T-I MAX HF

CRDS Laser-Based Analyzer

SPECIFICATIONS

Performance
Operation range See Detection Capability table
Detection limit (LDL, 3σ@100s) See Detection Capability table
Precision (1σ@100s, greater of) ± 0.5% or 1/3 of LDL
Accuracy at span ± 4% of reading
Accuracy at zero ± 20 ppt
Speed of response @ 20 ppb) See Detection Capability table
Environmental conditions 10°C to 40°C, 10% to 90% RH (non-condensing)
Sample conditions 30% to 70% RH at 20°C
  20% to 50% RH at 25°C
  15% to 40% RH at 30°C
Storage temperature -10° to 50°C
Gas Handling System and Conditions*
Wetted materials                                            Optimized for ppt-level AMCs and fast speed of response
Gas connections 1/4″ PFA Swagelok® inlet & outlet
Inlet pressure Atmospheric pressure
Outlet pressure Vacuum (<10 Torr)
Flow rate ∼2 slpm @ 1 atm inlet pressure
Sample gases Cleanroom air, clean dry air (CDA) or N2
Gas temperature Up to 60°C
Dimensions
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
GO-cart 50″ x 23″ x 36″ (1270 mm x 584 mm x 914 mm)
Weight
Standard sensor 33 lbs (15 kg)
GO-cart 260 lbs (118 kg)
(excl. vacuum pump)  
Electrical and Interfaces
Platform Max series analyzers
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max. per sensor
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7″ LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent # 7,277,177  

*Vacuum source with >2 slpm @ 10 Torr required
Contact us for details about operating the analyzer at elevated inlet pressure.

To Top



Detection & Continuous Monitoring Airborne Molecular Contaminants (AMCs) in Semiconductor Cleanrooms

 

Process Insights_Tiger Optics_T-i MAX NH3

Other CRDS Gas Analyzer Solutions 

Halo KA™ H2O

Tiger Optics ppt-level Moisture Detection CRDS Analyzer
PROCESS INSIGHTS_TIGER OPTICSHALO-KA-H2O-2020_small-5afa4b8c

Halo KA MAX™ H2O

Tiger Optics CRDS Analyzer for ppt-level Moisture Detection

Halo KA MAX™ CH4

Tiger Optics CRDS Analyzer for Sub-ppb Methane Detection in Bulk Gases
HALO-KA-Max_FacingLEFT_CH4_small-4551e30e

Halo KA MAX™ NH3

Tiger Optics CRDS Analyzer for ppt-level Ammonia Detection in Bulk Gases
HALO-KA-Max_FacingLEFT_NH3_small-822f44c9

Halo MAX QCL™ CO

Tiger Optics CRDS Analyzer for ppt-level Carbon Monoxide Analysis
Process Insights_Tiger Optics QCL gas analyzer

Halo MAX QCL™ CO2

Tiger Optics CRDS Analyzer for ppt-level Carbon Dioxide Analysis
Process Insights_Tiger Optics QCL gas analyzer

Custom System

Integrated and Turnkey
Process Insights_CRDS - System Cabinet

GO-Cart™

Mobile Cart for AMC Monitoring
Go-Cart for MOBILE Cart for AMC Monitoring

Halo™ 3 CH2O

Tiger Optics Trace-Level Formaldehyde Detection CRDS Analyzer
T-I-MAX-CH2O-LEFT-small-b3e9bff0

Halo™ 3 CO

Tiger Optics PPB-Level Carbon Monoxide Detection CRDS Analyzer
HALO-3-CO2-2020_small-d9da4e9f

Halo™ 3 CO2

Tiger Optics PPB-Level Carbon Dioxide Detection CRDS Analyzer
HALO-3-CO2-2020_small-d9da4e9f

Halo™ 3 D2O/HDO

Tiger Optics Trace-Level Heavy Water Detection CRDS Analyzer
HALO-3-D2O-2020_small-9a661601

Halo™ 3 H2O

Tiger Optics Trace Moisture CRDS Analyzer for Ultra-High-Purity Gases
HALO-3-H2O-2020_small-fa525fce

Halo™ 3 CH4

Tiger Optics Trace Methane Analyzer for High-Purity Gases
Process Insights_HALO-3-CH4-2020_small-a1eb623b

Halo™ 3 HCl

Tiger Optics Trace Hydrogen Chloride Detection CRDS Analyzer
HALO-3-HCl-2020_small-ea20ac2a

Halo™ 3 NH3

Tiger Optics Trace-Level Ammonia CRDS Analyzer
HALO-3-NH3-2020_small-cb1fb6e0

Halo™ H2

Tiger Optics CRDS Analyzer for ppb-level Hydrogen Detection
Process Insights_HALO-H2-2020-3368903a

Halo™ H2O in N2O

Tiger Optics Trace Moisture CRDS Analyzer in Pure Nitrous Oxide
HALO-H2O-in-N2O-2020_small-66b8c6d1

Halo™ OK

Tiger Optics Trace Oxygen CRDS Analyzer
HALO OK

Halo™ LP H2O

Tiger Optics Trace Moisture in Hydride Gases CRDS Analyzer
HALO-LP-H2O-2020_small-65bab87a

Halo™ RP

Tiger Optics CRDS Analyzer for Trace H2O & HF for Sub-Atmospheric Pressure
HALO-QRP-2020_small-45eb7ead

Halo™ QRP

Tiger Optics CRDS Analyzer for Moisture Monitoring in Low Pressure Chambers
HALO-QRP-2020_small-45eb7ead

Spark™ H2O

Tiger Optics PPB-Level Trace Moisture Detection CRDS Analyzer
Spark-H2O-LEFT-2021_small-c9ce69e1 (1)

Spark™ H2O IN CO2

Tiger Optics Trace Moisture Detection CRDS Analyzer in Pure Carbon Dioxide
Spark-H2O-in CO2 LEFT-2021_small-c9ce69e1 (2)

Spark™ CH4

Tiger Optics CRDS Trace-Level Methane Detection Analyzer
Spark-CH4-LEFT-2021_small-73bdd5f7

Spark™ C2H2

Tiger Optics CRDS Trace-Level Acetylene Detection Analyzer
Spark-C2H2-LEFT-2021_small-3d7cf60b

Spark™ CO2

Tiger Optics CRDS Trace-Level Carbon Dioxide Detection Analyzer
Spark-CO2-LEFT-2021_small-75978239

Spark+™ CO

Tiger Optics CRDS Trace-Level Carbon Monoxide Detection Analyzer
Spark+ CO-LEFT-2021_small-24850d8d

Prismatic 3™

Tiger Optics Multi-Species CRDS Gas Analyzer
PROCESS INSGIHTS_TIGER OPTICS_Prismatic 3 gas analyzer

CO-REKT™

Tiger Optics CRDS Analyzer for Trace Level Impurity for Hydrogen
Process Insights_Tiger Optics__CO-rekt-c55fdec0

ALOHA+™ H2O

Tiger Optics PPB-Level Moisture Detection in Ultra-Pure Ammonia CRDS Analyzer
Process Insights-Tiger Optics_ALOHA_H2O_2020_small-e90dd22a

T-I MAX™ Hl

Tiger Optics CRDS Analyzer for For Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-HF-LEFT-NEW-small-589bcb7b

T-I MAX™ HF

Tiger Optics CRDS Analyzer for For Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-HF-LEFT-NEW-small-589bcb7b

T-I MAX™ NH3

Tiger Optics CRDS Analyzer for Airborne Molecular Contaminants (AMCs) in Semiconductor Cleanrooms
T-i-MAX-NH3-LEFT-NEW-small-be8b867a

T-I MAX™ CEM

Tiger Optics CRDS Analyzer for For Continuous Monitoring of Airborne Molecular Contaminants
T-i-MAX-CEM-HCl-LEFT-NEW-small-59fdec28

T-I MAX™ AIR CO2

Tiger Optics CRDS Analyzer for Carbon Dioxide Greenhouse Gas Monitoring
T-I-MAX-CO2-LEFT-small-32e69f7e

T-I MAX™ AIR CH4

Tiger Optics CRDS Analyzer for Carbon Dioxide Greenhouse Gas Monitoring
T-I-MAX-CH4-LEFT-small-25e44eb5
To Top

Solutions 

To Top

Questions? We’re here to help.