods available to monitor contaminants, pollutants and greenhouse gases, without interference from moisture and other atmospheric constituents.  Gain continuous measurements easily with little or no maintenance and few consumables. 

Exposure of wafers to Airborne Molecular Contaminants (AMCs) is a great concern to semiconductor manufacturers, which can cause yields to drop.  Our CRDS technology makes measurements easy and free of interferences from other contaminants.  

Options Available

• Standalone
• Rack-mounted AMC Combo (HCl/HF, HCl/NH₃ or HF/NH₃)
• AMC Mobile GO-cart™ (with up to three analyzers)

APPLICATIONS

• Semiconductor Industry AMC Monitoring
• Cleanroom air
• Front Opening Unified Pods (FOUPs)
• Silicon wafers
• Continuous monitoring of air quality pollutants in other microelectronics manufacturing
• Continuous and precise measurement of Greenhouse Gas (GHG) monitoring

Multi-Max AMC Monitoring Solution

You can spend a long time looking for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy our Multi-Max™ AMC Monitoring Solution to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers, and cleanroom bays.

In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. The International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices.

With a particular focus on the major contributors to the “chemical contamination” element of AMCs, our Multi-Max AMC Monitoring combines our T-I Max series CRDS analyzers that can detect and continuously monitor HF, HCl, and NH₃ with an unprecedented combination of sensitivity, selectivity, and speed of response. Our AMC Monitoring Solution delivers the flexibility, accuracy and reliability you need.

Benefits

• Surveying different micro-environments in a fab is now fast and easy with our safe, flexible, and easy to use Multi-Max AMC Monitoring Solution.
• Can be equipped with any combination of our T-I Max CRDS analyzers to monitor simultaneously and in real-time for the most critical contaminants in cleanroom air: NH₃, HCl, and HF (other analytes available as well).
• All our analyzers come with a compact, low-power, fanless vacuum pump optimized for cleanroom operation.