VeraSpec APIMS

Atmospheric Pressure Ionization Mass Spectrometer

Real-Time Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

Our EXTREL™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime.

Industry-best lower detection limits (LDLs) for bulk gas analysis
Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O₂, H₂, H₂O, CH₄, CO, CO₂, Xe and more
Well-established, powerful mass spectrometry technology
Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration

Typical VeraSpec APIMS Low Detection Limits by Contaminant and Bulk Gas

RELIABLE MULTI-STREAM PPT LEVEL GAS ANALYSIS SOLUTIOn

Process Insights_APIMS SX5_Brochure_EN_4PP_US_v231024_1

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APPLICATIONS

Semiconductor fabs
Labs & research
Bulk gas storage
ASU

BENEFITS

High Sensitivity: Capable of detecting and quantifying trace amounts of molecules in complex matrices, even at low concentrations, with high sensitivity.
High Selectivity: Can distinguish between different types of molecules based on their mass-to-charge ratio, providing high selectivity for target compounds.
Real-time Analysis: Offers real-time analysis, allowing for rapid and continuous monitoring of chemical processes and reactions.
Wide Range of Applications: Can be used for a variety of applications, including environmental monitoring, pharmaceuticals, food and beverage, and petrochemicals.
Simple Sample Preparation: Requires minimal sample preparation, reducing the time and cost associated with sample preparation and analysis.
Compact Size: Has a compact design, making it easy to integrate into existing laboratory setups and industrial processes.