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CQC Monitoring Solutions

Continuous Quality Control with CRDS Technology

BULK GAS CONTINUOUS QUALITY CONTROL CQC MONITORING SOLUTIONS

Ensuring Quality in the Semiconductor Industry

Quality control (QC) is essential in the electronics and semiconductor industry to ensure reliable, high-performing products reach customers.  Got questions?  Contact us.

At the start of the production chain, Inward Quality Control (IQC) acts as a critical checkpoint. It involves inspecting incoming materials to ensure only top-quality components are used in manufacturing.

Meanwhile, Continuous Quality Control (CQC) focuses on maintaining high standards throughout the entire manufacturing process. It includes ongoing monitoring, analysis, and improvement to meet the industry’s strict precision and reliability requirements.

Our CQC Monitoring Solutions

To support these rigorous standards, we offer advanced CQC solutions designed to meet a wide range of customer needs:

  • Multiple technology options to suit diverse applications
  • A knowledgeable team supporting UHP and semiconductor IQC, OQC, and CQC processes
  • Accurate trace impurity measurements before and after purification
  • One-year warranty on all analyzers and cabinets
  • Two years of on-site service and spare parts

Choose from Two Powerful CQC Technologies:

  1. TIGER OPTICS Cavity Ring-Down Spectroscopy (CRDS)
    – Delivers excellent performance at a highly competitive price

  2. TIGER OPTICS Atmospheric Pressure Ion Mobility Spectrometry (APIMS)
    – Offers the lowest detection limits available and covers the entire application range with a single analyzer

Ultra-High Purity (UHP) Requirements

Semiconductor processes use ultra-pure gases and chemicals. Even trace levels of contamination—at parts-per-trillion (ppt) or lower—can cause defects, reduce yield, or damage expensive wafers.  CQC monitoring solutions continuously check for impurities in process gases and environments, ensuring purity levels remain within spec.

Our CRDS CQC Solution

  • Utilize CRDS for all bulk gases including O2
  • Real-time measurement – Fast & continuous
  • No calibration required – Low maintenance very few consumables
  • Low cost of ownership – Very few consumables
  • One GC for Ar and N2 limits helium use by >90%

CQC CRDS DELIVERS REAL VALUE

  • Capable of measuring nearly all impurities in all background gases
  • Real-time measurement
  • No Helium consumption
  • Almost no maintenance required
  • PPT detection limits for all impurities
  • Simple integration
  • Limited use of GC required
  • A typical CQC solution with CRDS saving nearly $12M over 10 years

    Full System Example: CRDS-Focused Total CQC Solution

    Pre-Purifier

    • Air Separation / N2 plant
    • G-Gas
    • Higher detection limits
    • 5ppb-10ppb gas quality to the fab

      POST-PURIFIER

      • Lowest detection limits
      • <1ppb gas quality inside the fab
      • <.05ppb ambient air
      • Purifier performance/breakthrough
      • Bulk gas quality
      • Specialty gas quality & blending
      • Airborne Molecular Contamination
      • Process tool monitoring
      • Toxic gas monitoring
      • Ultra-Pure Water (UPW)
      • Wastewater discharge

      CQC Monitoring Solutions (APIMS OPTION) LOWER DETECTION LIMITS (LDL) 

      • Utilize APIMS technology for CQC measurements in N2, Ar, H2 and He
      • Real-time, multi-species monitoring for all critical impurities
      • One APIMS per background gas or utilize stream-switching option
      • Lowest LDL available – as low as 10 ppt
      • Measurement range PPT to 100% concentrations
      • Designed to minimize maintenance requirements
      • User-friendly software and touchscreen interface

      CQC / IQC Cabinet Total Monitoring Solution

      CQC / IQC Cabinet Total Monitoring Solution Total Solution for Dedicated or Gas-Cycling CQC / IQC Cabinet
      CQC / IQC Cabinet Total Monitoring Solution

      VeraSpec™ APIMS

      TIGER OPTICS™ Atmospheric Pressure Ionization Mass Spectrometer
      VeraSpec APIMS

      GO-cart™

      TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers
      TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers

      HALO Max QCL™ CO2

      TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Dioxide Analysis
      Process Insights_Tiger Optics QCL gas analyzer

      HALO Max QCL™ CO

      TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Monoxide Analysis
      Process Insights_Tiger Optics QCL gas analyzer

      HALO KA™ H2O

      TIGER OPTICS™ ppt-level Moisture Detection CRDS Analyzer
      PROCESS INSIGHTS_TIGER OPTICSHALO-KA-H2O-2020_small-5afa4b8c

      HALO KA Max™ CH4

      TIGER OPTICS™ CRDS Analyzer for Sub-ppb Methane Detection in Bulk Gases
      HALO-KA-Max_FacingLEFT_CH4_small-4551e30e

      HALO KA Max™ H2O

      TIGER OPTICS™ CRDS Analyzer for ppt-level Moisture Detection

      HALO KA Max™ NH3

      TIGER OPTICS™ CRDS Analyzer for ppt-level Ammonia Detection in Bulk Gases
      HALO-KA-Max_FacingLEFT_NH3_small-822f44c9

      HALO™ 3 CH2O

      TIGER OPTICS™ Trace-Level Formaldehyde Detection CRDS Analyzer
      T-I-MAX-CH2O-LEFT-small-b3e9bff0

      HALO™ 3 CO

      TIGER OPTICS™ PPB-Level Carbon Monoxide Detection CRDS Analyzer
      HALO-3-CO2-2020_small-d9da4e9f

      HALO™ 3 CO2

      TIGER OPTICS™ PPB-Level Carbon Dioxide Detection CRDS Analyzer
      HALO-3-CO2-2020_small-d9da4e9f

      HALO™ 3 D2O/HDO

      TIGER OPTICS™ Trace-Level Heavy Water Detection CRDS Analyzer
      HALO-3-D2O-2020_small-9a661601

      HALO™ 3 H2O

      TIGER OPTICS™ Trace Moisture CRDS Analyzer for Ultra-High-Purity Gases
      HALO-3-H2O-2020_small-fa525fce

      HALO™ 3 CH4

      TIGER OPTICS™ Trace Methane Analyzer for High-Purity Gases
      Process Insights_HALO-3-CH4-2020_small-a1eb623b

      HALO™ 3 HCl

      TIGER OPTICS™ Trace Hydrogen Chloride Detection CRDS Analyzer
      HALO-3-HCl-2020_small-ea20ac2a

      HALO™ 3 NH3

      TIGER OPTICS™ Trace-Level Ammonia CRDS Analyzer
      HALO-3-NH3-2020_small-cb1fb6e0

      HALO 3 HF

      TIGER OPTICS™ Trace-level hydrogen fluoride gas analyzer
      HALO-3-NH3-2020_small-cb1fb6e0

      HALO™ H2

      TIGER OPTICS™ CRDS Analyzer for ppb-level Hydrogen Detection
      Process Insights_HALO-H2-2020-3368903a

      HALO™ H2O in N2O

      TIGER OPTICS™ Trace Moisture CRDS Analyzer in Pure Nitrous Oxide
      HALO-H2O-in-N2O-2020_small-66b8c6d1

      HALO™ OK/OK+

      TIGER OPTICS™ Trace & Ultra-Trace Level Oxygen CRDS Analyzer
      HALO OK

      HALO™ LP H2O

      TIGER OPTICS™ Trace Moisture in Hydride Gases CRDS Analyzer
      HALO-LP-H2O-2020_small-65bab87a

      HALO™ RP

      TIGER OPTICS™ CRDS Analyzer for Trace H2O & HF for Sub-Atmospheric Pressure
      HALO-QRP-2020_small-45eb7ead

      HALO™ QRP

      TIGER OPTICS™ CRDS Analyzer for Moisture Monitoring in Low Pressure Chambers
      HALO-QRP-2020_small-45eb7ead

      Spark™ H2O

      TIGER OPTICS™ PPB-Level Trace Moisture Detection CRDS Analyzer
      Spark-H2O-LEFT-2021_small-c9ce69e1 (1)

      Spark™ H2O in CO2

      TIGER OPTICS™ Trace Moisture Detection CRDS Analyzer in Pure Carbon Dioxide
      Spark-H2O-in CO2 LEFT-2021_small-c9ce69e1 (2)

      Spark™ CH4

      TIGER OPTICS™ CRDS Trace-Level Methane Detection Analyzer
      Spark-CH4-LEFT-2021_small-73bdd5f7

      Spark™ C2H2

      TIGER OPTICS™ CRDS Trace-Level Acetylene Detection Analyzer
      Spark-C2H2-LEFT-2021_small-3d7cf60b

      Spark™ CO2

      TIGER OPTICS™ CRDS Trace-Level Carbon Dioxide Detection Analyzer
      Spark-CO2-LEFT-2021_small-75978239

      Spark+™ CO

      TIGER OPTICS™ CRDS Trace-Level Carbon Monoxide Detection Analyzer
      Spark+ CO-LEFT-2021_small-24850d8d

      Spark Max™ CO2

      TIGER OPTICS™ CRDS Trace-Level Carbon Dioxide Detection Analyzer
      Spark-Max CO2 CRDS gas analyzer

      Prismatic 3™

      TIGER OPTICS™ Multi-Species CRDS Gas Analyzer
      PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3 gas analyzer

      Prismatic 3+™

      TIGER OPTICS™ PPB Multi-Species CRDS Gas Analyzer
      PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3+ gas analyzer

      T-I MAX™ AIR GHG

      TIGER OPTICS™ CRDS Analyzer for Greenhouse & Air Quality Gas Monitoring
      T-i-MAX-AIR GAS ANALYZER

      T-I MAX X3

      TIGER OPTICS™ Next Gen AMC Monitors
      TIGER OPTICS T-I MAX X2_X3 Next Gen AMC Monitors

      T-I MAX™ HCl

      TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
      T-i-MAX-HF-LEFT-NEW-small-589bcb7b

      T-I MAX™ HF

      TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
      T-i-MAX-HF-LEFT-NEW-small-589bcb7b

      T-I MAX™ NH3

      TIGER OPTICS™ CRDS Analyzer for Airborne Molecular Contaminants in Semiconductor Cleanrooms
      T-i-MAX-NH3-LEFT-NEW-small-be8b867a

      T-I MAX™ CEM

      TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
      T-i-MAX-CEM-HCl-LEFT-NEW-small-59fdec28

      CO-REKT™

      TIGER OPTICS™ CRDS Analyzer for Trace Level Impurity for Hydrogen
      Process Insights_Tiger Optics__CO-rekt-c55fdec0

      ALOHA+H2O™

      TIGER OPTICS™ PPB-Level Moisture Detection in Ultra-Pure Ammonia CRDS Analyzer
      Process Insights-Tiger Optics_ALOHA_H2O_2020_small-e90dd22a

      our brands

      FTIR FT-NIR Spectroscopy Technology

      ANALECT®

      Aluminum Oxide Dew Point Moisture Sensing Technology

      COSA XENTAUR™

      Quadrupole Industrial & Lab Mass Spectrometry Technology

      EXTREL™


      Cavity Ring-Down Spectroscopy & Mid-Infrared QCL Technology for Ultra-High Purity Gas Analysis

      TIGER OPTICS™

      Dew Point Chilled Mirror Hygrometry Technology for Humidity and Temperature Monitoring

      MBW CALIBRATION™

      Excimer UV Fluorescence Technology for Total Sulfur – Total Nitrogen Analysis

      ATOM INSTRUMENT™


      Fixed Magnetic Sector Mass Spectrometry Technology

      MGA™

      Near Infrared and UV-VIS Optical Absorption Spectroscopy Technology

      GUIDED WAVE™

      High Temperature Method TOC COD BOD Water Analysis Technology

      LAR The TOC Leader™


      Injection Style or Direct BTU Wobbe CARI Calorimetry Technology

      COSA XENTAUR™ Calorimeters

      Trace and Percent Oxygen Monitoring Technology

      ALPHA OMEGA INSTRUMENTS™


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