Specialty Gas Analyzers –
Gas Purity & Mixture Analysis
Specialty Gas Analyzers – Gas Purity & Mixture Analysis
Specialty gas quality depends on two critical measurements: verifying the concentration of intended gas components and detecting trace impurities that should not be present.
Process Insights provides advanced specialty gas analyzers for both challenges. TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) provides highly sensitive trace impurity measurement for ultra-high-purity and specialty gases, while EXTREL™ quadrupole mass spectrometry (QMS) provides rapid, multicomponent analysis for specialty gas mixtures, blending, quality control, and composition verification. Together, these technologies help specialty gas producers improve product quality, verify specifications, reduce analytical uncertainty, and deliver gases with greater confidence.
What is Cavity Ring Down Spectroscopy?
Technical Specifications of Tiger Optics CRDS
Cavity Ring-Down Spectroscopy: Principles, Applications, and Benefits
What Is Specialty Gas Analysis?
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Specialty gas analysis is the measurement of gas composition and trace impurities to verify that a specialty or high-purity gas meets its required concentration, purity, and quality specifications.
Depending on the application, specialty gas analysis may require measurement from percent-level concentrations down to parts-per-million (ppm), parts-per-billion (ppb), or parts-per-trillion (ppt) impurities.
Specialty gases are used in applications including semiconductor manufacturing, electronics, industrial gases, environmental reference standards, laboratory research, chemical processing, food and beverage, and advanced manufacturing. Process Insights’ current page specifically identifies applications ranging from beverage CO₂ and laser gases to ammonia for LED manufacturing and silane for semiconductor fabrication.
DETECTION SPECIFICATIONS
CRDS Analyzer Lowest Detection Limit (LDL, 3σ/24h) in ppb
Trace Impurity Analysis for Specialty Gases
Detect Contamination at ppb and ppt Levels
Trace contamination can compromise gas quality long before an impurity reaches ppm concentrations.
TIGER OPTICS™ CRDS analyzers provide highly sensitive, selective measurement of individual molecular contaminants in high-purity and ultra-high-purity gases.
CRDS advantages include:
- Optical, non-contact measurement
- High molecular selectivity
- Excellent sensitivity
- High chemical and corrosion resistance
- Continuous real-time measurement
- 24/7 operation
- Low operating requirements
- Low total cost of ownership

SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
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APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
Verify Complete Gas Composition in Real Time
Producing an accurate specialty gas mixture requires precise control of component concentrations. The EXTREL™ MAX300-LG™ Quadrupole Mass Spectrometer provides rapid, quantitative analysis of multiple components simultaneously, helping specialty gas producers verify blend composition and identify deviations quickly.
The system provides:
- Complete quantitative sample composition
- Updates as fast as 4 seconds per chemical
- Multi-port sample switching
- Fast clearing between different gas compositions
- ppm-to-percent analysis
- Analysis of inert gases
- Hydrocarbon analysis
- Fluorocarbon analysis
- Corrosive gas analysis
- Automated calibration and validation
- Process-control communications
Specialty Gas Applications
Semiconductor & Electronics
Specialty and ultra-high-purity gases are essential throughout semiconductor manufacturing. Applications include gases used for epitaxy, deposition, etching, cleaning, purging, and other critical processes.
Trace impurity analysis helps verify gas quality before contaminants reach sensitive manufacturing processes.
LED Manufacturing
Moisture contamination in ammonia can affect LED manufacturing performance, making sensitive H₂O measurement important for gas-quality verification.
Calibration & Reference Gas Standards
Accurate calibration gas mixtures require precise verification of component concentrations to ensure reliable reference standards.
Environmental Reference Gases
Gas standards used for environmental measurements require accurately controlled concentrations to support reliable analyzer calibration and measurement.
Laser Gases
Laser gas mixtures require accurate component ratios to maintain intended operating characteristics.
Industrial & Specialty Gas Production
Verify final gas purity and mixture composition before cylinders, bundles, or bulk specialty gases are released to customers.
Food & Beverage Gases
Verify gas quality and composition for applications involving



































