Unmatched Quadrupole Mass Spectrometer & Residual Gas Analyzers

Powerful Mass Spectrometer for Lamp Manufacturing Applications

Our Extrel MAX Systems are UHV-compatible flange mounted quadrupole mass spectrometers. The ionizer, quadrupole mass filter, and detector on a mounting flange are designed for inclusion in your experimental vacuum chamber. The electronics consist of the rack mountable QCi (Quadrupole Control, integrated) quadrupole mass filter power supply and a Merlin CS (Command System). The Merlin mass spectrometer controller software completes the system.  Our MAX Systems are based on our industry leading Extrel mass spectrometer technology centered on our range of RF power supplies, and our 9.5 mm and 19 mm trifilter mass filters. With a broad range of capabilities and available options, as well as our ability to provide customer designs, the MAX Systems can be configured for an extensive variety of applications. 

Spectra Scan 

  • 20 separate non-overlapping mass ranges, more available using customer-written Macros 
  • Real-time profile, histogram and chromatograph (TIC) display 
  • Single scan, continuous and external trigger 
  • 12,500 data points per second scanning

Single Ion Monitoring 

  • 29 SIM masses, more available using customer-written Macros 
  • Real-time profile, histogram and chromatograph (TIC) display 
  • Single scan, continuous, external trigger 


  • Monitor and control combinations of up to 4 separate quadrupoles, hexapoles, or octupoles using optional TQMS module 

System Control Data Manipulation 

  • Averaging and data smoothing 
  • Background subtraction 
  • Trend plotting 
  • Post-acquisition centroid 
  • Chromatographic quantitation 
  • Calibration curves

For a complete range of system options, please contact us.


Americas +1 412.963.7530 
EMEA +49 69 20436910
China/APAC +86 400 086 0106

Delivers exceptional resolution and accuracy

Process Insights_Extrel Flanged Mounted RGA


    • Bakeout/Vacuum Pumpdown
    • Catalysis
    • Combustion Analysis
    • CVD Process Monitoring
    • Dynamic SIMS
    • Emissions Monitoring
    • End Point Detection
    • Flow Tube Detection
    • Laser Ablation Studies
    • Molecular Beam Studies
    • Outgassing Studies
    • Plasma Monitoring
    • Residual Gas Analysis (RGA)
    • Scattering
    • Temperature Programmed Desorption (TPD)

    Our Other Mass Spectrometer for Industrial Applications

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    Extrel Fixed Magnetic Mass Spectrometer Gas Analyzer

    MGA Sample Conditioning System

    Extrel Mass Spectrometer Gas Analyzer

    VeraSpec HRQ™

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    Mass Spec Systems

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    Process Insights_Extrel Complete MS Systems

    Questions? We’re here to help.