HALO MAX QCL CO
Trace Carbon Monoxide Analysis for Semiconductor & Industrial Gas Applications
Trace Carbon Monoxide Analysis for Semiconductor & Industrial Gas Applications
Even trace amounts of carbon monoxide can contaminate ultra-high-purity gases, poison catalysts, reduce semiconductor yield, compromise hydrogen quality, and affect specialty gas production.
The HALO Max QCL CO continuously measures carbon monoxide at parts-per-trillion levels using Quantum Cascade Laser Cavity Ring-Down Spectroscopy (QCL-CRDS), providing fast, continuous detection before contamination impacts production.
Built on our powerful Max platform, the HALO Max QCL CO offers:
✔️ Real-time, continuous monitoring
✔️ Fast and easy installation
✔️ Low maintenance with zero drift
✔️ Built-in zero verification
✔️ User-friendly interface in a robust, all-in-one package
This QCL-based analyzer perfectly complements our growing family of ultra-sensitive gas analyzers, including:
- HALO KA Max series (for H₂O, NH₃, and CH₄)
- HALO OK (for O₂)
- HALO Max QCL CO₂
Together, these advanced analyzers harness the power of Cavity Ring-Down Spectroscopy (CRDS) and Quantum Cascade Lasers to monitor a wide range of trace-level contaminants across semiconductor, industrial gas, and other high-purity applications.
ANALYZER SERIES BASED ON QUANTUM CASCADE LASER CAVITY RING-DOWN SPECTROSCOPY (QCL-CRDS)
- Parts-per-trillion (ppt) detection capability for carbon monoxide (CO) in UHP bulk gases
- Incorporates mid-infrared QCL technology to achieve the ultimate sensitivity
- Absolute measurement (freedom from calibration)
- Excellent speed of response at ppb levels and below
- Continuous measurement—no batch processing typical with GCs
- Robust design & maximum ease of use
Why Measure Carbon Monoxide?
Carbon monoxide monitoring protects:
- Semiconductor wafer yield
- Hydrogen fuel quality
- Air separation units
- Cryogenic gas systems
- Specialty gas production
- Catalyst performance
- Gas purity specifications
- Process reliability
Why Quantum Cascade Laser CRDS?
- Direct optical measurement
- No consumable sensors
- Exceptional selectivity
- ppt sensitivity
- Minimal calibration
- Long-term stability
- Fast response
- Low maintenance


SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
APPLICATIONS
Semiconductor
- Bulk gas
- Point of use
- Gas cabinets
- Tool monitoring
- Purifier verification
Specialty Gases
- Cylinder filling
- Gas blending
- Gas certification
- Calibration gases
Air Separation Units
- CO₂ freeze protection
- Cryogenic distillation
- Nitrogen plants
- Oxygen production
- Argon production
Hydrogen
- Fuel-cell hydrogen
- Electrolysis
- Hydrogen purification
- Pipeline quality
- Hydrogen blending
Industrial Gas Production
- Nitrogen
- Argon
- Helium
- Hydrogen
- CO₂
- Medical gases
Research
- Universities
- National labs
- Materials science
- Analytical chemistry
cHECK OUT OUR HALO MAX QCL
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| CO in N2 | 0 – 0.5 ppm | 200 ppt | 70 ppt |
| CO in He | 0 – 0.35 ppm | 130 ppt | 45 ppt |
| CO in Ar | 0 – 0.4 ppm | 150 ppt | 50 ppt |
| CO in H2 | 0 – 0.5 ppm | 200 ppt | 70 ppt |
| CO in O2 | 0 – 0.45 ppm | 170 ppt | 60 ppt |
| CO in Clean Dry Air (CDA) | 0 – 0.5 ppm | 200 ppt | 70 ppt |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection Limit (LDL) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 6 − 125 psig (1.4 − 9.6 bara) |
| Flow rate | <1 slpm in N2 (gas dependent) |
| Sample gases | Most inert and passive gases |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.75″ x 19.0″ x 25.0″ (222 mm x 483 mm x 635 mm) |
| Weight | |
| Standard sensor | 72 lbs (33kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 100 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |


































