VeraSpec APIMS

Atmospheric Pressure Ionization Mass Spectrometer

Real-Time Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

Our EXTREL™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

Industry-best lower detection limits (LDLs) for bulk gas analysis
Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O₂, H₂, H₂O, CH₄, CO, CO₂, Xe and more
Well-established, powerful mass spectrometry technology
Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration

Typical Low Detection Limits by Contaminant and Bulk Gas

RELIABLE MULTI-STREAM PPT LEVEL GAS ANALYSIS SOLUTIOn

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For a complete range of analytical instrumentation, applications, systems, and service options, we will work to match your needs and budget and provide the optimal, and most stable process analysis solution for your application.

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APPLICATIONS

Semiconductor fabs
Labs & research
Bulk gas storage
ASU

BENEFITS

High Sensitivity: Capable of detecting and quantifying trace amounts of molecules in complex matrices, even at low concentrations, with high sensitivity.
High Selectivity: Can distinguish between different types of molecules based on their mass-to-charge ratio, providing high selectivity for target compounds.
Real-time Analysis: Offers real-time analysis, allowing for rapid and continuous monitoring of chemical processes and reactions.
Wide Range of Applications: Can be used for a variety of applications, including environmental monitoring, pharmaceuticals, food and beverage, and petrochemicals.
Simple Sample Preparation: Requires minimal sample preparation, reducing the time and cost associated with sample preparation and analysis.
Compact Size: Has a compact design, making it easy to integrate into existing laboratory setups and industrial processes.