Our ALOHA+ H₂O CRDS gas analyzer is the ultimate moisture-in-ammonia analyzer that refines the detection to levels below 3 ppb, achieving significantly improved sensitivity compared to the leading analyzer to date. The HALO LP H₂O is the standard bearer for this application with a detection limit of 9 ppb. Both analyzers exceed the industry’s need to detect moisture in ammonia at 12 ppb or less. Higher concentrations of moisture negatively affect the luminescence of HB LEDs and diminish process yields.

High-brightness LEDs offer brighter, cooler light, with lower power consumption and longer life than traditional lighting. Tool manufacturers and the gas companies supplying ammonia use our analyzers for moisture analysis in ammonia, which is the favored source of nitrogen for the production of gallium nitride (GaN) compound semiconductor wafers. Our best-in-class analyzers can ensure ultra-dry ammonia throughout the process, from the gas bottle to the MOCVD tool. To monitor directly at the tool level, we also offer the HALO RP and HALO QRP, which are designed for low-pressure environments.

APPLICATIONS

• Ultra-High-Purity Ammonia
• MOCVD