HALO MAX QCL CO2
Ultra-Trace Carbon Dioxide Analyzer for Semiconductor & High-Purity Gas Systems
Ultra-Trace Carbon Dioxide Analyzer for Semiconductor & High-Purity Gas Systems
Ultra high purity gas moisture analyzers and ppb moisture analyzers for specialty gases
Even trace levels of carbon dioxide can contaminate ultra-high-purity gases, reduce semiconductor yield, freeze cryogenic systems, interfere with specialty gas production, and compromise gas purity.
The TIGER OPTICS HALO Max QCL CO₂ continuously measures carbon dioxide at ppt concentrations, allowing operators to detect contamination before it impacts production. The HALO Max QCL CO2 for ppt-level carbon dioxide detection, is based on our latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.
The HALO Max QCL CO2 for ppt-level carbon dioxide detection, it is based on our latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.
It perfectly complements our HALO KA Max series (for H2O, NH3 and CH4), the Halo OK (for O2) and our other QCL-based analyzer, the HALO Max QCL CO to utilize the advantages of CRDS for detection of a large variety of critical trace impurities.
Why Quantum Cascade Laser (QCL)?
The HALO Max QCL combines Quantum Cascade Laser technology with Cavity Ring-Down Spectroscopy (CRDS) to achieve exceptional sensitivity for carbon dioxide measurements.
Benefits include:
- ppt detection limits
- Direct optical measurement
- No sensor degradation
- No consumable sensors
- Minimal calibration
- Fast response
- Excellent repeatability
- Long-term stability
- Continuous online operation
What is a trace carbon dioxide analyzer?
A trace carbon dioxide analyzer continuously measures extremely low concentrations of CO₂ in high-purity process gases.
Why measure carbon dioxide in bulk gases?
Carbon dioxide contamination can freeze cryogenic equipment, contaminate semiconductor processes, and reduce gas purity.
Why use CRDS?
CRDS measures gas absorption directly using laser light, providing exceptional sensitivity without sensor drift.


SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
APPLICATIONS
Semiconductor
- Bulk gas
- Point of use
- Gas cabinets
- Tool monitoring
- Purifier verification
Specialty Gases
- Cylinder filling
- Gas blending
- Gas certification
- Calibration gases
Air Separation Units
- CO₂ freeze protection
- Cryogenic distillation
- Nitrogen plants
- Oxygen production
- Argon production
Hydrogen
- Fuel-cell hydrogen
- Electrolysis
- Hydrogen purification
- Pipeline quality
- Hydrogen blending
Industrial Gas Production
- Nitrogen
- Argon
- Helium
- Hydrogen
- CO₂
- Medical gases
Research
- Universities
- National labs
- Materials science
- Analytical chemistry
CHECK OUT OUR HALO MAX QCL
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL* (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| CO2 in N2 | 0 – 2.5 ppm | 100 ppt | 35 ppt |
| CO2 in He | 0 – 2 ppm | 90 ppt | 30 ppt |
| CO2 in Ar | 0 – 2 ppm | 80 ppt | 25 ppt |
| CO2 in H2 | 0 – 4 ppm | 180 ppt | 60 ppt |
| CO2 in O2 | 0 – 2 ppm | 90 ppt | 30 ppt |
| CO2 in Clean Dry Air (CDA) | 0 – 2.5 ppm | 100 ppt | 35 ppt |
*Due to the high abundance of CO2 in air, purging of the analyzer housing is required to achieve specified LDL (see brochure for purge gas requirements)
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection Limit (LDL) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 6 − 125 psig (1.4 − 9.6 bara) |
| Flow rate | <1 slpm in N2 (gas dependent) |
| Sample gases | Most inert and passive gases |
| Gas temperature | Up to 60°C |
| Purge gas | Inert gas (e.g. N2), <1 ppm CO2, 30 − 150 psig, 4 − 5 slpm |
| Purge gas connection | 1/8″ Swagelok® |
| Dimensions, H x W x D | |
| Standard sensor | 8.75″ x 19.0″ x 25.0″ (222 mm x 483 mm x 635 mm) |
| Weight | |
| Standard sensor | 77 lbs (35kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 100 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |


































