SIMPLE AND POWERFUL TRACE MOISTURE DETECTION IN HYDRIDE GASES
Semiconductor and High Brightness LED manufacturers rely on ultra-high purity process gases, such as ammonia and phosphine, to build the high-tech products such as smartphones, LED TVs and light bulbs, along with CPU and memory chips that consumers desire. Residual moisture in these critical gases degrade device performance, reduce yield, and negatively impact product and corporate profitability. Our TIGER OPTICS™ HALO™ LP H2O trace moisture analyzer is designed to provide users with a simple, cost-effective, and compact analyzer for ensuring trace levels of moisture in NH3, PH3, AsH3 and other hydrides are within the required specifications.
Incorporating an absolute pressure controller, the LP (low pressure) version of this analyzer allows users to measure moisture in hydride gases with unmatched accuracy, reliability, and speed of response. Evidenced by our global installed base of about 2000 sensors, users enjoy the freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuild that are commonplace with other technologies. As a result, the Halo LP H2O is relied on as an industry leader in the detection of trace moisture levels in ammonia and phosphine for electronic manufacturers and specialty gas suppliers worldwide.
DESIGNED FOR TRACE LEVEL MOISTURE ANALYSIS, THE HALO LP H2O OFFERS:
- Low parts per billion (ppb) moisture detection capability in NH3, PH3, AsH3, GeH4 and SiH4
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range – over four orders of magnitude
- Low cost of ownership and operational simplicity
- Clean technology – no external calibration gases required
- Compact analyzer footprint
- User-programmable alarms immediately notify on high events
APPLICATIONS
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| Standard Model | |||
| H2O in NH3 | 0 – 20 ppm | 9 ppb | 3 ppb |
| H2O in PH3† | 0 – 10 ppm | 9 ppb | 3 ppb |
| H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
| H2O in Ar | 0 – 4 ppm | 0.8 ppb | 0.25 ppb |
| H2O in H2† | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
| H2O in He | 0 – 3 ppm | 0.6 ppb | 0.2 ppb |
| H2O in NO† | 0 – 100 ppm | 16 ppb | 6 ppb |
| H2O in GeH4† | 0 – 18 ppm | 20 ppb | 7 ppb |
| H2O in 5% SiH4/95% N2† | 0 – 6 ppm | 20 ppb | 7 ppb |
| Arsine Model | |||
| H2O in AsH3† | 0 – 10 ppm | 5 ppb | 2 ppb |
| H2O in N2 | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
| H2O in Ar | 0 – 4 ppm | 1.0 ppb | 0.3 ppb |
| H2O in H2† | 0 – 6 ppm | 1.0 ppb | 0.3 ppb |
| H2O in He | 0 – 3 ppm | 1.0 ppb | 0.3 ppb |
†Low leak rate vacuum pump (safety certified for service in relevant gas) required
We also offer a new CRDS analyzer performance upgrade. Implementing our new intelligent dynamic data processing, the Speed+™ Analyzer Performance Upgrade Software adjusts your analyzer’s response automatically and in real-time to deliver the best performance. Benefits of Speed+ for your operations include real-time process control to ensure quality, as well as faster throughput and increased capacity to improve efficiency and profitability.
Learn about our service, technical support, spares, and our CRDS Analyzer | Performance Verification Program
Analyzer in service? Need a rental CRDS analyzer? Ask us how we can help.
SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
Other CRDS Gas Analyzer Solutions
VeraSpec APIMS
HALO KA™ H2O
HALO KA Max™ CH4
HALO KA Max™ H2O
HALO KA Max™ NH3
HALO Max QCL™ CO2
HALO Max QCL™ CO
Custom CRDS Gas Analysis Solutions
GO-cart™
HALO™ 3 CH2O
HALO™ 3 CO
HALO™ 3 CO2
HALO™ 3 D2O/HDO
HALO™ 3 H2O
HALO™ 3 CH4
HALO™ 3 HCl
HALO™ 3 NH3
HALO 3 HF
HALO™ H2
HALO™ H2O in N2O
HALO™ OK/OK+
HALO™ LP H2O
HALO™ RP
HALO™ QRP
Spark™ H2O
Spark™ H2O in CO2
Spark™ CH4
Spark™ C2H2
Spark™ CO2
Spark+™ CO
Spark Max™ CO2
Prismatic 3™
Prismatic 3+™
T-I MAX™ AIR GHG
T-I MAX X3
T-I MAX™ HCl
T-I MAX™ HF
T-I MAX™ NH3
T-I MAX™ CEM
CO-REKT™
ALOHA+H2O™
