Ultimate Methane Detection
The TIGER OPTICS™ HALO KA Max™ CH₄ is a high-performance UHP gas analyzer specifically engineered for trace-level methane (CH₄) detection in bulk gases and specialty gases. Built on our industry-leading Continuous-Wave Cavity Ring-Down Spectroscopy (CRDS) platform, the HALO KA Max CH₄ enables accurate and drift-free detection of methane impurities down to 500 parts per trillion (ppt) or lower.
With our renowned time-based technology – Continuous-Wave Cavity Ring-Down Spectroscopy (CRDS) users can verify methane impurity levels down to 500 ppt or less in semi bulk gases, with drift-free stability and virtually instant response to upsets. Our HALO KA Max CH4 offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification.
Engineered for Ultra-High Purity (UHP) Gas Applications
Our advanced CRDS technology delivers virtually instantaneous response times, exceptional sensitivity, and long-term stability – making it the ideal solution for UHP gas quality monitoring. Whether you’re analyzing semi bulk gases, specialty mixtures, or high-purity process gases, the HALO KA Max CH₄ ensures you meet the stringent purity demands of today’s semiconductor fabrication processes.
Key Benefits of the HALO KA Max CH₄ Analyzer
- Ultra-low detection limits: Measures methane at or below 500 ppt
- Designed for UHP gases: Optimized for bulk and specialty gas analysis
- Instant upset response: Real-time detection of gas purity fluctuations
- Drift-free stability: Reliable long-term operation with minimal recalibration
- Compact, all-in-one form factor: Easy integration into existing gas systems
- Built-in zero verification: Streamlined maintenance and verification
Easy to Use, Easy to Trust
With fast installation, simple operation, and virtually maintenance-free performance, the HALO KA Max CH₄ empowers semiconductor manufacturers to maintain ultra-high purity standards for methane contamination—essential for reducing defects and improving process yield.
Key Features
- Parts per trillion (ppt) methane detection capability in an array of gases
- Absolute measurement (freedom from calibration)
- Field proven lowest Cost of Ownership and ease of use
- Wide dynamic range—over four orders of magnitude
- Unprecedented speed of response
- Compact footprint (two Halo KA Max fit in a 19” rack)
APPLICATIONS
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| CH4 in N2 | 0 – 8 ppm | 500 ppt | 200 ppt |
| CH4 in He | 0 – 5 ppm | 400 ppt | 140 ppt |
| CH4 in Ar | 0 – 7 ppm | 450 ppt | 150 ppt |
| CH4 in H2 | 0 – 8 ppm | 500 ppt | 200 ppt |
| CH4 in O2 | 0 – 7 ppm | 500 ppt | 200 ppt |
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection Limit (3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | ∼2 slpm in N2 (gas dependent) |
| Sample gases | See Detection Capability table |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
*The Detection limit (LDL) is defined as 3σ over 24h or the H2O drydown limit, whichever is higher
SALES | TRAINING INQUIRIES
AMERICAS: info.americas@process-insights.com
EMEAI (includes India): info.emeai@process-insights.com
APAC: info.apac@process-insights.com
CHINA: info.cn@process-insights.com
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