Our EXTREL™ Residual Gas Analyzer RGA™ is a reliable, easy-to-use residual gas analyzer that includes full range pressure measurement. It is the best performing RGA at an affordable price, which makes the system an ideal choice for background gas analysis, leak detection and vacuum chamber characterization.   It is available in two (2) mass ranges, 1 to 100 amu or 1 to 300 amu. The system comes standard with a Faraday detector or an optional dual Faraday/Electronic multiplier detector. The RGA utilizes RS-232C or USB communication with Windows® XP or 7 operating systems. The software is powerful and easy to use. 

The RGA100 and RGA300 are the ultimate RGA measurement probes. A single device, mounted on a 2-3/4” inch flange, contains a Pirani gauge, an ion gauge, and a quadrupole mass analyzer. An intelligent start-up design allows for the system to know when to switch from the Pirani to the ion gauge, and finally to the quadrupole system. All Extrel models start at 1 amu. The RGA100 goes to 100 amu and the RGA300 goes to 300 amu. 

Long-Life Dual Filaments and the Ion Source Kits 

Dual thoria-coated filaments are used for electron emission for both the quadrupole and ion gauge operation. The filaments are protected against stress from vacuum excursions by both the ion and the Pirani functions. Our RGA will outlast filaments in conventional RGA units. When a filament eventually does burn out, the second filament will allow for normal operation until filaments are replaced.

Ultra-Sensitive Detection 

The RGA units come standard with a Faraday cup detection system. With the Faraday cup alone, the partial pressure measurements from 10-4 and 10-11 torr may be made. With the multiplier option, this sensitivity is extended down to 5 x 10-14 torr. The novel ion current amplifier detects ion currents from 10-6 to 10-15 amps in a single scan. This huge dynamic range allows for very large and very small peaks to coexist on one scan. 


  • Modular compact design for ease of installation and maintenance
  • Full pressure measurement with built-in Pirani and BA gauges
  • High measurement speed, stability and resolution
  • Minimum detectable partial pressure 5 x 10-14 Torr
  • 30-minute warm-up time to operation support to multiple heads
  • Dual filaments with over-pressure protection
  • Programmable electron and ion energy
  • Intuitive software with easy-to-use graphic interface
  • Choice of computer interface: Serial or USB
  • Worldwide on-site and remote support

RGA Vacuum Plus Software

All RGA systems come standard with the Vacuum Plus Real-Time Windows® software package. An intuitive graphical user interface makes the total functionality of the system available to the user. Complete pump-down may be monitored quickly and easily. For further analysis, XML data files (text format) can be saved for transfer into spreadsheets, and graphic images can be saved or copied into other Windows programs.

Powerful Operational Modes

The Vacuum Plus software comes with the operation modes of Analog Sweep mode, Trend mode, Leak Detect mode and Diagnostic Outputs mode. Choices of analog or logarithmic intensity outputs allow the user to zero in on exactly what they want to see. Scale bars further increase the ability of the user to zoom in on their area of interest. Grid line options allow for more exact numerical determinations of peak heights on graphs. Intensity outputs may be set to Torr, Pascal or Ion current.

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Residual Gas Mass Spectrometer

Process Insights_Extrel Flanged Mounted RGA

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