Ultra-pure gases are crucial for semiconductor fabrication, and continuous monitoring of gas purity ensures maximum production and minimizes costly contamination. Semiconductor manufacturers require real-time verification of process gas purity and detection of trace contamination at low ppt levels.

Our ultra-high purity gas analyzers, such as the Process Insights VeraSpecAPIMS, offer speed, sensitivity, and ease of use to monitor gases like Nitrogen, Argon, Helium, Oxygen, and Hydrogen. The VeraSpecAPIMS uses Atmospheric Pressure Ionization (API) combined with a high-performance mass spectrometer, featuring a 19mm tri-filter quadrupole for optimal performance and reliability.

Benefits of Mass Spec Gas Analyzers:

• Reliable UHP gas supply
• One analyzer for all contaminants
• Real-time automated alerts
• 24/7 process protection
• Maximized wafer yields

The VeraSpec APIMS uses corona discharge ionization to ensure exceptional detection limits for trace gases. Combining EI and API ionization techniques, it provides comprehensive analysis of all components in pure gas samples. The Questor5 software enables continuous monitoring with a user-friendly, web-based interface for secure, remote access.