CRDS Gas Analyzer
ENABLING PPT MOISTURE DETECTION IN SEMICONDUCTOR MANUFACTURING
As the International Roadmap for Devices and Systems (IRDS) drives the semiconductor industry beyond Moore’s Law and sets the requirements for the next decade, we deliver our TIGER OPTICS™ HALO KA Max™ H2O ppt-level moisture detection CRDS gas analyzer.
Built upon our customer-acknowledged and our renowned time-based technology – Continuous-Wave Cavity Ring-Down (CRDS) Spectroscopy—users can verify moisture impurity levels down to 100 ppt in semi bulk gases, with drift-free stability and virtually instant response to moisture upsets. Our Halo KA Max H2O offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification. The Halo KA Max H2O excels in trace-level moisture detection in bulk gases and specialty gases used in semiconductor manufacturing.
The Halo KA Max H2O, based on our latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification. The Halo KA Max H2O excels in trace-level moisture detection in bulk gases and specialty gases used in semiconductor manufacturing.
MAXIMIZING ULTIMATE LOW-DETECTION PERFORMANCE AND SPEED OF RESPONSE, THE HALO KA MAX H2O OFFERS:
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration)
- Field proven lowest Cost of Ownership and ease of use
- Wide dynamic range—over four orders of magnitude
- Unprecedented speed of response at sub-ppb H2O levels
- Compact footprint (two Halo KA Max fit in a 19” rack)
APPLICATIONS
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL* | Precision (1σ) @ zero |
|---|---|---|---|
| H2O in N2 | 0 – 5 ppm | 100 ppt | 40 ppt |
| H2O in He | 0 – 1 ppm | 100 ppt | 10 ppt |
| H2O in Ar | 0 – 2 ppm | 100 ppt | 20 ppt |
| H2O in H2 | 0 – 4 ppm | 100 ppt | 30 ppt |
| H2O in O2 | 0 – 2.5 ppm | 100 ppt | 20 ppt |
| H2O in Clean Dry Air (CDA) | 0 – 4 ppm | 100 ppt | 30 ppt |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection Limit (LDL)* | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 2 minutes to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | ∼2 slpm in N2 (gas dependent) |
| Sample gases | See Detection Capability table |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
*The Detection limit (LDL) is defined as 3σ over 24h or the H2O drydown limit, whichever is higher
ANALYZE WITH EASE™
PPT-LEVEL MOISTURE DETECTION
FOR UHP GASES
PPT-LEVEL MOISTURE DETECTION
FOR UHP GASES
Learn about our service, technical support, spares, and our CRDS Analyzer | Performance Verification Program
Analyzer in service? Need a rental CRDS analyzer? Ask us how we can help.
SERVICE | SALES | TRAINING
Americas +1 (215) 656-4000
EMEA +49 69 20436910
China/APAC +86 400 086 0106
Other CRDS Gas Analyzer Solutions
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HALO KA Max™ H2O
HALO KA Max™ CH4
HALO KA Max™ NH3
HALO Max QCL™ CO
HALO Max QCL™ CO2
Custom CRDS Gas Analysis Solutions
GO-cart™
HALO™ 3 CH2O
HALO™ 3 CO
HALO™ 3 CO2
HALO™ 3 D2O/HDO
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HALO™ 3 CH4
HALO™ 3 HCl
HALO™ 3 NH3
HALO™ H2
HALO™ H2O in N2O
HALO™ OK
HALO™ LP H2O
HALO™ RP
HALO™ QRP
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Spark™ H2O in CO2
Spark™ CH4
Spark™ C2H2
Spark™ CO2
Spark+™ CO
Prismatic 3™
CO-REKT™
ALOHA+H2O™
T-I MAX™ HCl
T-I MAX™ HF
T-I MAX™ NH3
T-I MAX™ CEM
T-I MAX™ AIR CO2
T-I MAX™ AIR CH4
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