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VeraSpec APIMS

Atmospheric Pressure Ionization Mass Spectrometer

VeraSpec APIMS Real-Time Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

    Our EXTREL™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

    Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

    • Industry-best lower detection limits (LDLs) for bulk gas analysis
    • Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more
    • Well-established, powerful mass spectrometry technology
    • Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration 

    Typical Low Detection Limits by Contaminant and Bulk Gas

    VeraSpec APIMS Gas Matrix

    RELIABLE MULTI-STREAM PPT LEVEL GAS ANALYSIS SOLUTIOn

    APPLICATIONS

    BENEFITS

    • High Sensitivity: Capable of detecting and quantifying trace amounts of molecules in complex matrices, even at low concentrations, with high sensitivity.
    • High Selectivity: Can distinguish between different types of molecules based on their mass-to-charge ratio, providing high selectivity for target compounds.
    • Real-time Analysis: Offers real-time analysis, allowing for rapid and continuous monitoring of chemical processes and reactions.
    • Wide Range of Applications: Can be used for a variety of applications, including environmental monitoring, pharmaceuticals, food and beverage, and petrochemicals.
    • Simple Sample Preparation: Requires minimal sample preparation, reducing the time and cost associated with sample preparation and analysis.
    • Compact Size: Has a compact design, making it easy to integrate into existing laboratory setups and industrial processes.
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    SOME OTHER SOLUTIONS FOR HIGH PURITY APPLICATIONS

    HALO KA™ H2O

    TIGER OPTICS™ ppt-level Moisture Detection CRDS Analyzer
    PROCESS INSIGHTS_TIGER OPTICSHALO-KA-H2O-2020_small-5afa4b8c

    HALO KA Max™ CH4

    TIGER OPTICS™ CRDS Analyzer for Sub-ppb Methane Detection in Bulk Gases
    HALO-KA-Max_FacingLEFT_CH4_small-4551e30e

    HALO KA Max™ H2O

    TIGER OPTICS™ CRDS Analyzer for ppt-level Moisture Detection

    HALO KA Max™ NH3

    TIGER OPTICS™ CRDS Analyzer for ppt-level Ammonia Detection in Bulk Gases
    HALO-KA-Max_FacingLEFT_NH3_small-822f44c9

    HALO Max QCL™ CO2

    TIGER OPTICS™ CRDS Analyzer for ppt-level Carbon Dioxide Analysis
    Process Insights_Tiger Optics QCL gas analyzer

    HALO Max QCL™ CO

    TIGER OPTICS™ CRDS Analyzer for ppt-level Carbon Monoxide Analysis
    Process Insights_Tiger Optics QCL gas analyzer

    Custom CRDS Gas Analysis Solutions

    Turnkey Systems Integration
    Process Insights_CRDS - System Cabinet

    GO-cart™

    TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers
    Go-Cart for MOBILE Cart for AMC Monitoring
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    SOLUTIONS FLYERS

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    Questions? We’re here to help.