Even trace levels of oxygen can contaminate ultra-high-purity gases, reduce semiconductor yields, degrade specialty gas quality, poison catalysts, and affect hydrogen production. The TIGER OPTICS™ HALO OK/OK+ uses patented Cavity Ring-Down Spectroscopy (CRDS) and catalytic conversion technology to continuously measure oxygen with detection limits as low as 20 parts per trillion (ppt). Designed for semiconductor manufacturing, hydrogen, industrial gas production, and specialty gas applications, the HALO OK/OK+ delivers calibration-free operation, exceptional long-term stability, and rapid response for continuous gas purity monitoring.
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DESIGNED FOR TRACE-LEVEL OXYGEN ANALYSIS, THE HALO OK OFFERS:
- Industry-leading parts-per-trillion detection capability
- Unprecedented speed of response
- Wide dynamic range
- Absolute measurement (freedom from need for calibration gases)
- Low maintenance and cost of ownership
- Compact, portable package, ideal for both fixed and mobile cart installation
- Direct measurement in many matrices
Why Choose the HALO OK/OK+?
The HALO OK/OK+ provides one of the industry’s most sensitive methods for continuous oxygen impurity monitoring.
Benefits
- Oxygen detection down to 20 ppt (HALO OK+)
- Continuous online monitoring
- CRDS laser-based measurement
- Patented catalytic conversion technology
- No routine calibration gases
- Built-in zero verification
- Drift-free long-term performance
- Speed+ rapid response (OK+)
- Low maintenance
- Low total cost of ownership
- Compact rack or mobile-cart installation
- Multiple background gas support (He, H₂, Ar, N₂, CO₂)
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ)† | Precision (1σ) @ zero | |||
|---|---|---|---|---|---|---|
| Standard Model (using pure H2 utility gas) | ||||||
| O2 in He | 0 – 0.5 ppm | 50 ppt | 17 ppt | |||
| O2 in Ar | 0 – 1 ppm | 90 ppt | 30 ppt | |||
| O2 in H2 | 0 – 2 ppm | 150 ppt | 50 ppt | |||
| O2 in N2 | 0 – 2.5 ppm | 200 ppt | 70 ppt | |||
| CO2 Model (using pure H2 utility gas) | ||||||
| O2 in He | 0 – 0.5 ppm | 50 ppt | 17 ppt | |||
| O2 in Ar | 0 – 1 ppm | 90 ppt | 30 ppt | |||
| O2 in H2 | 0 – 2 ppm | 150 ppt | 50 ppt | |||
| O2 in N2 | 0 – 2.5 ppm | 200 ppt | 70 ppt | |||
| O2 in CO2 | 0 – 5 ppm | 5000 ppt‡/1000 ppt§ | 300 ppt | |||
| Enhanced Safety Model (using 3% H2/97% N2 mixture utility gas) | ||||||
| O2 in He | 0 – 0.5 ppm | 400 ppt‡ | 17 ppt | |||
| O2 in Ar | 0 – 1 ppm | 400 ppt‡ | 30 ppt | |||
| O2 in H2 | 0 – 2 ppm | 400 ppt‡ | 50 ppt | |||
| O2 in N2 | 0 – 2.5 ppm | 400 ppt‡ | 70 ppt | |||
†LDL is dependent upon the quality of the sample gas and the integrity of the sampling system.
‡LDL is limited by minimum achievable O2 concentration, not by 3σ baseline noise.
§LDL of 1000 ppt requires addition of Tiger Optics’ Zero Gas Panel and Linear Fit Mode. Please contact us for more information.
SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
HALO™ OK+ Ultra-Trace Level Oxygen Analyzers
Designed for ultra-trace-level O2 analysis as low as 20 ppt, the HALO OK+ offers:
- Industry-leading detection capabilities
- Fast speed of response—Speed+ included
- Multiple background gases: N2, Ar, H2 and He
- No costly liquid consumables to buy, stock and add frequently to maintain sensor health and measurement accuracy
- No calibration requirements and lowest cost of ownership
APPLICATIONS
- Semiconductor Bulk Gases
- UHP Gas Quality Control
- Purifier Qualification
HALO OK+ Detection Capabilities
| O2 Detection | Range | Detection Limit (LDL) 3σ/24h | Precision (1σ/24h) |
| in He | 0 – 0.5 ppm | 20 ppt | 7 ppt |
| in Ar | 0 – 1 ppm | 36 ppt | 12 ppt |
| in H2 | 0 – 1 ppm | 60 ppt | 20 ppt |
| in N2 | 0 – 2.5 ppm | 75 ppt | 25 ppt |
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