MAX-QMS

Unmatched Residual Gas Analyzers

Powerful Mass Spectrometer for Lamp Manufacturing Applications

Our EXTREL™ MAX-QMS™ Flanged Mounted Systems are UHV-compatible flange mounted quadrupole mass spectrometers. The ionizer, quadrupole mass filter, and detector on a mounting flange are designed for inclusion in your experimental vacuum chamber. The electronics consist of the rack mountable QCi (Quadrupole Control, integrated) quadrupole mass filter power supply and a Merlin CS (Command System). The Merlin mass spectrometer controller software completes the system. Our MAX Systems are based on our industry leading mass spectrometer technology centered on our range of RF power supplies, and our 9.5 mm and 19 mm tri filter mass filters.

Spectra Scan

20 separate non-overlapping mass ranges, more available using customer-written Macros
Real-time profile, histogram and chromatograph (TIC) display
Single scan, continuous and external trigger
12,500 data points per second scanning

Single Ion Monitoring

29 SIM masses, more available using customer-written Macros
Real-time profile, histogram and chromatograph (TIC) display
Single scan, continuous, external trigger

MS/MS

Monitor and control combinations of up to 4 separate quadrupoles, hexapoles, or octupoles using optional TQMS module

System Control Data Manipulation

Averaging and data smoothing
Background subtraction
Trend plotting
Post-acquisition centroid
Chromatographic quantitation
Calibration curves

APPLICATIONS

Bakeout/Vacuum Pumpdown
Catalysis
Combustion Analysis
CVD Process Monitoring
Dynamic SIMS
Emissions Monitoring
End Point Detection
Flow Tube Detection

Laser Ablation Studies
Molecular Beam Studies
Outgassing Studies
Plasma Monitoring
Residual Gas Analysis (RGA)
Scattering
Temperature Programmed Desorption (TPD)

Clusters and Biomolecule Analysis
Atmospheric Chemistry Studies
Plasma and Combustion Studies
Materials Analysis
He/D2 Analysis

Flanged Mounted Mass Spectrometer

Process Insights_Extrel MAX-QMS FLANGE MOUNTED SYSTEM

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BENEFITS

The MAX-QMS™ Flanged Mounted System benefits:

High Sensitivity: Offers high sensitivity and low detection limits, allowing for the measurement of trace-level gases in complex gas mixtures.
Real-Time Monitoring: Provides real-time monitoring of gas concentrations, allowing for quick adjustments to process conditions.
Multiple Gas Detection: Is capable of detecting multiple gases simultaneously, making it a versatile option for gas analysis.
Wide Range of Applications: Is suitable for a wide range of applications, including process control, emissions monitoring, and atmospheric research.
Easy to Use: Is easy to use, with an intuitive interface and simple calibration procedure.
Low Maintenance: Requires minimal maintenance, reducing downtime and maintenance costs.
Flexible Mounting Options: Can be mounted directly onto a process line or on a flange, providing flexibility in installation.

INDUSTRIES

Some of the common industries that use the MAX-QMS™ Flanged Mounted System include:

Chemical Industry: Used in the chemical industry for the analysis of gases during production, transportation, and processing.
Petrochemical Industry: Used in the petrochemical industry for the analysis of gases and hydrocarbons in refineries and production facilities.
Environmental Monitoring: Used in environmental monitoring to measure gas emissions from industrial plants, landfills, and other sources.
Semiconductor Industry: Used in the semiconductor industry for the analysis of gas purity during the production of microchips and other semiconductor devices.
Automotive Industry: Used in the automotive industry for the analysis of exhaust gases and emissions from vehicles.
Aerospace Industry: Used in the aerospace industry for the analysis of the composition of gases in aircraft cabins and in rocket fuel systems.
Medical Industry: Used in the medical industry for the analysis of gases in anesthesia delivery systems, respiratory therapy, and other medical applications.

We offer a wide range of flange mounted Quadrupole Mass Spectrometers (QMSs) and Residual Gas Analyzers (RGAs) that can fit any application or budget.

All of these systems include an Ionizer, Quadrupole Mass Filter, Detector, Mounting Flange, Power Supplies, Control Electronics and Software.
Can be used as the core of a new mass spectrometer system, or as a way to add mass spectrometry to an existing system or as a diagnostic tool.

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