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Semiconductor

CRDS Analytical Solutions for the Semiconductor Industry

ANALYTICAL SOLUTIONS FOR Semiconductor Fabrication

Semiconductors are considered the brains of modern electronics. Our TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) gas analyzers seamlessly detect parts-per-billion (ppb) and parts-per-trillion (ppt) levels and delivers bulk gas monitoring for trace H2, H2O, O2, CH4, CO, CO2, Kr, NH3, and Xe, UHP ammonia for HB LED production, tool monitoring for trace H2O and HF, and continuous AMC monitoring for ambient HCl, HF, and NH3

Specialty gases of superior quality play a vital role as raw materials and process gases across various industries. From carbon dioxide in beverages to ammonia in LED manufacturing and silane in semiconductor fabrication, maintaining high purity standards for specialty gases is critical. The presence of moisture impurities, for instance, can significantly impact the efficiency of resulting LEDs. The semiconductor industry demands ultra-high purity gases, whether it’s silane or germane for epitaxy, fluorine compounds for etching processes, or cleaning gases. Process Insights offers highly sensitive, accurate, and user-friendly analysis instruments. These instruments utilize the renowned Cavity Ring-Down Spectroscopy (CRDS) technique and cater to a wide range of specialty gases and applications.

What is Cavity Ring Down Spectroscopy?

What is CRDS?

Technical Specifications of Tiger Optics CRDS

Cavity Ring-Down Spectroscopy: Principles, Applications, and Benefits

Trace Moisture Analysis with CRDS

What is a trace moisture analyzer

The Purity Imperative: Specialty Gases for Critical Industries

Specialty gases of exceptional quality are essential raw materials and process gases across diverse sectors, including:

The High-Stakes Reality of Impurities

Even minute impurities can severely compromise product quality, efficiency, and reliability. For instance:
  • Moisture contamination can reduce LED brightness and lifespan
  • Oxygen impurities can damage semiconductor wafers
  • Carbon dioxide purity affects beverage taste and shelf life

Ultra-High Purity Demands

The semiconductor industry, in particular, requires gases of unparalleled purity:
  • Silane and germane for epitaxy processes
  • Fluorine compounds for etching
  • Cleaning gases for contamination control
  • Nitrogen and argon for chamber purging

NIR Analyzers in Liquids and Gases

NIR Optical Analyzers for Liquids and Gases

From dynamic chemical blending and wafer cleaning to metals concentration monitoring and on-site gas blending, precision matters.

✅ In situ monitoring improves yields, reduces chemical waste/costs, and optimizes cycle times.
✅ Detect metals contamination down to 5 ppm with GUIDED WAVE 508 UV-VIS and Clearview db.
✅ Ensure stable, on-demand gas blends with real-time NIR quality data.

With our GUIDED WAVE Clearview db product line, you get 24/7 critical process data to keep operations running at peak performance.

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CQC SOLUTION

CONTINUOUS QUALITY CONTROL (CQC) IN THE SEMICONDUCTOR INDUSTRY

Cavity Ring-Down Spectroscopy (CRDS) gas analyzers from Process Insights have a long history in industrial gas, medical gas, and chemical processing, enabling the detection of moisture and other rogue impurities in process gas streams, including inert, reactive, corrosive, bulk, and specialty gases.

Cavity Ring-Down Spectroscopy (CRDS) Technology delivers a highly sensitive and precise analytical technique used for the detection and measurement of trace gases and isotopes in a sample. It is a non-destructive technique that provides quantitative measurements of molecular absorption spectra.

Tiger Optics_CRDS - a Process Insights Brand

T-I MAX X3 Airborne Molecular Contaminant (AMC) MONITORING SOLUTION

Simultaneously Monitor HF, HCl, and NH3 in Real-Time – Next-Generation Trace Gas Analyzers for Detection & Continuous Monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms, FOUP Cleaning Tools, Reticle Nests and Sub Fab Environments.  Our T-I Max™ series analyzers monitor invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.


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MAX300-TGM™ TOXIC GAS MONITOR

Our EXTREL™ MAX300-TGM™ Toxic Gas Monitor is a real time monitoring solution with analysis speeds of 0.4 seconds per chemical and gas clearing times of less than 3 seconds.  These impressive speeds exceed industry requirements for continuous monitoring. With the ability to analyze 15+ chemicals per sample point, the MAX300-TGM toxic gas analyzer provides maximum efficiency at an extremely low cost-per-chemical, per sample point. 

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VERASPEC APIMS

 VeraSpec™ APIMS™

Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.


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Tiger Optics UHP gas analyzers WITH crds tECHNOLOGY

CQC / IQC Cabinet Total Monitoring Solution

CQC / IQC Cabinet Total Monitoring Solution Total Solution for Dedicated or Gas-Cycling CQC / IQC Cabinet
CQC / IQC Cabinet Total Monitoring Solution

VeraSpec™ APIMS

TIGER OPTICS™ Atmospheric Pressure Ionization Mass Spectrometer
VeraSpec APIMS

GO-cart™ for AMC Monitoring

TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers
TIGER OPTICS™ Mobile Cart for AMC Monitoring Analyzers

GO-cart™ for Analytical Monitoring

TIGER OPTICS™ Mobile Cart for H2O & O2 Analytical Monitoring
TIGER OPTICS™ Mobile Cart for Analytical Monitoring

HALO Max QCL™ CO2

TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Dioxide Analysis
Process Insights_Tiger Optics QCL gas analyzer

HALO Max QCL™ CO

TIGER OPTICS™ Quantum Cascade Laser (QCL) for ppt-level Carbon Monoxide Analysis
Process Insights_Tiger Optics QCL gas analyzer

HALO KA™ H2O

TIGER OPTICS™ ppt-level Moisture Detection CRDS Analyzer
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HALO KA Max™ CH4

TIGER OPTICS™ CRDS Analyzer for Sub-ppb Methane Detection in Bulk Gases
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HALO KA Max™ H2O

TIGER OPTICS™ CRDS Analyzer for ppt-level Moisture Detection

HALO KA Max™ NH3

TIGER OPTICS™ CRDS Analyzer for ppt-level Ammonia Detection in Bulk Gases
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T-I Max EtO™

TIGER OPTICS™ CRDS Analyzer for Trace Ethylene Oxide
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HALO™ 3 CH2O

TIGER OPTICS™ Trace-Level Formaldehyde Detection CRDS Analyzer
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HALO™ 3 CO

TIGER OPTICS™ PPB-Level Carbon Monoxide Detection CRDS Analyzer
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HALO™ 3 CO2

TIGER OPTICS™ PPB-Level Carbon Dioxide Detection CRDS Analyzer
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HALO™ 3 D2O/HDO

TIGER OPTICS™ Trace-Level Heavy Water Detection CRDS Analyzer
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HALO™ 3 H2O

TIGER OPTICS™ Trace Moisture CRDS Analyzer for Ultra-High-Purity Gases
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HALO™ 3 CH4

TIGER OPTICS™ Trace Methane Analyzer for High-Purity Gases
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HALO™ 3 HCl

TIGER OPTICS™ Trace Hydrogen Chloride Detection CRDS Analyzer
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HALO™ 3 NH3

TIGER OPTICS™ Trace-Level Ammonia CRDS Analyzer
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HALO 3 HF

TIGER OPTICS™ Trace-level hydrogen fluoride gas analyzer
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HALO™ H2

TIGER OPTICS™ CRDS Analyzer for ppb-level Hydrogen Detection
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HALO™ H2O in N2O

TIGER OPTICS™ Trace Moisture CRDS Analyzer in Pure Nitrous Oxide
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HALO™ OK/OK+

TIGER OPTICS™ Trace & Ultra-Trace Level Oxygen CRDS Analyzer
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HALO™ LP H2O

TIGER OPTICS™ Trace Moisture in Hydride Gases CRDS Analyzer
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HALO™ RP

TIGER OPTICS™ CRDS Analyzer for Trace H2O & HF for Sub-Atmospheric Pressure
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HALO™ QRP

TIGER OPTICS™ CRDS Analyzer for Moisture Monitoring in Low Pressure Chambers
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Spark™ H2O

TIGER OPTICS™ PPB-Level Trace Moisture Detection CRDS Analyzer
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Spark™ H2O in CO2

TIGER OPTICS™ Trace Moisture Detection CRDS Analyzer in Pure Carbon Dioxide
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Spark™ CH4

TIGER OPTICS™ CRDS Trace-Level Methane Detection Analyzer
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Spark™ C2H2

TIGER OPTICS™ CRDS Trace-Level Acetylene Detection Analyzer
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Spark™ CO2

TIGER OPTICS™ CRDS Trace-Level Carbon Dioxide Detection Analyzer
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Spark+™ CO

TIGER OPTICS™ CRDS Trace-Level Carbon Monoxide Detection Analyzer
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Spark Max™ CO2

TIGER OPTICS™ CRDS Trace-Level Carbon Dioxide Detection Analyzer
Spark-Max CO2 CRDS gas analyzer

Prismatic 3™

TIGER OPTICS™ Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3 gas analyzer

Prismatic 3+™

TIGER OPTICS™ PPB Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3+ gas analyzer

T-I MAX™ AIR GHG

TIGER OPTICS™ CRDS Analyzer for Greenhouse & Air Quality Gas Monitoring
T-i-MAX-AIR GAS ANALYZER

T-I MAX X3

TIGER OPTICS™ Next Gen AMC Monitors
TIGER OPTICS T-I MAX X2_X3 Next Gen AMC Monitors

T-I MAX™ HCl

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
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T-I MAX™ HF

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
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T-I MAX™ NH3

TIGER OPTICS™ CRDS Analyzer for Airborne Molecular Contaminants in Semiconductor Cleanrooms
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T-I MAX™ CEM

TIGER OPTICS™ CRDS Analyzer for Continuous Monitoring of Airborne Molecular Contaminants
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CO-REKT™

TIGER OPTICS™ CRDS Analyzer for Trace Level Impurity for Hydrogen
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ALOHA+H2O™

TIGER OPTICS™ PPB-Level Moisture Detection in Ultra-Pure Ammonia CRDS Analyzer
Process Insights-Tiger Optics_ALOHA_H2O_2020_small-e90dd22a
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