ENABLING PPT MOISTURE DETECTION IN SEMICONDUCTOR MANUFACTURING
Engineered for the most demanding purity standards, the TIGER OPTICS™ HALO KA Max™ H₂O is a cutting-edge UHP gas analyzer designed to deliver trace-level moisture detection in bulk gases, specialty gases, and semi bulk gas streams used in semiconductor manufacturing.
Built upon our renowned Continuous-Wave Cavity Ring-Down Spectroscopy (CRDS) technology—trusted and validated by customers worldwide – the HALO KA Max H₂O enables precise measurement of moisture impurities down to 100 parts per trillion (ppt). It offers drift-free stability, rapid response to process upsets, and unmatched reliability for ultra-high purity (UHP) gas monitoring.
Key Features of the HALO KA Max H₂O UHP Gas Analyzer:
- Ultra-sensitive detection of H₂O down to 100 ppt
- Optimized for UHP gases, including bulk, specialty, and semi bulk gas applications
- CRDS-based technology ensures precision, stability, and real-time performance
- Compact, all-in-one analyzer with a user-friendly interface
- Fast installation and effortless operation
- Built-in zero verification for simplified maintenance
- Ideal for semiconductor-grade gas quality control
Designed for High-Purity Gas Monitoring in Advanced Manufacturing
The HALO KA Max H₂O is built on our latest platform, combining speed, performance, and ease of use in a compact design. Whether you’re measuring moisture in nitrogen, hydrogen, argon, or complex gas mixtures, this UHP gas analyzer offers the accuracy and reliability required for process-critical environments.
MAXIMIZED LOW-DETECTION PERFORMANCE AND SPEED OF RESPONSE
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration)
- Field proven lowest Cost of Ownership and ease of use
- Wide dynamic range—over four orders of magnitude
- Unprecedented speed of response at sub-ppb H2O levels
- Compact footprint (two Halo KA Max fit in a 19” rack)
APPLICATIONS
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL* | Precision (1σ) @ zero |
|---|---|---|---|
| H2O in N2 | 0 – 5 ppm | 100 ppt | 40 ppt |
| H2O in He | 0 – 1 ppm | 100 ppt | 10 ppt |
| H2O in Ar | 0 – 2 ppm | 100 ppt | 20 ppt |
| H2O in H2 | 0 – 4 ppm | 100 ppt | 30 ppt |
| H2O in O2 | 0 – 2.5 ppm | 100 ppt | 20 ppt |
| H2O in Clean Dry Air (CDA) | 0 – 4 ppm | 100 ppt | 30 ppt |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection Limit (LDL)* | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 2 minutes to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | ∼2 slpm in N2 (gas dependent) |
| Sample gases | See Detection Capability table |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
*The Detection limit (LDL) is defined as 3σ over 24h or the H2O drydown limit, whichever is higher
SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
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