Installing a new process tool, qualifying a gas line, or locating contamination shouldn’t require multiple fixed analyzers or time-consuming manual sampling.

The TIGER OPTICS™ GO-cart™ is a mobile analytical monitoring platform that brings laboratory-grade CRDS gas analysis directly to the point of need. Designed for semiconductor fabs, specialty gas facilities, and ultra-high-purity gas systems, the GO-cart supports up to three TIGER OPTICS analyzers for simultaneous, real-time monitoring of trace moisture, oxygen, and airborne molecular contaminants (AMCs). Whether you’re commissioning new equipment, verifying gas purity, or troubleshooting contamination events, the GO-cart delivers immediate analytical insight wherever it’s needed

What is a trace moisture analyzer

Why Use a Mobile Gas Monitoring System?

Unlike permanently installed analyzers, the GO-cart allows engineers to bring high-performance analytical capability directly to the problem.

Benefits include:

• Faster commissioning
• Quicker troubleshooting
• Reduced downtime
• Lower installation costs
• Temporary monitoring without permanent infrastructure
• Greater flexibility
• Immediate contamination detection
• Higher fab uptime

The Flexible Monitoring Solution for Modern Semiconductor Manufacturing

• Space for up to three analyzers
• No calibration, maintenance or consumables required (for both cart and analyzers)
• Top-mounted central control touchscreen
• Integrated UPS backup power supply (optional)
• Conductive ESD paint (optional)

Why Choose the GO-cart?

Benefits

• Mobile real-time gas analysis
• Supports up to three TIGER OPTICS analyzers
• Simultaneous multi-parameter monitoring
• Real-time moisture monitoring
• Real-time oxygen monitoring
• Real-time AMC monitoring
• Ideal for semiconductor fabs
• Central touchscreen control
• Compact footprint
• Cleanroom-compatible design
• Optional conductive ESD finish
• Optional UPS backup
• No calibration required for the cart
• No consumable components
• Fast deployment
• Flexible analyzer configurations
• Low total cost of ownership

GO-CART FEATURES AND CONFIGURATIONS

SALES | TRAINING INQUIRIES

AMERICAS: info.americas@process-insights.com

EMEAI (includes India): info.emeai@process-insights.com

APAC:  info.apac@process-insights.com

CHINA:  info.cn@process-insights.com

SERVICE | TECHNICAL INQUIRIES ONLY

Applications

Semiconductor Tool Installation

Verify gas quality before bringing new process tools online.

Applications include:

• Tool qualification
• New equipment startup
• Factory acceptance testing (FAT)
• Site acceptance testing (SAT)
• Commissioning
• Process tool validation

Research & Development

Ideal for:

• Pilot facilities
• Process development
• University laboratories
• National laboratories
• Semiconductor R&D

Gas Line Verification

Verify gas purity throughout:

• Bulk gas distribution
• Valve Manifold Boxes (VMBs)
• Gas cabinets
• Point-of-use locations
• Main gas headers
• Distribution piping

Gas Leak Detection

Rapidly locate contamination sources by monitoring:

• Moisture ingress
• Oxygen leaks
• Process gas contamination
• Air infiltration
• Distribution system leaks

Airborne Molecular Contaminant (AMC) Surveys

Quickly monitor cleanroom environments for:

• Hydrogen fluoride (HF)
• Hydrogen chloride (HCl)
• Ammonia (NH₃)
• Other supported airborne molecular contaminants

Semiconductor Process Optimization

Support continuous improvement through:

• Process investigations
• Root-cause analysis
• Tool comparisons
• Utility verification
• Preventive maintenance