Ultra-Trace Gas Analysis with Atmospheric Pressure Ionization Mass Spectrometry

Process Insights APIMS systems deliver highly sensitive gas analysis for ultra-trace impurity detection in ultra-high purity (UHP) gases and critical process environments. Using Atmospheric Pressure Ionization Mass Spectrometry (APIMS), these analyzers identify contaminants at parts-per-trillion (ppt) and parts-per-quadrillion (ppq) levels for semiconductor manufacturing, specialty gas production, research, and advanced industrial applications.

Designed for real-time contamination monitoring, APIMS technology detects moisture, oxygen, nitrogen, hydrocarbons, and trace impurities that can impact process yield, product quality, and operational reliability.

• Industry-best lower detection limits (LDLs) for bulk gas analysis
• Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O₂, H₂, H₂O, CH₄, CO, CO₂, Xe and more
• Well-established, powerful mass spectrometry technology
• Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration 

Applications for APIMS Technology

Use APIMS analyzers for:

• Semiconductor process gas monitoring
• Electronic specialty gas production
• Bulk gas quality validation
• Hydrogen purity verification
• Research laboratories
• Process contamination analysis
• Ultra-high purity manufacturing
• Air separation applications

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