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VeraSpec APIMS

Atmospheric Pressure Ionization Mass Spectrometer

Real-Time Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

    Our EXTREL™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

    Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

    • Industry-best lower detection limits (LDLs) for bulk gas analysis
    • Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more
    • Well-established, powerful mass spectrometry technology
    • Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration 
    VeraSpec APIMS Gas Matrix

    APPLICATIONS

    RELIABLE MULTI-STREAM PPT LEVEL GAS ANALYSIS SOLUTIOn

    Process Insights_Extrel VeraSpec APIMS

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    Application Questionnaire.

    BENEFITS

    • High Sensitivity: Capable of detecting and quantifying trace amounts of molecules in complex matrices, even at low concentrations, with high sensitivity.
    • High Selectivity: Can distinguish between different types of molecules based on their mass-to-charge ratio, providing high selectivity for target compounds.
    • Real-time Analysis: Offers real-time analysis, allowing for rapid and continuous monitoring of chemical processes and reactions.
    • Wide Range of Applications: Can be used for a variety of applications, including environmental monitoring, pharmaceuticals, food and beverage, and petrochemicals.
    • Simple Sample Preparation: Requires minimal sample preparation, reducing the time and cost associated with sample preparation and analysis.
    • Compact Size: Has a compact design, making it easy to integrate into existing laboratory setups and industrial processes.

    SOLUTIONS FLYERS


    OUR QUADRUPOLE MASS SPECTROMETERS FOR INDUSTRIAL APPLICATIONS

    MAX300-RTG™ 2.0

    EXTREL™ Industrial Process Quadrupole Mass Spectrometer
    max300-rtg 2.0 mass spectrometer

    MAX300-AIR™

    EXTREL™ Air & Environmental Quadrupole Mass Spectrometer
    Process InisightsExtrel MAX300-AIR

    MAX300-BIO™

    EXTREL™ Bioreactor & Fermentation Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-BIO BIOREACTOR GAS ANALYZER

    MAX300-CAT™

    EXTREL™ Lab Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-CAT

    MAX300-LG™

    EXTREL™ Lab Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-LG

    MAX300-EGA™

    EXTREL™ Evolved Gas Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX300-EGA Evolved Gas Analyzer

    MAX-QMS™

    EXTREL™ Flange Mounted Quadrupole Mass Spectrometer
    Process Insights_Extrel MAX-QMS FLANGE MOUNTED SYSTEM

    Lamp Analyzer

    EXTREL™ Quadrupole Mass Spectrometer
    Process Insights_Extrel Lamp-Analyzer

    VeraSpec HRQ™

    EXTREL™ Quadrupole Mass Spectrometers System
    Process Insights_Extrel VeraSpec-HRQ-gas analyer

    VeraSpec™ Molecular Beam & Plasma Analysis System

    EXTREL™ Quadrupole Mass Spectrometer System
    VeraSpec™ Molecular Beam and Plasma Analysis System

    RGA™

    EXTREL™ Residual Gas Quadrupole Mass Spectrometer
    VeraSpec™ Molecular Beam and Plasma Analysis System

    MS/MS Systems

    EXTREL™ Quadrupole Mass Spectrometer Systems
    Process Insights_Extrel Complete MS Systems

    Custom Systems

    EXTREL™ Customized Quadrupole Mass Spectrometer System
    Process Insights_Extrel custom gas mass spec system

    Components & Power Supplies

    For EXTREL™ Quadrupole Mass Spectrometer & Systems
    Process Insights_Extrel Complete MS Systems
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