Gas Analysis Without Compromise | H2O & O2 Analytical Monitoring
Preparing for a tool installation, end of main line checking or determining where a gas leak is in a fab is now fast and easy with our TIGER OPTICS™ GO-cart™ – the mobile solution for your analytical monitoring needs. It can be equipped with any combination of analyzers to monitor simultaneously and in real-time for O2 and H2O contaminants.
- Quickly survey multiple ends of main line locations in your fab
- Simultaneous, real-time monitoring of O2 and H2O before you start-up that new tool
- Locate where that leak is in the gas main easily
- Customizable configurations with up to three Tiger Optic analyzers
The Flexible Monitoring Solution for Modern Semiconductor Manufacturing
- Space for up to three analyzers
- No calibration, maintenance or consumables required (for both cart and analyzers)
- Top-mounted central control touchscreen
- Integrated UPS backup power supply (optional)
- Conductive ESD paint (optional)
GO-CART FEATURES AND CONFIGURATIONS
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The GO-cart fits up to three TIGER OPTICS analyzers!
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SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
Tiger Optics UHP gas analyzers WITH crds tECHNOLOGY
CQC / IQC Cabinet Total Monitoring Solution
VeraSpec™ APIMS
GO-cart™ for AMC Monitoring
GO-cart™ for Analytical Monitoring
HALO Max QCL™ CO2
HALO Max QCL™ CO
HALO KA™ H2O
HALO KA Max™ CH4
HALO KA Max™ H2O
HALO KA Max™ NH3
T-I Max EtO™
HALO™ 3 CH2O
HALO™ 3 CO
HALO™ 3 CO2
HALO™ 3 D2O/HDO
HALO™ 3 H2O
HALO™ 3 CH4
HALO™ 3 HCl
HALO™ 3 NH3
HALO 3 HF
HALO™ H2
HALO™ H2O in N2O
HALO™ OK/OK+
HALO™ LP H2O
HALO™ RP
HALO™ QRP
Spark™ H2O
Spark™ H2O in CO2
Spark™ CH4
Spark™ C2H2
Spark™ CO2
Spark+™ CO
Spark Max™ CO2
Prismatic 3™
Prismatic 3+™
T-I MAX™ AIR GHG
T-I MAX X3
T-I MAX™ HCl
T-I MAX™ HF
T-I MAX™ NH3
T-I MAX™ CEM
CO-REKT™
ALOHA+H2O™
