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Specialty Gas Analyzers –
Gas Purity & Mixture Analysis

Specialty Gas Analyzers – Gas Purity & Mixture Analysis

Specialty gas quality depends on two critical measurements: verifying the concentration of intended gas components and detecting trace impurities that should not be present.

Process Insights provides advanced specialty gas analyzers for both challenges. TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) provides highly sensitive trace impurity measurement for ultra-high-purity and specialty gases, while EXTREL™ quadrupole mass spectrometry (QMS) provides rapid, multicomponent analysis for specialty gas mixtures, blending, quality control, and composition verification. Together, these technologies help specialty gas producers improve product quality, verify specifications, reduce analytical uncertainty, and deliver gases with greater confidence.

What is Cavity Ring Down Spectroscopy?

What is CRDS?

Technical Specifications of Tiger Optics CRDS

Cavity Ring-Down Spectroscopy: Principles, Applications, and Benefits

What is a trace moisture analyzer

What Is Specialty Gas Analysis?

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Specialty gas analysis is the measurement of gas composition and trace impurities to verify that a specialty or high-purity gas meets its required concentration, purity, and quality specifications.

Depending on the application, specialty gas analysis may require measurement from percent-level concentrations down to parts-per-million (ppm), parts-per-billion (ppb), or parts-per-trillion (ppt) impurities.

Specialty gases are used in applications including semiconductor manufacturing, electronics, industrial gases, environmental reference standards, laboratory research, chemical processing, food and beverage, and advanced manufacturing. Process Insights’ current page specifically identifies applications ranging from beverage CO₂ and laser gases to ammonia for LED manufacturing and silane for semiconductor fabrication.

DETECTION SPECIFICATIONS

CRDS Analyzer Lowest Detection Limit (LDL, 3σ/24h) in ppb

Trace Impurity Analysis for Specialty Gases

Detect Contamination at ppb and ppt Levels

Trace contamination can compromise gas quality long before an impurity reaches ppm concentrations.

TIGER OPTICS™ CRDS analyzers provide highly sensitive, selective measurement of individual molecular contaminants in high-purity and ultra-high-purity gases.

CRDS advantages include:

  • Optical, non-contact measurement
  • High molecular selectivity
  • Excellent sensitivity
  • High chemical and corrosion resistance
  • Continuous real-time measurement
  • 24/7 operation
  • Low operating requirements
  • Low total cost of ownership

Verify Complete Gas Composition in Real Time

Producing an accurate specialty gas mixture requires precise control of component concentrations.  The EXTREL™ MAX300-LG™ Quadrupole Mass Spectrometer provides rapid, quantitative analysis of multiple components simultaneously, helping specialty gas producers verify blend composition and identify deviations quickly.

The system provides:

  • Complete quantitative sample composition
  • Updates as fast as 4 seconds per chemical
  • Multi-port sample switching
  • Fast clearing between different gas compositions
  • ppm-to-percent analysis
  • Analysis of inert gases
  • Hydrocarbon analysis
  • Fluorocarbon analysis
  • Corrosive gas analysis
  • Automated calibration and validation
  • Process-control communications

Specialty Gas Applications

Semiconductor & Electronics

Specialty and ultra-high-purity gases are essential throughout semiconductor manufacturing. Applications include gases used for epitaxy, deposition, etching, cleaning, purging, and other critical processes.

Trace impurity analysis helps verify gas quality before contaminants reach sensitive manufacturing processes.

LED Manufacturing

Moisture contamination in ammonia can affect LED manufacturing performance, making sensitive H₂O measurement important for gas-quality verification.

Calibration & Reference Gas Standards

Accurate calibration gas mixtures require precise verification of component concentrations to ensure reliable reference standards.

Environmental Reference Gases

Gas standards used for environmental measurements require accurately controlled concentrations to support reliable analyzer calibration and measurement.

Laser Gases

Laser gas mixtures require accurate component ratios to maintain intended operating characteristics.

Industrial & Specialty Gas Production

Verify final gas purity and mixture composition before cylinders, bundles, or bulk specialty gases are released to customers.

Food & Beverage Gases

Verify gas quality and composition for applications involving


TIGER OPTICS UHP gas analyzers WITH crds tECHNOLOGY

CQC / IQC Cabinet Total Monitoring Solution

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VeraSpec™ APIMS

TIGER OPTICS™ Atmospheric Pressure Ionization Mass Spectrometer
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GO-cart™ for AMC Monitoring

TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers
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GO-cart™ for Analytical Monitoring

TIGER OPTICS™ Mobile Cart for H2O & O2 Analytical Monitoring
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HALO Max QCL™ CO2

TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Dioxide Analysis
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HALO Max QCL™ CO

TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Monoxide Analysis
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HALO KA™ H2O

TIGER OPTICS™ ppt-level Moisture Detection CRDS Analyzer
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HALO KA Max™ CH4

TIGER OPTICS™ CRDS Analyzer for Sub-ppb Methane Detection in Bulk Gases
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HALO KA Max™ H2O

TIGER OPTICS™ CRDS Analyzer for ppt-level Moisture Detection

HALO KA Max™ NH3

TIGER OPTICS™ CRDS Analyzer for ppt-level Ammonia Detection in Bulk Gases
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T-I Max EtO™

TIGER OPTICS™ CRDS Analyzer for Trace Ethylene Oxide
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HALO™ 3 CH2O

TIGER OPTICS™ Trace-Level Formaldehyde Detection CRDS Analyzer
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HALO™ 3 CO

TIGER OPTICS™ PPB-Level Carbon Monoxide Detection CRDS Analyzer
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HALO™ 3 CO2

TIGER OPTICS™ PPB-Level Carbon Dioxide Detection CRDS Analyzer
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HALO™ 3 D2O/HDO

TIGER OPTICS™ Trace-Level Heavy Water Detection CRDS Analyzer
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HALO™ 3 H2O

TIGER OPTICS™ Trace Moisture CRDS Analyzer for Ultra-High-Purity Gases
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HALO™ 3 CH4

TIGER OPTICS™ Trace Methane Analyzer for High-Purity Gases
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HALO™ 3 HCl

TIGER OPTICS™ Trace Hydrogen Chloride Detection CRDS Analyzer
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HALO™ 3 NH3

TIGER OPTICS™ Trace-Level Ammonia CRDS Analyzer
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HALO 3 HF

TIGER OPTICS™ Trace-level hydrogen fluoride gas analyzer
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HALO™ H2

TIGER OPTICS™ CRDS Analyzer for ppb-level Hydrogen Detection
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HALO™ H2O in N2O

TIGER OPTICS™ Trace Moisture CRDS Analyzer in Pure Nitrous Oxide
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HALO™ OK/OK+

TIGER OPTICS™ Trace & Ultra-Trace Level Oxygen CRDS Analyzer
HALO OK

HALO™ LP H2O

TIGER OPTICS™ Trace Moisture in Hydride Gases CRDS Analyzer
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HALO™ RP

TIGER OPTICS™ CRDS Analyzer for Trace H2O & HF for Sub-Atmospheric Pressure
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HALO™ QRP

TIGER OPTICS™ CRDS Analyzer for Moisture Monitoring in Low Pressure Chambers
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Spark™ H2O

TIGER OPTICS™ PPB-Level Trace Moisture Detection CRDS Analyzer
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Spark™ H2O in CO2

TIGER OPTICS™ Trace Moisture Detection CRDS Analyzer in Pure Carbon Dioxide
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Spark™ CH4

TIGER OPTICS™ CRDS Trace-Level Methane Detection Analyzer
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Spark™ C2H2

TIGER OPTICS™ CRDS Trace-Level Acetylene Detection Analyzer
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Spark™ CO2

TIGER OPTICS™ CRDS Trace-Level Carbon Dioxide Detection Analyzer
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Spark+™ CO

TIGER OPTICS™ CRDS Trace-Level Carbon Monoxide Detection Analyzer
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Spark Max™ CO2

TIGER OPTICS™ CRDS Trace-Level Carbon Dioxide Detection Analyzer
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Prismatic 3™

TIGER OPTICS™ Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3 gas analyzer

Prismatic 3+™

TIGER OPTICS™ PPB Multi-Species CRDS Gas Analyzer
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T-I MAX™ AIR GHG

TIGER OPTICS™ CRDS Analyzer for Greenhouse & Air Quality Gas Monitoring
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T-I MAX X3

TIGER OPTICS™ Next Gen AMC Monitors
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T-I MAX™ HCl

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
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T-I MAX™ HF

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
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T-I MAX™ NH3

TIGER OPTICS™ CRDS Analyzer for Airborne Molecular Contaminants in Semiconductor Cleanrooms
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T-I MAX™ CEM

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
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CO-REKT™

TIGER OPTICS™ CRDS Analyzer for Trace Level Impurity for Hydrogen
Process Insights_Tiger Optics__CO-rekt-c55fdec0

ALOHA+H2O™

TIGER OPTICS™ PPB-Level Moisture Detection in Ultra-Pure Ammonia CRDS Analyzer
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