Specialty gas monitoring requires high accuracy and precision to ensure gas quality and safety

Specialty gas mixtures, such as the ones used as laser gases, or environmental reference standards, also require precise calibration of the mixing ratio to achieve highly accurate gas concentrations. Process Insights offers ultra-sensitive, highly accurate and easy to use analysis instruments from our TIGER OPTICS™ and EXTREL™ products which are based on renowned Cavity Ring-Down Spectroscopy (CRDS) and Quadrupole Mass Spectrometry (QMS), respectively. These products cover a large variety of specialty gases applications.

From carbon dioxide for beverages to ammonia for LED manufacturing or silane for semiconductor fabrication, high-quality specialty gases are important raw materials and process gases for many industries. It is of utmost importance to processes that specialty gases meet high purity standards.

For example, moisture impurities in ammonia directly influence the efficiency of the resulting LED. Gases used in the semiconductor industry generally require ultra-high purity, whether it is silane or germane for epitaxy, fluorine compounds for etching processes, or cleaning gases.

Cavity Ring-Down Spectroscopy Systems for Purity Analysis

Process Insights offers ultra-sensitive, highly accurate, and easy-to-use CRDS instruments with the TIGER OPTICS™ product line. These instruments provide numerous benefits for specialty gas analysis, including:

• Optical, non-contact measurement
• High selectivity to minimize background
• High chemical and corrosion resistance
• Excellent sensitivity
• Real-time, 24/7 operation
• Low cost of ownership

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Mass Spectrometers for Gas Mixing

Our EXTREL™ MAX300-LG™ brings an unmatched combination of speed, sensitivity and precision to continuous, quantitative gas analysis. Based on cutting-edge quadrupole mass spectrometer technology, the MAX300-LG has the dynamic range to measure component concentrations from 100% down to the low parts per billion (ppb) in many gas or vapor samples. It provides a full composition update every few seconds and can analyze multiple sample points in a fully automated analysis routine.

Features and Benefits

• Provides complete quantitative sample composition
• Real-time analysis with updates as fast as 4 seconds per chemical
• Multi-port for stream switching capabilities
• Fast clearing times between gas compositions
• Seamless ppm to percent level analysis
• Analysis of inert, hydrocarbon, fluorocarbon and corrosive gases

Technology

Industry-leading 19 mm quadrupole mass filter, combined with state-of-the-art electronics, provides the user with an impressive list of advantages:

• Near-zero mass scale drift for outstanding measurement precision and stability
• Uniform resolution across the entire mass range for ultra-high sensitivity to all compounds
• Extreme resistance to corrosion and contamination for long-term, continuous, low-maintenance operation
• Performance specifications that exceed those common to other mass spectrometers and technologies

Communication & Software

• Questor 5 Control Software
• Tracks and records data
• Automated alarms, validations and calibrations
• Network accessible
• Secure to 21 CFR Part 11
• Ethernet or Serial Modbus, digital I/O, analog I/O, OPC

MAX300-RTG 2.0

Real-Time Process Quadrupole Mass Spectrometer

MAX300-LG

Real-Time Lab Quadrupole Mass Spectrometer