Semiconductors are considered the brains of modern electronics. Our TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) gas analyzers seamlessly detect parts-per-billion (ppb) and parts-per-trillion (ppt) levels and delivers bulk gas monitoring for trace H2, H2O, O2, CH4, CO, CO2, Kr, NH3, and Xe, UHP ammonia for HB LED production, tool monitoring for trace H2O and HF, and continuous AMC monitoring for ambient HCl, HF, and NH3.
Specialty gases of superior quality play a vital role as raw materials and process gases across various industries. From carbon dioxide in beverages to ammonia in LED manufacturing and silane in semiconductor fabrication, maintaining high purity standards for specialty gases is critical. The presence of moisture impurities, for instance, can significantly impact the efficiency of resulting LEDs. The semiconductor industry demands ultra-high purity gases, whether it’s silane or germane for epitaxy, fluorine compounds for etching processes, or cleaning gases. Process Insights offers highly sensitive, accurate, and user-friendly analysis instruments. These instruments utilize the renowned Cavity Ring-Down Spectroscopy (CRDS) technique and cater to a wide range of specialty gases and applications.
The Purity Imperative: Specialty Gases for Critical Industries
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Beverages
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LED manufacturing
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Semiconductor fabrication
- Medical and pharmaceutical applications
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Aerospace and defense
The High-Stakes Reality of Impurities
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Moisture contamination can reduce LED brightness and lifespan
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Oxygen impurities can damage semiconductor wafers
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Carbon dioxide purity affects beverage taste and shelf life
Ultra-High Purity Demands
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Silane and germane for epitaxy processes
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Fluorine compounds for etching
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Cleaning gases for contamination control
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Nitrogen and argon for chamber purging
SALES | TRAINING INQUIRIES
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EXPLORE OUR CRDS GAS ANALYSIS PORTFOLIO
CRDS Gas Analyzers & QCL-CRDS Trace Gas Analyzers
Cavity Ring-Down Spectroscopy (CRDS) gas analyzers from Process Insights have a long history in industrial gas, medical gas, and chemical processing, enabling the detection of moisture and other rogue impurities in process gas streams, including inert, reactive, corrosive, bulk, and specialty gases.
Cavity Ring-Down Spectroscopy (CRDS) Technology delivers a highly sensitive and precise analytical technique used for the detection and measurement of trace gases and isotopes in a sample. It is a non-destructive technique that provides quantitative measurements of molecular absorption spectra.
T-I MAX X3 AMC MONITORING SOLUTION
Simultaneously Monitor HF, HCl, and NH3 in Real-Time – Next-Generation Trace Gas Analyzers for Detection & Continuous Monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms, FOUP Cleaning Tools, Reticle Nests and Sub Fab Environments. You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy our T-I Max™ series analyzers to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.
MAX300-TGM™ TOXIC GAS MONITOR
Real-Time Toxic Gas Monitoring Solution in Ambient Air
Our EXTREL™ MAX300-TGM™ Toxic Gas Monitor is a real time monitoring solution with analysis speeds of 0.4 seconds per chemical and gas clearing times of less than 3 seconds. These impressive speeds exceed industry requirements for continuous monitoring. With the ability to analyze 15+ chemicals per sample point, the MAX300-TGM toxic gas analyzer provides maximum efficiency at an extremely low cost-per-chemical, per sample point.
MAX300-TGM Advantages Include:
- Versatile and flexible analyzer – detect multiple chemicals on up to 46 sample points
- Fast measurement with high sensitivity, reducing false alarms
- Highly responsive to changes in chemical concentration – reducing down time after an event
- Streamlined operation – centralized analyzer for full facility monitoring
- Low cost of ownership and streamlined operation – decreasing complexity in maintenance and upkeep
- Industry leading application expertise and technical support with decades of experience with ambient air monitoring
- Large, user-friendly touch screen interface for at-a-glance updates with customizable alarm verifications
VeraSpec™ APIMS
Semiconductor manufacturers need the ability to continuously verify the purity of process gases in real-time and detect trace contamination at concentrations in the low parts-per-trillion (ppt). Monitor a wide range of gases and gas mixtures with the stability that provides the long-term repeatability required in most applications.
Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.
VerSpec APIMS Benefits Include:
- Industry-best lower detection limits (LDLs) for bulk gas analysis
- Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more
- Well-established, powerful mass spectrometry technology
- Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration
HALO™ KA Max
Compact and affordable while giving you moisture impurity levels down to 100 ppt in helium, with drift-free stability and virtually instant response.
It offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification.
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration)
- Field proven lowest Cost of Ownership and ease of use
- Wide dynamic range—over four orders of magnitude
- Unprecedented speed of response at sub-ppb H2O levels
- Compact footprint (two Halo KA Max fit in a 19” rack)
