Semiconductors are considered the brains of modern electronics. Our TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) gas analyzers seamlessly detect parts-per-billion (ppb) and parts-per-trillion (ppt) levels and delivers bulk gas monitoring for trace H₂, H₂O, O₂, CH₄, CO, CO₂, Kr, NH₃, and Xe, UHP ammonia for HB LED production, tool monitoring for trace H₂O and HF, and continuous AMC monitoring for ambient HCl, HF, and NH₃. 

Specialty gases of superior quality play a vital role as raw materials and process gases across various industries. From carbon dioxide in beverages to ammonia in LED manufacturing and silane in semiconductor fabrication, maintaining high purity standards for specialty gases is critical. The presence of moisture impurities, for instance, can significantly impact the efficiency of resulting LEDs. The semiconductor industry demands ultra-high purity gases, whether it’s silane or germane for epitaxy, fluorine compounds for etching processes, or cleaning gases. Process Insights offers highly sensitive, accurate, and user-friendly analysis instruments. These instruments utilize the renowned Cavity Ring-Down Spectroscopy (CRDS) technique and cater to a wide range of specialty gases and applications.

What is Cavity Ring Down Spectroscopy?

What is CRDS?

Technical Specifications of Tiger Optics CRDS

Cavity Ring-Down Spectroscopy: Principles, Applications, and Benefits

Trace Moisture Analysis with CRDS

What is a trace moisture analyzer

The Purity Imperative: Specialty Gases for Critical Industries

• Beverages
• LED manufacturing 
• Semiconductor fabrication 
• Medical and pharmaceutical applications
• Aerospace and defense
• Benzotriazole Monitoring in Semiconductors with Fiber Optic UV-Vis Spectroscopy
• Photovoltaic / Solar Cell Manufacturing

The High-Stakes Reality of Impurities

• Moisture contamination can reduce LED brightness and lifespan
• Oxygen impurities can damage semiconductor wafers
• Carbon dioxide purity affects beverage taste and shelf life

Ultra-High Purity Demands

• Silane and germane for epitaxy processes
• Fluorine compounds for etching
• Cleaning gases for contamination control
• Nitrogen and argon for chamber purging

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SERVICE | TECHNICAL INQUIRIES ONLY

 VeraSpec™ APIMS™

Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Airborne Molecular Contaminant (AMC) MONITORING SOLUTION

Simultaneously Monitor HF, HCl, and NH₃ in Real-Time – Next-Generation Trace Gas Analyzers for Detection & Continuous Monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms, FOUP Cleaning Tools, Reticle Nests and Sub Fab Environments.  Our T-I Max™ series analyzers monitor invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.