Semiconductors are considered the brains of modern electronics. Our TIGER OPTICS™ Cavity Ring-Down Spectroscopy (CRDS) gas analyzers seamlessly detect parts-per-billion (ppb) and parts-per-trillion (ppt) levels and delivers bulk gas monitoring for trace H₂, H₂O, O₂, CH₄, CO, CO₂, Kr, NH₃, and Xe, UHP ammonia for HB LED production, tool monitoring for trace H₂O and HF, and continuous AMC monitoring for ambient HCl, HF, and NH₃. 

Specialty gases of superior quality play a vital role as raw materials and process gases across various industries. From carbon dioxide in beverages to ammonia in LED manufacturing and silane in semiconductor fabrication, maintaining high purity standards for specialty gases is critical. The presence of moisture impurities, for instance, can significantly impact the efficiency of resulting LEDs. The semiconductor industry demands ultra-high purity gases, whether it’s silane or germane for epitaxy, fluorine compounds for etching processes, or cleaning gases. Process Insights offers highly sensitive, accurate, and user-friendly analysis instruments. These instruments utilize the renowned Cavity Ring-Down Spectroscopy (CRDS) technique and cater to a wide range of specialty gases and applications.

The Purity Imperative: Specialty Gases for Critical Industries

• Beverages
• LED manufacturing 
• Semiconductor fabrication 
• Medical and pharmaceutical applications
• Aerospace and defense
• Benzotriazole Monitoring in Semiconductors with Fiber Optic UV-Vis Spectroscopy

The High-Stakes Reality of Impurities

• Moisture contamination can reduce LED brightness and lifespan
• Oxygen impurities can damage semiconductor wafers
• Carbon dioxide purity affects beverage taste and shelf life

Ultra-High Purity Demands

• Silane and germane for epitaxy processes
• Fluorine compounds for etching
• Cleaning gases for contamination control
• Nitrogen and argon for chamber purging

SALES | TRAINING INQUIRIES

AMERICAS: info.americas@process-insights.com

EMEAI (includes India): info.emeai@process-insights.com

APAC:  info.apac@process-insights.com

CHINA:  info.cn@process-insights.com

SERVICE | TECHNICAL INQUIRIES ONLY

NIR Optical Analyzers for Liquids and Gases

From dynamic chemical blending and wafer cleaning to metals concentration monitoring and on-site gas blending, precision matters.

✅ In situ monitoring improves yields, reduces chemical waste/costs, and optimizes cycle times.
✅ Detect metals contamination down to 5 ppm with GUIDED WAVE 508 UV-VIS and Clearview db.
✅ Ensure stable, on-demand gas blends with real-time NIR quality data.

With our GUIDED WAVE Clearview db product line, you get 24/7 critical process data to keep operations running at peak performance.

Cavity Ring-Down Spectroscopy (CRDS) gas analyzers from Process Insights have a long history in industrial gas, medical gas, and chemical processing, enabling the detection of moisture and other rogue impurities in process gas streams, including inert, reactive, corrosive, bulk, and specialty gases.

Cavity Ring-Down Spectroscopy (CRDS) Technology delivers a highly sensitive and precise analytical technique used for the detection and measurement of trace gases and isotopes in a sample. It is a non-destructive technique that provides quantitative measurements of molecular absorption spectra.

T-I MAX X3 Airborne Molecular Contaminant (AMC) MONITORING SOLUTION

Simultaneously Monitor HF, HCl, and NH₃ in Real-Time – Next-Generation Trace Gas Analyzers for Detection & Continuous Monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms, FOUP Cleaning Tools, Reticle Nests and Sub Fab Environments.  You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy our T-I Max™ series analyzers to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.

MAX300-TGM Advantages Include:

• Versatile and flexible analyzer – detect multiple chemicals on up to 46 sample points
• Fast measurement with high sensitivity, reducing false alarms
• Highly responsive to changes in chemical concentration – reducing down time after an event
• Streamlined operation – centralized analyzer for full facility monitoring
• Low cost of ownership and streamlined operation – decreasing complexity in maintenance and upkeep
• Industry leading application expertise and technical support with decades of experience with ambient air monitoring
• Large, user-friendly touch screen interface for at-a-glance updates with customizable alarm verifications
  
  

 VeraSpec™ APIMS™

Semiconductor manufacturers need the ability to continuously verify the purity of process gases in real-time and detect trace contamination at concentrations in the low parts-per-trillion (ppt).  Monitor a wide range of gases and gas mixtures with the stability that provides the long-term repeatability required in most applications.

Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

VerSpec APIMS Benefits Include:

• Industry-best lower detection limits (LDLs) for bulk gas analysis
• Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O₂, H₂, H₂O, CH₄, CO, CO₂, Xe and more
• Well-established, powerful mass spectrometry technology
• Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration