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VeraSpec APIMS

Atmospheric Pressure Ionization Mass Spectrometer

VeraSpec APIMS Real-Time Multi-Species Monitoring

For Critical Impurities in Bulk Electronic Gases

    Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

    Contamination is costly, and for more than 30 years our EXTREL quadrupole mass spectrometry technology has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes an EXTREL 19mm, tri-filter quadrupole mass spectrometer filter ideal for semiconductor gas analysis for the very best performance, reliability, and uptime.

    • Industry-best lower detection limits (LDLs) for bulk gas analysis
    • Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more
    • Well-established, powerful mass spectrometry technology
    • Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration 

    Typical Low Detection Limits by Contaminant and Bulk Gas

    VeraSpec APIMS Gas Matrix

    RELIABLE MULTI-STREAM PPT LEVEL GAS ANALYSIS SOLUTIOn

    VeraSpec APIMS from Process Insights

    APPLICATIONS

    • Semiconductor fabs
    • Labs & research
    • Bulk gas storage
    • ASU
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    TIGER OPTICS UHP gas analyzers WITH crds tECHNOLOGY

    CQC / IQC Cabinet Total Monitoring Solution

    CQC / IQC Cabinet Total Monitoring Solution Total Solution for Dedicated or Gas-Cycling CQC / IQC Cabinet
    CQC / IQC Cabinet Total Monitoring Solution

    VeraSpec™ APIMS

    TIGER OPTICS™ Atmospheric Pressure Ionization Mass Spectrometer
    VeraSpec APIMS

    GO-cart™

    TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers
    TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers

    HALO Max QCL™ CO2

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    HALO Max QCL™ CO

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    HALO KA™ H2O

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    HALO KA Max™ CH4

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    HALO KA Max™ H2O

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    HALO KA Max™ NH3

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    HALO™ 3 CH2O

    TIGER OPTICS™ Trace-Level Formaldehyde Detection CRDS Analyzer
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    HALO™ 3 CO

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    HALO™ 3 CO2

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    HALO™ 3 D2O/HDO

    TIGER OPTICS™ Trace-Level Heavy Water Detection CRDS Analyzer
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    HALO™ 3 H2O

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    HALO™ 3 CH4

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    HALO™ 3 HCl

    TIGER OPTICS™ Trace Hydrogen Chloride Detection CRDS Analyzer
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    HALO™ 3 NH3

    TIGER OPTICS™ Trace-Level Ammonia CRDS Analyzer
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    HALO 3 HF

    TIGER OPTICS™ Trace-level hydrogen fluoride gas analyzer
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    HALO™ H2

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    HALO™ H2O in N2O

    TIGER OPTICS™ Trace Moisture CRDS Analyzer in Pure Nitrous Oxide
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    HALO™ OK/OK+

    TIGER OPTICS™ Trace & Ultra-Trace Level Oxygen CRDS Analyzer
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    HALO™ LP H2O

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    HALO™ RP

    TIGER OPTICS™ CRDS Analyzer for Trace H2O & HF for Sub-Atmospheric Pressure
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    HALO™ QRP

    TIGER OPTICS™ CRDS Analyzer for Moisture Monitoring in Low Pressure Chambers
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    Spark™ H2O

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    Spark™ H2O in CO2

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    Spark™ CH4

    TIGER OPTICS™ CRDS Trace-Level Methane Detection Analyzer
    Spark-CH4-LEFT-2021_small-73bdd5f7

    Spark™ C2H2

    TIGER OPTICS™ CRDS Trace-Level Acetylene Detection Analyzer
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    Spark™ CO2

    TIGER OPTICS™ CRDS Trace-Level Carbon Dioxide Detection Analyzer
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    Spark+™ CO

    TIGER OPTICS™ CRDS Trace-Level Carbon Monoxide Detection Analyzer
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    Spark Max™ CO2

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    Prismatic 3™

    TIGER OPTICS™ Multi-Species CRDS Gas Analyzer
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    Prismatic 3+™

    TIGER OPTICS™ PPB Multi-Species CRDS Gas Analyzer
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    T-I MAX™ AIR GHG

    TIGER OPTICS™ CRDS Analyzer for Greenhouse & Air Quality Gas Monitoring
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    T-I MAX X3

    TIGER OPTICS™ Next Gen AMC Monitors
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    T-I MAX™ HCl

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    T-I MAX™ HF

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    T-I MAX™ NH3

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    T-I MAX™ CEM

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    CO-REKT™

    TIGER OPTICS™ CRDS Analyzer for Trace Level Impurity for Hydrogen
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    ALOHA+H2O™

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    Process Insights-Tiger Optics_ALOHA_H2O_2020_small-e90dd22a
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