Atmospheric Pressure Ionization Mass Spectrometer
Real-Time Multi-Species Monitoring
For Critical Impurities in Bulk Electronic Gases
Our EXTREL™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.
Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.
- Industry-best lower detection limits (LDLs) for bulk gas analysis
- Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more
- Well-established, powerful mass spectrometry technology
- Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration
RELIABLE MULTI-STREAM PPT LEVEL GAS ANALYSIS SOLUTIOn
- High Sensitivity: Capable of detecting and quantifying trace amounts of molecules in complex matrices, even at low concentrations, with high sensitivity.
- High Selectivity: Can distinguish between different types of molecules based on their mass-to-charge ratio, providing high selectivity for target compounds.
- Real-time Analysis: Offers real-time analysis, allowing for rapid and continuous monitoring of chemical processes and reactions.
- Wide Range of Applications: Can be used for a variety of applications, including environmental monitoring, pharmaceuticals, food and beverage, and petrochemicals.
- Simple Sample Preparation: Requires minimal sample preparation, reducing the time and cost associated with sample preparation and analysis.
- Compact Size: Has a compact design, making it easy to integrate into existing laboratory setups and industrial processes.
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PHARMACEUTICALS & LIFE SCIENCE