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Ultra-High Purity CQC Monitoring Solutions 

Continuous Quality Control 

BULK GAS CONTINUOUS QUALITY CONTROL (CQC) MONITORING SOLUTIONS

Quality control (QC) in the electronics / semiconductor industry is essential for ensuring the delivery of reliable and high-performing products to consumers.   

In the production chain, Inward Quality Control (ICQ) acts as a vigilant gatekeeper. IQC involves inspecting materials upon arrival to ensure that only high-quality components are used in manufacturing. 

Outward Quality Control (OCQ) is the final checkpoint before products reach consumers. OQC ensures that finished products leaving the manufacturing facility meet the required standards and specifications, guaranteeing quality and reliability for consumers. 

Continuous Quality Control (CQC) in the semiconductor industry refers to an ongoing process of monitoring, analyzing, and improving the quality of semiconductor products throughout the manufacturing lifecycle. This approach is critical in the semiconductor industry due to the high precision and reliability required in semiconductor devices.

Process Insights:   CQC Monitoring Solutions

  • Offers multiple technology choices to meet all customer needs
  • Expert team who understands and supports all UHP and Semi applications IQC/OQC/CQC
  • Delivers both pre- and post-purifier trace impurity measurements
  • 1-year warranty on all analyzers and cabinets
  • 2-years of on-site service and spare parts

Two CQC Monitoring Solutions Available

  • Cavity Ring Down Spectroscopy CQC has great performance at highly competitive price
  • Atmospheric Pressure Ion Mobility Spectrometry has the lowest detection limits available and covers the entire application with one analyzer

CQC Solution (CRDS) Lower Detection Limits (LDL) 

Below the CRDS/APIMS graphic to support our dual solutions to the same CQC application.

Our CRDS CQC Solution

  • Utilize CRDS for all bulk gases including O2
  • Real-time measurement – Fast & continuous
  • No calibration required – Low maintenance very few consumables
  • Low cost of ownership – Very few consumables
  • One GC for Ar and N2 limits helium use by >90%

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    Our APIMS CQC Solution

    • Utilize APIMS technology for CQC measurements in N2, Ar, H2 and He
    • Real-time, multi-species monitoring for all critical impurities
    • One APIMS per background gas or utilize stream-switching option
    • Lowest LDL available – as low as 10 ppt
    • Measurement range PPT to 100% concentrations
    • Designed to minimize maintenance requirements
    • User-friendly software and touchscreen interface

    CQC CRDS DELIVERS REAL VALUE

    • Capable of measuring nearly all impurities in all background gases
    • Real-time measurement
    • No Helium consumption
    • Almost no maintenance required
    • PPT detection limits for all impurities
    • Simple integration
    • Limited use of GC required
    • A typical CQC solution with CRDS saving nearly $12M over 10 years

    Pre-Purifier

    • Air Separation / N2 plant
    • G-Gas
    • Higher detection limits
    • 5ppb-10ppb gas quality to the fab

      POST-PURIFIER

      • Lowest detection limits
      • <1ppb gas quality inside the fab
      • <.05ppb ambient air
      • Purifier performance/breakthrough
      • Bulk gas quality
      • Specialty gas quality & blending
      • Airborne Molecular Contamination
      • Process tool monitoring
      • Toxic gas monitoring
      • Ultra-Pure Water (UPW)
      • Wastewater discharge

      CQC SOLUTION (APIMS OPTION) LOWER DETECTION LIMITS (LDL) 

      HALO Max QCL™ CO & CO2

      TIGER OPTICS™ Industry-best continuous analysis for CO and CO2 impurities
      Process Insights_Tiger Optics HALO Max QCL CO

      HALO KA Max™ CH4 & NH3

      TIGER OPTICS™ Lowest level continuous analysis for CH4 & NH3 impurities
      HALO-KA-H2O-2020_small-5afa4b8c-6fc72e3d

      HALO KA™ & KA Max

      TIGER OPTICS™ Fast, sensitive and stable H2O bulk gas analyzer
      PROCESS INSIGHTS_TIGER OPTICSHALO-KA-H2O-2020_small-5afa4b8c

      HALO KA OK & H2

      TIGER OPTICS™ Ultra-trace (ppt to ppm) oxygen and hydrogen analyzer

      Spark™ Series

      TIGER OPTICS™ Low-cost, easy to use analyzer for pre-purifier measurements
      PROCESS INSIGHTS_TIGER OPTICS_Spark-H2O ANALZYER

      T-I Max™

      TIGER OPTICS™ Analyzer for airborne molecular contaminants
      Process Insights_Tiger Optics_T-i MAX NH3

      HALO™ LP

      TIGER OPTICS™ Trace Moisture in ammonia and other specialty gases
      PROCESS INSIGHTS_TIGER OPTICS_HALO-LP-H2O ANALYZER

      HALO™ RP/QRP

      TIGER OPTICS™ Trace gas analyzers for low-pressure chambers and process tools
      HALO-QRP-2020_small-45eb7ead
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      Questions? We’re here to help.